Program
Tuesday, September 11, morning Room Richard-Strauss
| 08:30 - 09:15 Plenary Lecture PL0002 |
Chair: Riccardo d'Agostino, Bari, Italy Bioactivation of surfaces using embedded radicals: A platform technology for harnessing nature’s nanomachines Marcela Bilek1, Alexey Kondyurin1, Stacey L Hirsh1, Elena Kosobrodova1, Daniel V Bax2, Anna Waterhouse2, Yongbai Yin1, Neil J Nosworthy3, David R McKenzie1, Anthony S Weiss2 1School of Physics, A28, University of Sydney, Australia, 2School of Molecular Biosciences, G08, University of Sydney, Australia, 3School of Medical Sciences, F13, University of Sydney, Australia Abstract | Extended Abstract |
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| Oral Session | Session 7 - Physical Vapour Deposition II
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| 09:25 - 09:55 Keynote Lecture KN0700 |
On the deposition rate during High-Power Impulse Magnetron Sputtering. Stephanos Konstantinidis1 1Université de Mons, Mons, Belgium Abstract | Extended Abstract |
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| 09:55 - 10:15 OR0701 |
3D - PIC-MC simulation of DC magnetron sputter discharges at realistic plasma densities Andreas Pflug1, Michael Siemers1, Thomas Melzig1, Bernd Szyszka1, Ante Hecimovic2, Teresa de los Arcos2, Jörg Winter2 1Fraunhofer IST, Braunschweig, Germany, 2Ruhr-Universität Bochum, Bochum, Germany Abstract | Extended Abstract |
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| 10:15 - 10:35 OR0702 |
Balanced / unbalanced planar magnetron plasma behaviour.
Microscopic analysis by PIC-MCC modelling of the ion flux on
thermal probes Lise Caillault1, Pierre-Antoine Cormier2, Rémi Dussart2, Nadjib Semmar2, Laurent Schwaederle2, Anne-Lise Thomann2, Tiberiu Minea3 1Université Paris-Sud, Orsay, France, 2GREMI UMR 6606 Université Orléans BP6744, Orléans, France, 3LPGP UMR 8578 Université Paris Sud, Orsay, France Abstract | Extended Abstract |
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| 10:35 - 10:55 OR0703 |
Plasma drift effect in dual magnetron – fundamental properties and implications Pavel Baroch1, Richard Jilek1, Libuse Peckova1, Andrea Dagmar Pajdarova1, Jindrich Musil1 1University of West Bohemia, Plzen, Czech Republic Abstract | Extended Abstract |
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| 10:55 - 11:15 | Coffee break |
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| 11:15 - 11:35 OR0704 |
Plasma properties during RF magnetron sputtering of lithium phosphorous oxynitride thin films Eugen Stamate1, Ane Sælland Christiansen1, Søren H. Jensen1, Poul Norby1, Peter Holtappels1 1Technical University of Denmark, Roskilde, Denmark Abstract | Extended Abstract |
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| 11:35 - 11:55 OR0705 |
High rate reactive magnetron sputtering of oxides using sputtering yield amplification Tomas Kubart1, Tomas Nyberg1, Rüdiger Schmidt2, Michael Austgen2, Matthias Wuttig2, Andreas Pflug3, Michael Siemers3, Soren Berg4 1Uppsala University, Uppsala, Sweden, 2RWTH Aachen University, Aachen, Germany,3Fraunhofer IST, Braunschweig, Germany, 4Uppsala university, Uppsala, Sweden Abstract | Extended Abstract |
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| 11:55 - 12:15 OR0706 |
ION FLUX–FILM STRUCTURE RELATIONSHIP DURING REACTIVE MAGNETRON SPUTTERING OF TUNGSTEN. Axel Hemberg1, Stephanos Konstantinidis2, Jean-pierre Dauchot2, Rony Snyders2 1MateriaNova, Mons, Belgium, 2University of Mons, ChIPS, Mons, Belgium Abstract | Extended Abstract |
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| 12:15 - 12:35 OR0707 |
On the Dependence of the Deposition Rate on the Structure of Magnetron-sputtered Alumina Thin Films Nis Dam Madsen1, Michael Sillassen1, Bjarke Holl Christensen2, Sascha Louring1, Anders Nørløv Berthelsen1, Klaus Pagh Almtoft2, Lars Pleth Nielsen2, Jørgen Bøttiger1 1Aarhus University, Aarhus, Denmark, 2Danish Technological Institute, Aarhus, Denmark Abstract | Extended Abstract |
