Program
Tuesday, September 18, morning Room Richard-Strauss
| 08:30 - 09:15 Plenary Lecture PL0002 |
Chair: Günter Bräuer, Braunschweig, Germany Nonthermal biocompatible plasma (NBP) sources and their applications to plasma medicine, agriculture and food technologies Eun Ha Choi1, Nagendra Kaushik1, Gyungsoon Park1, Sanghye Ji2 1PBRC/Kwangwoon University, Seoul, South Korea, 2PTRC/National Fusion Reseach Institute, Kunsan, South Korea Abstract |
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| Oral Session | Session 7 - Physical vapour deposition (PVD) I
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| 09:25 - 09:55 Keynote Lecture KN0700 |
Magnetron sputtered hard and fracture resistant metal-boron-carbon based coatings Petr Vasina1, Pavel Soucek1, Mostafa Alishahi1, Saeed Mirzaei1, Lukas Zabransky1, Monika Stupavska1, Vilma Bursikova1, Zsolt Czigany2, Katalin Balazsi2, Jiri Bursik3 1Masaryk University, Brno, Czech Republic, 2Hungarian Academy of Sciences, Budapest, Hungary, 3Academy of Sciences of Czech Republic, Brno, Czech Republic Abstract |
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| 09:55 - 10:15 OR0701 |
Sputter deposition of Mo-based multicomponent thin films from rotary targets: experiment and simulation Martin Rausch1, Márius Pavlovič2, Patrice Kreiml3, Megan J. Cordill3, Jörg Winkler4, Christian Mitterer5 1Montanuniversität Leoben, Funktionale We, Leoben, Austria, 2Slovak University of Technology, Bratislava, Austria, 3Erich Schmid Institute of Mat. Sci., Leoben, Austria, 4Plansee SE, Reutte, Austria,5Montanuniversität Leoben, Leoben, Austria Abstract |
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| 10:15 - 10:35 OR0702 |
ICP-Assisted Reactive Sputter Deposition and Plasma-Enhanced Annealing Processes for Low-Temperature Formation of High-Mobility In-Ga-Zn-O Thin-Film Transistors Yuichi Setsuhara1, Kosuke Takenaka2, Masashi Endo2, Giichiro Uchida2, Akinori Ebe3 1JWRI. Osaka University, Ibaraki, Osaka, Japan, 2JWRI,Osaka University, Ibaraki, Osaka, Japan, 3EMD Corporation, Yasu, Shiga, Japan Abstract |
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| 10:35 - 10:55 OR0703 |
Impact of alloying on properties and oxidation resistance of magnetron sputtered Zr–Hf–Cu based metallic glasses Petr Zeman1, Michal Zitek1, Michaela Kotrlova1, Radomir Cerstvy1 1University of West Bohemia, Plzen, Czech Republic Abstract |
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| 11:05 - 11:15 | Coffee break |
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| 11:15 - 11:35 OR0704 |
Predicting Behavior for Non-saturated Reactive Sputtering Processes Soren Berg1, Tomas Nyberg1 1Angstrom Laboratory, Uppsala University, Uppsala, Sweden Abstract |
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| 11:35 - 11:55 OR0705 |
Niobium coating of large-area copper substrates for CERN accelerating structures Alban Sublet1, Fabio Avino1, Sergio Calatroni1, Pedro Costa Pinto1, Thibaut Richard1, Guillaume Rosaz1, Wil Vollenberg1 1CERN, Geneva 23, Switzerland Abstract |
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| 11:55 - 12:15 OR0706  |
On the nature of suboxide formation during reactive DC magnetron sputtering Roeland Schelfhout1, Koen Strijckmans1, Diederik Depla1 1Ghent University, Ghent, Belgium Abstract |
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| 12:15 - 12:35 OR0707 |
The Time Domain Effect of Micropulse on Nb Coatings Generated by DOMS Y.G. Li1, Z.T. Jiang1, N. Pan1, H. Yuan1, M.K. Lei1 1Dalian University of Technology, Dalian, China Abstract |
