Program

Thursday, September 15, morningRoom Richard-Strauss

08:30 - 09:15
Plenary Lecture
PL0006

James Bradley, Liverpool, United Kingdom
Application Perspectives of Plasma Technology for Food Industry
Wonho Choe¹, Cheorun Jo², Youbong Lim³, Samooel Jung⁴, Suk-Jae Yoo⁵
¹KAIST, Daejeon, South Korea, ²Seoul National University, Seoul, South Korea, ³Plasmapp Co., Daejeon, South Korea, ⁴Chungnam National University, Daejeon, South Korea, ⁵National Fusion Research Institute, Daejeon, South Korea
Abstract

Oral Session

Session 18 - HiPIMS II

Chairs:	Christoph Schiffers, Würselen, Germany
	Daniel Lundin, Orsay, France

09:25 - 09:55
Keynote Lecture
KN1800

Reactive growth of HfN and TiO2 using peak current regulated high-power impulse magnetron sputtering
Tetsuhide Shimizu¹, Michelle Villamayor², Daniel Lundin³, Ulf Helmersson²
¹Tokyo Metropolitan University, Hachiohjishi, Tokyo, Japan, ²IFM Materials Physics, Linköping University, Linköping, Sweden, ³LPGP, Université Paris-Sud,, Orsay Cedex, France
Abstract

09:55 - 10:15
OR1801

High-rate reactive high-power impulse magnetron sputtering of Hf-O-N films with tunable composition and properties
Alexandr Belosludtsev¹, Jaroslav Vlček¹, Stanislav Haviar¹, Jiří Houška¹, Radomír Čerstvý¹, Jiří Rezek¹
¹University of West Bohemia, Pilsen, Czech Republic
Abstract

10:15 - 10:35
OR1802

On the energetic deposition of TiAlSiN thin films by reactive modulated pulsed power magnetron sputtering discharges: A global plasma model and experiments
M.K. Lei¹, B.C. Zheng¹, Y.G. Li¹, B. Wu¹
¹Dalian University of Technology, Dalian, China
Abstract

10:35 - 10:55
OR1803

FeS2 thin films deposition by reactive high power magnetron sputtering in Ar+H2S gas mixture.
Zdeněk Hubička¹, Martin Čada², Štěpán Kment², Jiří Olejníček²
¹Institute of Physics AS CR,v.v.i., Prague, Czech Republic, ²Institute of Physics ASCR, Prague, Czech Republic
Abstract

10:55 - 11:15

Coffee break

11:15 - 11:35
OR1804

Chopped HiPIMS deposition of metallic titanium films
Jörg Patscheider¹, Kerstin Thorwarth¹, SuBong Jin², Clara Barker³, Sven Gauter⁴
¹Empa, Dübendorf, Switzerland, ²CAPST, Sungkyunkwan University, Suwon, South Korea, ³Department of Materials, Oxford University, Oxford, United Kingdom, ⁴Institut für Experimentelle und Angewandte Physik, University of Kiel, Kiel, Germany
Abstract

11:35 - 11:55
OR1805

Concept of calorimetric measurements determining the energy flux onto high voltage pulsed substrate during HiPIMS deposition
Maik Froehlich¹, Sven Gauter², Wagdi Garkas¹, Klaus-Dieter Weltmann¹, Holger Kersten², Martin Polak¹
¹INP Greifswald e.V., Greifswald, Germany, ²Institute of Experimental and Applied Physics, Kiel University, Kiel, Germany
Abstract

11:55 - 12:15
OR1806

Synthesis of Tetrahedral Amorphous Carbon by Mixed Mode HiPIMS Deposition
Nigel Marks¹, Rajesh Ganesan², Mark Tucker¹, Dougal McCulloch³, James Partridge³, Michael Stueber⁴, Sven Ulrich⁴, Marcela Bilek², David McKenzie²
¹Curtin University, Perth, Australia, ²University of Sydney, Sydney, Australia, ³RMIT University, Melbourne, Australia,⁴Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
Abstract

12:15 - 12:35
OR1807

Microstructure, mechanical and electrical properties evaluation of TiZrN and ZrTiN coatings fabricated by a hybrid HIPIMS and RF sputtering system
JYH-WEI LEE¹, Chaur-Jeng Wang², Fang-Song Tsai², Bih-Show Lou³
¹Ming Chi University of Technology, New Taipei City, Taiwan, ²Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan, ³Chemistry Division, Center of General Education, Chang Gung University, Taoyuan, Taiwan
Abstract