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| 12:35 - 12:55 OR0708 |
In situ spectrophotometry and X-ray diffraction investigations during the oxidation of copper oxide thin films Jean-Francois Pierson1, Guangjia Liu1, Pascal Boulet1, Sylvie Migot1 1Institut Jean Lamour / Dpt CP2S, Nancy, France Abstract | Extended Abstract |
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| 12:55 - 13:15 OR0709 |
Modification of PVD Coatings to Cover Surface Imperfections Herbert Scheerer1, Elena Maja Slomski2, Torsten Troßmann2, Matthias Oechnser2 1MPA/IfW, Darmstadt, Germany, 2TU-Darmstadt, Darmstadt, Germany Abstract | Extended Abstract |
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| 13:15 - 14:20 | Lunch break |
Tuesday, September 11, morning Room Zugspitze
| 08:40 - 09:15 |
Plenary Lecture PL0002, Room Richard-Strauss | ||||
| Oral Session | Session 8 - Nanostructures and Nanoparticles
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| 09:25 - 09:55 Keynote Lecture KN0800 |
Microplasmas for gas-phase and liquid-based nanoscale engineering Davide Mariotti1 1NIBEC - University of Ulster, Newtownabbey, United Kingdom Abstract | Extended Abstract |
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| 09:55 - 10:15 OR0801 |
On Synthesis of Nanoparticles and Carbon Nanotubes in Microwave Plasma Torch Lenka Zajickova1, Petr Synek1, Ondrej Jasek1, Adam Obrusnik1 1Masaryk University, Brno, Czech Republic Abstract | Extended Abstract |
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| 10:15 - 10:35 OR0802 |
Thermal and electrical characterization of thin carbon nanotubes films Mireille Gaillard1, Éliane Amin-chalhoub2, Nadjib Semmar2, Agnès Petit2, Anne-Lise Thomann2, Chantal Boulmer-Leborgne2 1GREMI-Univ. Orleans, Orleans, France, 2GREMI-Univ. Orléans, Orléans, France Abstract | Extended Abstract |
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| 10:35 - 10:55 OR0803 |
Influence of the nano-structure and composition of titanium nitride based substrate on the carbon nanotubes grown by CVD Mónica Morales Corredor1, S. Cucatti1, J.J. S. Acuña2, O. Antonin3, M.C. Hugon3, N. Marsot3, B. Bouchet-Fabre4, T. Minea3, F. Alvarez1 1UNICAMP, Campinas, Brazil, 2UFSC, Laboratório Central de Microscopia Eletrônica, Florianopolis, Brazil, 3Laboratoire de Physique des Gaz et des Plasmas, Bat 210, Université Paris Sud-XI, Orsay, France, 4Laboratoire Francis Perrin, CEA-Saclay/CNRS,IRAMIS/SPAM, 91191 Gif sur Yvette Cedex, France Abstract | Extended Abstract |
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| 10:55 - 11:15 | Coffee break |
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| 11:15 - 11:35 OR0804 |
Controlled growth of copper oxide nanostructures via local oxidation by an atmospheric pressure micro-afterglow Thomas Gries1, Ayman Altaweel1, Thierry Belmonte1 1Institut Jean Lamour - CNRS, Nancy Cedex, France Abstract | Extended Abstract |
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| 11:35 - 11:55 OR0805 |
Fabrication of heterostructured M@M´Ox Nanorods by low temperature PECVD Ana Borras1, Manuel Macias-Montero2, Angel Barranco2, Jose Cotrino2, Juan Espinos2, Agustin R. González-Elipe2 1ICMS (CSIC-US), Sevilla, Spain, 2ICMSE (CSIC-US), Seville, Spain Abstract | Extended Abstract |
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| 11:55 - 12:15 OR0806 |
Nanostructured thin films of yttria-stabilized zirconia Jerika Suely Lamas1, Wouter P. Leroy1, Diederik Depla1 1Research Group DRAFT, Ghent University, Gent, Belgium Abstract | Extended Abstract |
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| 12:15 - 12:35 OR0807 |