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| 12:35 - 12:55 OR0708 |
Optical and Electrical Properties of reactive/nonreactive Magnetron Deposited SnZnOx Coatings Annealed at Various Temperatures Martin Kormunda1, Andreas Hertwig2, Petr Rysanek1, Lyuboslav Ivanov3 1J.E. Purkinje University, Usti nad Labem, Czech Republic, 2Bundesanstalt für Materialforschung BAM, Berlin, Germany, 3Angel Kanchev University of Ruse, Ruse, Bulgaria Abstract |
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| 12:55 - 14:20 | Lunch break |
Tuesday, September 18, morning Room Zugspitze
| 08:30 - 09:15 |
Plenary Lecture PL0002, Room Richard-Strauss | ||||
| Oral Session | Session 8 - (Nano-) particles and powders in plasmas
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| 09:25 - 09:55 Keynote Lecture KN0800 |
PSE Early Career Award 2018Magnetron Sputtering as a Tool for Producing Metallic and Bimetallic Multifunctional Nanoparticles: The Case of Zn-FeSebastian Calderon1, Isabel Carvalho2, Albano Cavaleiro2, Sandra Carvalho3, Paulo Ferreira1 1International Iberian Nanotechnology Lab, Braga, Portugal, 2SEG-CEMMPRE, University of Coimbra, Coimbra, Portugal, 3CFUM-UP, University of Minho, Guimaraes, Portugal Abstract |
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| 09:55 - 10:15 OR0801 |
Bi-metallic, metastable and Janus Nanoparticles formed by combined Plasma-in-liquid and laser treatments Alexandre Nominé1, Natalie Tarasenka2, Alena Nevar2, Mikhail Nedelko2, Jaafar Ghanbaja1, Stéphanie Bruyère1, Hiba Kabbara1, Valentin Milichko3, Thierry Belmonte1, Nikolai Tarasenko2 1Institut Jean Lamour, Nancy, France, 2B.I. Stepanov Institute of Physics, Minsk, Belarus, 3Metalab - ITMO University, St Petersburg, Russian Federation Abstract |
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| 10:15 - 10:35 OR0802 |
Nanoparticles synthesis from solid precursor using RF-ICP plasma. A tailored process for tailored nanoparticles. Emile HAYE1, Yan BUSBY1, Mathieu DA SILVA PIRES1, Florian BOCCHESE1, Laurent HOUSSIAU1 1UNamur - Namur Institute of Matter, NAMUR, Belgium Abstract |
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| 10:35 - 10:55 OR0803 |
Deposition of metal core@plasma polymer shell nanoparticles using gas aggregation cluster source Hynek Biederman1, Artem Shelemin1, Daniil Nikitin1, Pavel Pleskunov1, Andrei Choukourov1, Ondrej Kylian1, Jan Hanus1, Miroslav Cieslar2, Danka Slavinska1 1Charles University, KMF MFF, Prague 8, Czech Republic, 2Charles University, KFM MFF, Prague 8, Czech Republic Abstract |
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| 11:05 - 11:15 | Coffee break |
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| 11:15 - 11:35 OR0804 |
Phase-resolved nanoparticle collection with biased substrates during particle growth cycles in an acetylene plasma reactor Zahra Marvi1, Erik von Wahl1, Thomas Trottenberg1, Holger Kersten1 1Christian-Albrechts-Universität, Kiel, Germany Abstract |
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| 11:35 - 11:55 OR0805 |
Sputtering metals on liquid substrates for nanoparticle synthesis. Stephanos Konstantinidis1, Xavier Carettte1, Benoît Debièvre1, David Cornil1, Jérôme Cornil1, Philippe Leclère1, Nicolas Gautier2, Eric Gautron2, Abdel Azziz El Mel2, Jean-Marie Raquez1 1University of Mons, Mons, Belgium, 2Institut des Matériaux Jean Rouxel, Nantes, France Abstract |
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| 11:55 - 12:15 OR0806 |