12:35 - 12:55
OR1808

Plasma spokes in reactive high power impulse magnetron sputtering
Ante Hecimovic¹, Christian Maszl¹, Carles Corbella Roca¹, Volker Schulz-von der Gathen¹, Achim von Keudell¹
¹Ruhr-Universität Bochum, Bochum, Germany
Abstract

12:55 - 14:20

Lunch break

Thursday, September 15, morningRoom Zugspitze

08:30 - 09:15

Plenary Lecture PL0006, Room Richard-Strauss

Oral Session

Session 19 - Properties of Technological Plasmas

Chairs:	Roel Tietema, Venlo, The Netherlands
	Andreas Schulz, Stuttgart, Germany

09:25 - 09:55
Keynote Lecture
KN1900

Diagnostic of energy transfers in sputter deposition: a way to investigate the sputtering process and the film growth
Anne-Lise THOMANN¹, Mariem El Mokh², Nadjib Semmar³, Pierre-Antoine Cormier⁴, Stephanos Konstantinidis⁵, Thomas Lecas³, Amael Caillard³
¹GREMI / CNRS, Orléans cedex2, France, ²GREMI CNRS/ Université d'Orléans, Orléans, France, ³GREMI CNRS/Université d'Orléans, Orléans, France, ⁴ChIPS Université de Mons, Mons, Belgium, ⁵ChiPS Université de Mons, Mons, Belgium
Abstract

09:55 - 10:15
OR1901

A source of atomic oxygen for reactive magnetron sputter deposition of oxide thin films.
Ludovic Hergot¹, Nikolay Britun¹, Tiago Silva¹, André Ricard², Stephanos Konstantinidis¹
¹University of Mons, Mons, Belgium, ²Université Paul Sabatier, Toulouse, France
Abstract

10:15 - 10:35
OR1902

Density of active species in the flowing afterglows of Ar-N2 RF and HF plasmas
Andre Ricard¹, Jean-Philippe Sarrette¹, Joe Byungwook², Yukwon Kim²
¹Univ Paul Sabatier, Toulouse, France, ²Department of Energy Systems Research, Suwon, South Korea
Abstract

10:35 - 10:55
OR1903

Measurement of thickness and energy input distributions during pulsed laser deposition of oxides
Klaus Ellmer¹, Moritz Kölbach¹, Karsten Harbauer¹
¹Helmholtz-Zentrum Berlin für Materialien, Berlin, Germany
Abstract

10:55 - 11:15

Coffee break

11:15 - 11:35
OR1904

Increasing optical absorption measurement reliability in pulsed plasmas
Nikolay Britun¹, Matthieu Michiels², Rony Snyders¹
¹University of Mons, Mons, Belgium, ²Materia Nova Research Center, Mons, Belgium
Abstract

11:35 - 11:55
OR1905

Predator-prey dynamics stabilised by nonlinearity explain oscillations in dust-forming plasmas
Annie Ross¹, David McKenzie¹
¹The University of Sydney, Sydney, Australia
Abstract

11:55 - 12:15
OR1906

Numerical Simulations of a Microwave Plasma Torch at Atmospheric Pressure
Sandra Gaiser¹, Martina Leins¹, Andreas Schulz¹, Matthias Walker¹, Thomas Hirth²
¹Universität Stuttgart, IGVP, Stuttgart, Germany, ²Karlsruher Institut für Technologie, Karlsruhe, Germany
Abstract

12:15 - 12:35
OR1907

Non-equilibrium atmospheric pressure plasma synthesis of copper-based nanostructures in liquid environments
Anna Liguori¹, Matteo Gherardi¹, Tamilselvan Velusamy², Tommaso Gallingani¹, Gunisha Jain², Romolo Laurita¹, Enrico Traldi¹, Matteo Ulivi¹, Davide Mariotti², Vittorio Colombo¹
¹University of Bologna, Bologna, Italy, ²University of Ulster, Newtownabbey, United Kingdom
Abstract

12:35 - 12:55
OR1908

Atmospheric pressure non-equilibrium plasma jet for acrylic acid plasma-polymerization and co-deposition of antibacterial nanocomposite coatings
Matteo Gherardi¹, Anna Liguori¹, Vittorio Colombo¹, Enrico Traldi¹, Maria Letizia Focarete¹, Antonino Pollicino², Cristiano Albonetti³, Romolo Laurita¹, Augusto Stancampiano¹
¹University of Bologna, Bologna, Italy,²University of Catania, Catania, Italy, ³National Research Council, Bologna, Italy
Abstract