Magnetron deposited Fe:SnO2 films with controlled morphology and a SPR gas sensors application Martin Kormunda1, Jaroslav Pavlik1, Andreas Hertwig2, Alida Nooke2, Uwe Beck2, Andreas Krause2, Hannes Kruger2, Jörg Steinbach3 1J.E. Purkinje University, Usti nad Labem, Czech Republic, 2BAM Federal Institute for Materials Research and Testing, Berlin, Germany, 3Technische Universität Berlin, Berlin, Germany Abstract | Extended Abstract |
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| 12:35 - 12:55 OR0808 |
Tailoring of surface properties by means of nanoparticles Pavel Solar1, Ondrej Kylian1, Martin Petr1, Oleksandr Polonskyi1, Danka Slavinska1, Marta Vandrovcova2, Hynek Biederman1 1Charles University in Prague, Prague, Czech Republic,2Institute of Physiology ASCR, Prague, Czech Republic Abstract | Extended Abstract |
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| 12:55 - 13:15 OR0809 |
Preparation of nanostructured silver layer and tuning of its optical behavior Jiri Bulir1, Michal Novotny1, Jan Lancok1, Ladislav Fekete1, Marek Skeren2 1Institute of Physics, ASCR, Prague, Czech Republic, 2Czech Technical University in Prague, Prague, Czech Republic Abstract | Extended Abstract |
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| 13:15 - 14:20 | Lunch break |
Tuesday, September 11, morning Room Olympia
| 08:40 - 09:15 | Plenary Lecture PL0002, Room Richard-Strauss | ||||
| Oral Session | Session 9 - Plasma CVD and Plasma Polymerization
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| 09:25 - 09:55 Keynote Lecture KN0900 |
Plasma polymers used for controlled interphase in polymer composites Vladimir Cech1, Adam Babik1, Antonin Knob1, Erik Palesch1 1Brno University of Technology, Brno, Czech Republic Abstract | Extended Abstract |
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| 09:55 - 10:15 OR0901 |
Control of Film Density and Porosity of Functional Plasma Polymers Dirk Hegemann1, Johannes Drosten1, Barbara Hanselmann1, Martin Drabik1, Enrico Körner1 1Empa, St.Gallen, Switzerland Abstract | Extended Abstract |
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| 10:15 - 10:35 OR0902 |
Study of the transition between capacitive and inductive modes on propanethiol plasma polymer properties: correlation between plasma and film chemistry Damien Thiry1, Nikolay Britun2, Stephanos Konstantinidis2, Jean-Pierre Dauchot2, Maxime Guillaume3, Jérôme Cornil3, Rony Snyders2 1University of Mons, Mons, Belgium, 2University of Mons, ChIPS, Mons, Belgium, 3University of Mons, CMN, Mons, Belgium Abstract | Extended Abstract |
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| 10:35 - 10:55 OR0903 |
Amino and carboxylic group-containing films – comparison of plasma polymers and electrospray-deposited polyallylamine and polyacrylic acid films
Jörg Friedrich1, Renate Mix1, Gundula Hidde1, Rolf-Dieter Schulze1, Korinna Altmann1 1BAM, Berlin, Germany Abstract | Extended Abstract |
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| 10:55 - 11:15 | Coffee break |
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| 11:15 - 11:35 OR0904 |
Mechanical properties of plasma polymer films controlled by RF power Erik Palesch1, Sona Kontarova1, Vladimir Cech1 1Brno University of Technology, Brno, Czech Republic Abstract | Extended Abstract |
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| 11:35 - 11:55 OR0905 |
Diene and dienophile functionalized surfaces by combining atmospheric pressure plasma copolymerization and gas phase reactions for reversible adhesion. Anton Manakhov1, Maryline Moreno-Couranjou1, Nicolas Boscher1, Patrick Choquet1, Jean-Jacques Pireaux2 1CRP - Gabriel Lippmann, Belvaux, Luxembourg, 2Facultés Universitaires Notre Dame de la Paix, Namur, Belgium Abstract | Extended Abstract |
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| 11:55 - 12:15 OR0906 |