A strategy for producing advanced nanoparticles, nanowires and nanotrusses: dual-target High Power Pulsed Hollow Cathode Sputtering Sebastian Ekeroth1, Shuga Ikeda2, Peter Münger1, Robert Boyd1, Joakim Ekspong3, Thomas Wågberg3, Ludvig Edman3, Nils Brenning4, Ulf Helmersson1 1Linköping University, Linköping, Sweden, 2Tokyo Metropolitan University, Tokyo, Japan, 3Umeå University, Umeå, Sweden, 4KTH Royal Institute of Technology, Stockholm, Sweden Abstract |
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| 12:15 - 12:35 OR0807 |
Fast and Cost-Efficient Synthesis of Zinc Oxide Nanowires with an Atmospheric Pressure Plasma Jet Alexander M. Schwan1, Bernhard Graumann2, Daniel Heim2, Andreas Hinterer3, Philipp Stögmüller3, Jürgen M. Lackner1, Wolfgang Waldhauser1 1Joanneum Research, Niklasdorf, Austria, 2FH Oberösterreich, Wels, Austria, 3INOCON Technologie GmbH, Attnang Puchheim, Austria Abstract |
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| 12:35 - 12:55 OR0808 |
Modeling and Experimental Study of a Wurster type Fluidized Bed Reactor coupled with a Pulsed Arc Air Blown Atmospheric Pressure Plasma Jet for the treatment of Polypropylene Powders seyedshayan tabibian1, Farzaneh Arefi Khonsari1, Mikel Leturia2, Mario Moscosa Santillan3, Khashayar Saleh2, Jerome Pulpytel1 1UPMC Sorbonne university, Paris, France, 2UTC, TIMR, Compiègne, France, 3Autonomous University of San Luis Potosi, San Luis Potosi, Mexico Abstract |
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| 12:55 - 14:20 | Lunch break |
Tuesday, September 18, morning Room Olympia
| 08:30 - 09:15 | Plenary Lecture PL0002, Room Richard-Strauss | ||||
| Oral Session | Session 9 - Protective and tribological coatings I
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| 09:25 - 09:55 Keynote Lecture KN0900 |
MoS2 based nanocomposite films: structural designing and tribological properties Peng Wang1, Jiao Xu1, Ming Hu1, Liqiang Chai1, Weimin Liu1 1Lanzhou Institute of Chemical Physics, Lanzhou, China Abstract |
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| 09:55 - 10:15 OR0901 |
Effect of surface self-adaptation on the tribology of the Mo-S-C coatings Tomas Vitu1, Tomas Polcar1, Teodor Huminiuc2, Gary Doll3, Etienne Bousser4, Allan Matthews4 1CTU in Prague, Fac. of Electrical Eng., Prague 6, Czech Republic, 2University of Southampton, nCATS, Southampton, United Kingdom, 3University of Akron, Dept. of Civil Eng., Akron, United States, 4University of Manchester, School of Mat., Manchester, United Kingdom Abstract |
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| 10:15 - 10:35 OR0902 |
Advanced coating design as an effective tool for protective coatings operating under severe conditions Hynek Hruby1, Stefan Klima2, Nikolaus Jäger2, Michael Meindlhumer2, Miroslav Zetek3, Rostislav Daniel2 1eifeler-Vacotec GmbH, Düsseldorf, Germany, 2Montanuniversität Leoben, Leoben, Austria, 3University of West Bohemia, Plzeň, Czech Republic Abstract |
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| 10:35 - 10:55 OR0903 |
New nanostructured tribological coating for energy efficient engine components Ladislaus Dobrenizki1, Ricardo Henrique Brugnara1, Edgar Schulz1, Yashar Musayev1, Stephan Tremmel2, Sandro Wartzack2 1Schaeffler AG, Herzogenaurach, Germany, 2Engineering Design, Universität Erlangen, Erlangen, Germany Abstract |
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| 11:05 - 11:15 | Coffee break |
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| 11:15 - 11:35 OR0904 |
