This tutorial is part of the Society of Vacuum Coaters (SVC) Education Program and will take place in cooperation with EFDS.
The tutorial will be presented by Allan Matthews, The University of Sheffield, United Kingdom.
This tutorial will be held on Thursday, September 16, 2010, 09:25 - 13:00 and 15:15 - 18:55, Room Dreitorspitze.
Click here for more information regarding the tutorial.
- Basics of reactive sputtering
- Flow control versus partial pressure control of the reactive gas
- Power supplies for reactive sputtering
- Reactive gas sensors
- Large area reactive sputtering
- Control systems for reactive sputtering
- Multiple gas reactive sputtering
- Reactive high power pulsed magnetron sputtering