Conformality of Thin Films Grown by Remote Plasma-Enhanced Atomic Layer Deposition Maarit Kariniemi1, Jaakko Niinistö1, Marko Vehkamäki1, Mikko Ritala1, Markku Leskelä1, Matti Putkonen2 1University of Helsinki, Helsinki, Finland,2Beneq, Vantaa, Finland Abstract | Extended Abstract |
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| 12:15 - 12:35 OR0907 |
Plasma deposition of hydrophobic coatings on structured surfaces for condensation and heat transfer applications Daniel Glöß1, Ralph Schmittgens2, Gerald Gerlach2, Peter Frach1, Teja Roch3, Andrés-Fabián Lasagni3, Chien-Hung Lu4, Michael Beckmann4 1Fraunhofer FEP, Dresden, Germany, 2Technische Universität Dresden, Institut für Festkörperelektronik (IFE), Dresden, Germany, 3Fraunhofer IWS, Dresden, Germany, 4Technische Universität Dresden, Institut für Energietechnik (IET), Dresden, Germany Abstract | Extended Abstract |
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| 12:35 - 12:55 OR0908 |
Surface energy modification of AFP film at low temperature by PECVD of controlling the plasma process with hydrogen gas Jun suck Lee1, Su B. Jin2, Yoon S. Choi2, In S. Choi2, Jeon G. Han2 1Center for Advanced Surface Technology, Suwon, South Korea, 2School of Advanced Materials Engineering, Sungkyunkwan University, Suwon, South Korea Abstract | Extended Abstract |
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| 12:55 - 13:15 OR0909 |
Source gas depletion in narrow metal tube during internal DLC coating with microwave-excited high-density near plasma Ryosuke Matsui1, Hiroyuki Kousaka1, Noritsugu Umehara1 1Nagoya University, Nagoya, Japan Abstract | Extended Abstract |
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| 13:15 - 14:20 | Lunch break |
Tuesday, September 11, afternoon Room Richard-Strauss
| 14:20 - 15:05 Plenary Lecture PL0003 |
Chair: Rony Snyders, Mons, Belgium Plasma Polymerized Thin Films Materials: Synthesis, Characterization, Application Tests for Flexible Electronic Devices JIN-HYO BOO1, Sang-Jin Cho1 1Sungkyunkwan University, Suwon, South Korea Abstract | Extended Abstract |
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| Oral Session | Session 10 - Tribological Coatings
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| 15:15 - 15:45 Keynote Lecture KN1000 |
The effect of coating characteristics on the coating performance
of a-C:H and ta-C films Helena Ronkainen1, Kenneth Holmberg1, Anssi Laukkanen1 1VTT Technical Research Centre of Finland, Espoo, Finland Abstract | Extended Abstract |
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| 15:45 - 16:05 OR1001 |
Comparison of friction and wear behavior of different chromium and boron based coatings at high temperatures in ambient air and argon atmosphere Martin Weber1, Martin Keunecke2, Christian Stein2, Helge Thomsen2 1Fraunhofer IST, Braunschweig, Germany, 2Fraunhofer Institute for Surface Engineering and Thin Films - IST, Braunschweig, Germany Abstract | Extended Abstract |
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| 16:05 - 16:25 OR1002 |
3D-characterization of growth defects in sputter deposited TiAlN hard coating using SEM/FIB Peter Gselman1, Franc Zupanič2, Peter Panjan1, Srečko Paskvale1, Darja Kek Merl1, Miha Čekada1, Tonica Bončina2 1Jožef Stefan Institute, Ljubljana, Slovenia, 2University of Maribor, Faculty of Mechanical Engineering, Maribor, Slovenia Abstract | Extended Abstract |
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| 16:25 - 16:45 OR1003 |
Bonding structure of B-C-N ternary compounds grown by ion beam assisted deposition and their tribomechanical properties. Ignacio Caretti1, Ignacio Jiménez1 1Materials Science Institute of Madrid, Madrid, Spain Abstract | Extended Abstract |
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| 16:45 - 17:15 | Coffee break |