Addition of Ta or/and Y in Al-Ti-N base hard PVD coating: what are the individual and conjugated effects of these additional elements on their oxidation and wear property at high temperature Patrick CHOQUET1, Rémi ANINAT1, Jean.Baptiste CHEMIN1, Nathalie VALLE1, Claude MICHOTTE2, Laurent BOURGEOIS2 1Luxembourg Institute of Sciences and Tec, Belvaux, Luxembourg, 2CERATIZIT, Mamer, Luxembourg Abstract |
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| 11:35 - 11:55 OR0905 |
Tribological investigations with ultra-high lateral and depth resolution Thomas Chudoba1 1ASMEC GmbH, Dresden, Germany Abstract |
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| 11:55 - 12:15 OR0906 |
Novel entropy-stabilized ultra high temperature ceramics thin films prepared by magnetron sputtering Sergei Zenkin1, Stepan Linnik1, Aleksandr Gaydaychuk1, Stanislav Demchenko1, Denis Zelentsov1 1Tomsk Polytechnic University, Tomsk, Russia Abstract |
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| 12:15 - 12:35 OR0907 |
Plasma steel surface preparation and performance of
low vacuum PVD coatings Ruud Westerwaal1, Ruud Westerwaal1, Jorgen van de Langkruis1, Edzo Zoestbergen1 1Tata Steel IJmuiden, Velsen-Noord, Netherlands Abstract |
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| 12:35 - 12:55 OR0908 |
Corrosion Protection of Mild Steel Substrates for Complex Tribological and Corrosive Stresses by Innovative PVD Coatings Holger Hoche1, Casper Pusch1, Matthias Oechsner1 1Center for Engineering Materials, TU-DA, Darmstadt, Germany Abstract |
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| 12:55 - 14:20 | Lunch break |
Tuesday, September 18, afternoon Room Richard-Strauss
| 14:20 - 15:05 Plenary Lecture PL0003 |
Chair: Michael Zeuner, Chemnitz, Germany Nanogenerator for self-powered systems, robotics, artificial intelligence and blue energy Zhong Lin Wang1, Zhong Lin Wang2 1Georgia Institute of Technology, Atlanta, United States, 2Beijing Institute of Nanoenergy, CAS, Beijing, China Abstract |
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| Oral Session | Session 10 - Protective and tribological coatings II
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| 15:15 - 15:45 Keynote Lecture KN1000 |
PSE Early Career Award 2018Self-lubricant and multilayered coatings as a solution for machining operationsFilipe Fernandes1, T. Polcar2, A. Cavaleiro3 1CFUM-UP, Physics Department, Guimarães, Portugal, 2Czech Technical University in Prague, Prague, Czech Republic, 3SEG-CEMMPRE, Coimbra, Portugal Abstract |
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| 15:45 - 16:05 OR1001 |
Plasma Boriding of Low Alloyed Steel Peter Kaestner1, Guenter Braeuer2 1Inst. for Surface Technology, TU Braunsc, Braunschweig, Germany, 2Inst. for Surface Technology, Braunschweig, Germany Abstract |
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| 16:05 - 16:25 OR1002 |
Effect of Plasma Nitriding Pretreatment on the Mechanical
Properties of AlCrSiN Coated Tool Steels Siddhant Amrutwar1, YinYu Chang1 1National Formosa University, Yunlin, Taiwan Abstract |
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| 16:25 - 16:45 OR1003 |
Opportunities of Surface Solutions for Automotive Applications Jörg Vetter1, Jürgen Becker1, Peter Ernst2, Jürgen Crummenauer1, Arnd Müller3, Helmut Rudigier3 1Oerlikon Balzers Coating Germany GmbH, Bergisch Gladbach, Germany, 2Oerlikon Metco AG, Wohlen, Switzerland, 3Oerlikon Surface Solutions AG, BTS, Balzers, Liechtenstein Abstract |
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| 16:45 - 17:15 | Coffee break |
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| 17:15 - 17:35 OR1004 |