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| 17:15 - 17:35 OR1004 |
Tribological Characterization and Wear Mechanisms of Novel Oxynitride PVD Coatings Designed for Applications at High Temperatures Jiri Nohava1, Pascal Dessarzin2, Pavla Karvankova2, Marcus Morstein2 1CSM Instruments, Peseux, Switzerland, 2PLATIT AG, Selzach, Switzerland Abstract | Extended Abstract |
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| 17:35 - 17:55 OR1005 |
Surface hardening and wear resistance of cemented carbides shock processed by high-intensity pulsed ion beam X.P. Zhu1, F.G. Zhang1, H. Guo1, M.K. Lei1 1Dalian University of Technology, Dalian, China Abstract | Extended Abstract |
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| 17:55 - 18:15 OR1006 |
GENERAL REGULARITIES AND DIFFERENCE OF NANOSTRUCTURED COATINGS BASED ON NITRIDES OF Zr, Ti, Hf, V, Nb METALS AND THEIR COMBINATIONS Alexander Pogrebnjak1, V Beresnev2, A Andreev3, O Sobol4, D Kolesnikov5, F Komarov6, S Mel’nik7, M Kaverin1, A Shypylenko1 1Sumy State University, Sumy, Ukraine, 2Kharkov National University, Kharkov, Ukraine, 3Kharkov Phisico-Technical Institute, Kharkov, Ukraine, 4Kharkov Polytechnical University, Kharkov Polytechnical University, Ukraine, 5Belgorod State University, Belgorod, Russian Federation,6Belarus State University, Minsk, Belarus, 7Institute of Applied Physics, Sumy, Ukraine Abstract | Extended Abstract |
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| 18:15 - 18:35 OR1007 |
Composition of plasmapolymeric coatings using O2/HMDSO gas mixtures and application on elastomers for tribological improvement Dominik Paulkowski1, Klaus Vissing1 1Fraunhofer IFAM, Bremen, Germany Abstract | Extended Abstract |
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| 18:45 - 23:00 | Poster Session 2, Foyer | ||||
| 18:45 - 23:00 | Industrial Evening, Room Werdenfels, Foyer, Restaurant |
Tuesday, September 11, afternoon Room Zugspitze
| 14:20 - 15:05 | Plenary Lecture PL0003, Room Richard-Strauss | ||||
| Oral Session | Session 11 - Atmospheric Plasma Processing, Plasma Spraying
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| 15:15 - 15:45 Keynote Lecture KN1100 |
Nanosecond pulsed plasmas: characteristics and opportunities James Walsh1, Wen-Cong Chen2, Xi-Ming Zhu2, Felipe Iza3, Yi-Kang Pu2 1University of Liverpool, Liverpool, United Kingdom, 2Department of Engineering Physics, Tsinghua University, Beijing, China, 3School of Electronic, Electrical and Systems Engineering, Loughborough University, Loughborough, United Kingdom Abstract | Extended Abstract |
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| 15:45 - 16:05 OR1101 |
Bipolar Pulsed Atmospheric DBD with Extremely Steep Voltage Slopes Achim Lunk1, David Tatekin2 1Plasma Advice, IPF, Stuttgart University, Stuttgart, Germany, 2Institute of Power Electronics and Electrical Drives, Stuttgart, Germany Abstract | Extended Abstract |
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| 16:05 - 16:25 OR1102 |
Sputter Deposition at Atmospheric Pressure Roland Gesche1, Christian Bansleben1, Horia-Eugen Porteanu1, Silvio Kühn1, Reinhold Kovacs2, Joachim Scherer2 1Ferdinand-Braun-Institut, Berlin, Germany, 2Aurion Anlagentechnik GmbH, Seligenstadt, Germany Abstract | Extended Abstract |
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| 16:25 - 16:45 OR1103 |
Local Deposition of Plasma-polymerized Gradient Films with Novel Porous Electrodes Alena Hinze1, Andrew Marchesseault2, Stephanus Büttgenbach2, Michael Thomas3, Sven Hartwig4, Claus-Peter Klages4 1Institut für Oberflächentechnik, TU BS, Braunschweig, Germany, 2Institut für Mikrotechnik, Braunschweig, Germany, 3Fraunhofer-Institut für Schicht- und Oberflächentechnik, Braunschweig, Germany, 4Institut für Oberflächentechnik, Braunschweig, Germany Abstract | Extended Abstract |