Functional characterization of hybrid surfaces: dimple-shaped anodized Al alloy surfaces coated with WS-CF sputtered coatings Albano Cavaleiro1, Simone Rodrigues1, Sandra Carvalho2, Albano Cavaleiro1 1University of Coimbra, Coimbra, Portugal, 2University of Minho, Guimaraes, Portugal Abstract |
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| 17:35 - 17:55 OR1005 |
Development of Hybrids Nanocomposites materials based on graphene and siloxane polymer by DBD Discharges to Improve the Corrosion Behaviour of Steel ABDESSADK ANAGRI1, Catherine Debiemme-Chouvy2, Jerome Pulpytel2, Mai Tran2, Alibi Baitukha2, Farzaneh Arefi-Khonsari2 1LISE - CNRS UMR8235, Paris, France, 2LISE - CNRS UMR8235 Sorbonne Université, Paris, France Abstract |
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| 17:55 - 18:15 OR1006 |
Preparation and characterization of multi-layer barrier films on PET substrate via PECVD Maojin Dong1, Wenqiang Dang1, Yudong Feng1, Dan He1, Zhonghua Li1, Xiaojun Wang1 1Lanzhou Institute of Physics, Lanzhou, China Abstract |
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| 18:15 - 18:35 OR1007 |
Surface selective plasma-enhanced CVD of hard carbon films Masaharu Shiratani1, Sung-Hwa Hwang1, Hyunwoong Seo1, Naho Itagaki1, Kazunori Koga1 1Kyushu University, Fukuoka, Japan Abstract |
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| 20:30 - 21:30 | Poster Session 2, Foyer Physical vapour deposition (PVD); (Nano-) particles and powders in plasmas; Plasma treatment and Cleaning |
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| 18:45 - 23:00 | Industrial Evening, Room Werdenfels, Foyer, Restaurant |
Tuesday, September 18, afternoon Room Zugspitze
| 14:20 - 15:05 | Plenary Lecture PL0003, Room Richard-Strauss | ||||
| Oral Session | Session 11 - Functionalization of surfaces
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| 15:15 - 15:45 Keynote Lecture KN1100 |
“Smart” plasma micro-nanotextured surfaces and microsystems Evangelos Gogolides1, Angeliki Tserepi2, Katerina Tsougeni2, Kosmas Ellinas2, Anastasia Kanioura2, Panagiota Petrou2, Sotirios Kakabakos2, Aggelos Zeniou2 1INN - NCSR Demokritos, Aghia Paraskevi - Attiki, Greece, 2NCSR Demokritos, Aghia Paraskevi-Attiki, Greece Abstract |
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| 15:45 - 16:05 OR1101 |
On the uplift phenomena induced by plasma assisted nitriding
of the lightweight intermetallic FeAl40 grade 3 alloy Julien Martin1, Pierre Francois2, Grégory Marcos2, Sébastien Allain2, Thierry Czerwiec2 1Institut Jean Lamour - UMR 7198 CNRS, Nancy, France, 2Institut Jean Lamour & Labex Damas, Nancy, France Abstract |
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| 16:05 - 16:25 OR1102 |
Nanowire Bundles to Repel High-Speed Waterdrops on Polymer Surface by Plasma Nanotexturing Y.P. Li1, X.Y. Li1, X. Liu1, M.K. Lei1 1Dalian University of Technology, Dalian, China Abstract |
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| 16:25 - 16:45 OR1103 |
Optimization of Inkjet Printability of Polypropylene by Plasma Treatment Elena Guillén Rodríguez1, Julia Kurzmann1, Tina Mitteramskogler1, Hans Leichtfried1, Iurii Gnatiuk2, Dieter Holzinger2, Ramon Escobar Galindo3 1Profactor GmbH, Steyr-Gleink, Austria, 2TIGER Coatings GmbH & Co KG, Wels, Austria, 3Universidad de Cadiz, Puerto Real, Cadiz, Spain Abstract |
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| 16:45 - 17:15 | Coffee break |
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| 17:15 - 17:35 OR1104 |