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| 16:45 - 17:15 | Coffee break |
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| 17:15 - 17:35 OR1104 |
Online Deposition of Thin Film on Wires by Atmopheric Pressure Dielectric Barrier Discharge Remy Maurau1, Cédric Vandenabeele1, Mathieu Gérard1, Patrick Choquet1, Thierry Belmonte2 1CRP-Gabriel Lippmann, Belvaux, Luxembourg, 2Institut Jean Lamour, Nancy, France Abstract | Extended Abstract |
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| 17:55 - 18:15 OR1106 |
Microwave-Driven Micro Plasma Jets Martina Leins1, Ingrid Weinrauch1, Christian Kamm1, Andreas Schulz1, Matthias Walker1, Ulrich Stroth1 1Institut für Plasmaforschung, Stuttgart, Germany Abstract | Extended Abstract |
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| 18:15 - 18:35 OR1107 |
Development of High Functional Bio-Medical Implant Materials by Gas Tunnel Type Plasma Spraying Akira Kobayashi1, Subramanian B2, Kimihiro Yamashita3, Akiko Nagai3 1Osaka University, Ibaraki, Japan, 2CECRI, Chennai, India, 3Tokyo Medical and Dental University, Tokyo, Japan Abstract | Extended Abstract |
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| 18:45 - 23:00 | Poster Session 2, Foyer | ||||
| 18:45 - 23:00 | Industrial Evening, Room Werdenfels, Foyer, Restaurant |
Tuesday, September 11, afternoonRoom Olympia
| 14:20 - 15:05 | Plenary Lecture PL0003, Room Richard-Strauss | ||||
| Industrial Workshop | Plasma Technoloy for Energy Conversion and Storage
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| 15:15-15:45 IW01 |
Thin Film Coating Solutions by Manz including turnkey CIGS fab for PV modules
Bernhard Dimmler1, Andreas Rack1 1Manz AG, Reutlingen, Germany Abstract |
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| 15:45-16:05 IW02 |
High efficiency CIGS solar cells on stainless steel by magnetron sputtering Sven Lindstrom1, Esko Niemi1, Jan Sterner1, Johan Oliv1, Eric Jaremalm1 1Midsummer AB, JÄRFÄLLA, Sweden Abstract |
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| 16:05-16:25 IW03 |
Industrial high volume low cost MaxPhase™ coatings on bipolar plates for fuel cells deposited by PVD in a high throughput coating system Henrik Ljungcrantz1, Bengt Wälivaara1, Kristian Nygren1, Mattias Samuelsson1 1Impact Coatings AB, Linkoping, Sweden Abstract |
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| 16:25-16:45 IW04 |
Industrial scale synthesis of PVD coatings relevant for energy conversion Lars Pleth Nielsen1, Klaus Pagh Almtoft1, Bjarke Holl Christensen1, Steffen Sønderby1, Per Eklund2, Per Møller3, Cecilia Kristin Kjartansdóttir3 1Danish Technological Institute, Aarhus C, Denmark, 2Linköping University, Thin Film Division, Department of Physics, Chemistry and Biology, IFM, Linköping, Sweden,3Technical University of Denmark, Kgs, Lyngby, Denmark Abstract |
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| 16:45-17:15 | Coffee break |
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| 17:15-17:35
IW05 |
Industrial production of thin optical coatings on metal bands Davorin Pavic1 1BlueTec GmbH, Trendelburg, Germany Abstract |
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| 17:35-17:55 IW06 |
Plasma Technology for Energy Conversion and Storage: chances
and challenges for flat steel sheet products
Bernd Schuhmacher1, Stefan Puls1, Janine Schauer-Paß1, Michael Strack1, Krasimir Nikolov2, Hanno Paschke3, Thomas Stucky3 1ThyssenKrupp Steel Europe, Dortmund, Germany, 2Technische Universität Braunschweig, Braunschweig, Germany, 3Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dortmund, Germany Abstract |
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| 18:45 - 23:00 | Poster Session 2, Foyer | ||||
| 18:45 - 23:00 | Industrial Evening, Room Werdenfels, Foyer, Restaurant |