Combinatorial modification of metal surfaces by dielectric barrier discharges using 2D gradients Andreas Czerny1, Steffen Knust2, Teresa de los Arcos de Pedro2, Tobias Krüger1, Maurice Friedrichs-Schucht1, Guido Grundmeier2, Claus-Peter Klages1 1Institut für Oberflächentechnik / TUBS, Braunschweig, Germany, 2TMC / University Paderborn, Paderborn, Germany Abstract |
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| 17:35 - 17:55 OR1105 |
Effect of plasma functionalization on the performance of superconducting microwave resonators for quantum computing applications Evgeniya Lock1, Evgeniya Lock1, Peng Xu2, Tim Kohler2, Lizmarie Camacho3, Yaniv Rosen4, Kevin Osborn2 1Naval Research Laboratory, Washington DC, United States, 2Laboratory of Physical Sciences, College Park, United States, 3Pontificial Catholic University, Puerto Rico, United States,4Lawrence Livermore National Laboratory, Livermore, United States Abstract |
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| 17:55 - 18:15 OR1106 |
Sequential run of the PEO process with various current waveforms Vitalios Ntomprougkidis1, Julien Martin1, Alexandre Nominé1, Cedric Noël1, Gerard Henrion1 1Institut Jean Lamour, Nancy, France Abstract |
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| 18:15 - 18:35 OR1107 |
Role of Plasma ion flux in GaSb nanodots pattern formation for sensing and plasmonic solar cell applications Mukesh Ranjan1 1Institute for Plasma Research, Gandhinagar, India Abstract |
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| 20:30 - 21:30 | Poster Session 2, Foyer | ||||
| 18:45 - 23:00 | Industrial Evening, Room Werdenfels, Foyer, Restaurant |
Tuesday, September 18, afternoonRoom Olympia
| 14:20 - 15:05 | Plenary Lecture PL0003, Room Richard-Strauss | ||||
| Industrial Workshop | MEMS in our daily life
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15:15-15:45 IW01 |
MEMS at Bosch – Products and their hardware and process technology demands Andrea Urban1 1Robert Bosch GmbH, Reutlingen, Germany Abstract |
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| 15:45-16:05 IW02 |
Challenges in thin film deposition of magnetoresistive Sensors Frederick Casper1, Jürgen Wahrhusen1, Ronald Lehndorff1 1Sensitec GmbH, Mainz, Germany Abstract |
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| 16:05-16:25 IW03 |
Heatable Scanning Probes, from Data Storage to Nanolithography Armin W. Knoll1 1IBM Research GmbH, Rüschlikon, Switzerland Abstract |
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| 16:25-16:45 IW04 |
Piezoelectric MEMS: Materials, Devices and Applications Ulrich Schmid1, Michael Schneider1 1Inst. of Sensor und Actuator Systems, TU, Wien, Austria Abstract |
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| 16:45-17:15 | Coffee break |
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| 17:15-17:35 IW05 |
Thin film solutions for MEMS and Sensors Maurus Tschirky1, Bernd Heinz1, Jörg Patscheider1, Claudiu Falub1 1Evatec AG, Trübbach, Switzerland Abstract |
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| 17:35-17:55 IW06 |
Plasma techniques as enabler for customized MEMS-application Achim Bittner1 1Hahn-Schickard, Villingen-Schwenningen, Germany Abstract |
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| 17:55-18:15 IW07 |
Advanced Ion Beam Trimming Technologies for Recent and Newly Developing MEMS-Applications Matthias Nestler1, Thoralf Dunger1, Carsten Schulze1, Michael Zeuner1 1scia Systems GmbH, Chemnitz, Germany Abstract |
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| 20:30 - 21:30 |
Poster Session 2, Foyer | ||||
| 18:45 - 23:00 |
Industrial Evening, Room Werdenfels, Foyer, Restaurant |