12:55 - 14:20

Lunch break

Thursday, September 15, morningRoom Olympia

08:30 - 09:15

Plenary Lecture PL0006, Room Richard-Strauss

Oral Session

Session 20 - Biomedical Applications I

Chairs:	Sandra Carvalho, Guimaraes, Portugal
	Fabio Palumbo, Bari, Italy

09:25 - 09:55
Keynote Lecture
KN2000

Amphiphilic PE/PEO plasma co-polymers for tunable cell adhesion
Andrey Shukurov¹, Ivan Gordeev², Iurii Melnichuk¹, Daniil Nikitin¹, Tereza Steinhartova¹, Mykhailo Vaidulych¹, Jessica Ponti³, Chiara Uboldi³, Danka Slavinska¹, Hynek Biederman¹
¹Charles University in Prague, KMF MFF, Prague, Czech Republic, ²Jan Evangelista Purkyne University in Usti nad Labem, Usti nad Labem, Czech Republic, ³European Commision Joint Research Centre, Institute for Health and Consumer Protection, Ispra, Italy
Abstract

09:55 - 10:15
OR2001

Plasma-based coatings for the enhancement of biomolecule sensing
Marianne Vandenbossche¹, Greta Faccio¹, Patrick Rupper¹, Dirk Hegemann¹
¹Empa, St. Gallen, Switzerland
Abstract

10:15 - 10:35
OR2002

Robust plasma activated coatings for orthopaedic implant applications
Behnam Akhavan¹, Steve Wise¹, Marcela Bilek¹
¹The University of Sydney, Sydney, Australia
Abstract

10:35 - 10:55
OR2003

Plasma Deposition of porous silicon and biodegradable thin films for anticancer drugs delivery
Eleftherios Amanatides¹, Panagiotis S Ioannou¹
¹University of Patras, PATRA, Greece
Abstract

10:55 - 11:15

Coffee break

11:15 - 11:35
OR2004

Innovative Zr-Cu-(Ag) thin film metallic glasses deposed by magnetron PVD sputtering for biomaterials applications
Aurélien Etiemble¹, Christelle Der Loughian², Mihai Apreutesei², Thierry Douillard², Cyril Langlois², Sandrine Cardinal², Jean-Marc Pelletier², Laurent Gremillard², Jean-Francois Pierson³, Philippe Steyer²
¹MATEIS, INSA-Lyon, Villeurbanne, France, ²MATEIS,INSA-Lyon, Villeurbanne, France, ³Institut Jean Lamour, Nancy, France
Abstract

11:35 - 11:55
OR2005

Biofunctional aldehyde- and epoxide-containing surfaces for biomedical applications
Annika Herrmann¹, Jens Philipp², Marko Eichler¹, Michael Thomas¹, Claus-Peter Klages², Mahavir Singh³, Janez Kovač⁴
¹Fraunhofer IST, Braunschweig, Germany, ²TU BS, IOT, Braunschweig, Germany,³Lionex GmbH, Braunschweig, Germany, ⁴Jožef Stefan Institute, Ljubljana, Slovenia
Abstract

11:55 - 12:15
OR2006

Stability of plasma polymers produced by opening of ring compounds
Bentsian Elkin¹, Christian Oehr¹, Jakob Barz¹, Michael Haupt¹
¹Fraunhofer Institute IGB, Stuttgart, Germany
Abstract

12:15 - 12:35
OR2007

Metallization of polymers for medical applications using HiPIMS
Kerstin Thorwarth¹, Götz Thorwarth², Markus Kraft³, Cyril Voisard³, Jörg Patscheider¹
¹Empa, Dübendorf, Switzerland, ²IMT AG, Greifensee, Switzerland, ³DePuy Synthes, Zuchwil, Switzerland
Abstract

12:35 - 12:55
OR2008

Amphiphilic Coatings Deposited by Catalyst Free PECVD Reactor for Biological Applications
Alibi Baitukha¹, Jerome Pulpytel¹, Iman Aldybiat², Massoud Mirshahi², Sudhir Bhatt³, Farzaneh Arefi-Khonsari¹
¹UPMC-LISE, Paris, France, ²INSERM, Paris, France, ³Frank Reidy Center for Bioelectrics, Norfolk, United States
Abstract

12:55 - 14:20

Lunch break

Thursday, September 15, afternoonRoom Richard-Strauss

14:20 - 15:05
Plenary Lecture
PL0007

Chair: Jean Francois Pierson, Nancy, France
Luminescence, Doping, and Transport Properties of Silicon Nanocrystals produced via Nonthermal Plasma Synthesis
Uwe Kortshagen¹, Ting Chen¹, Konstantin Reich¹, Han Fu¹, Katelyn Schramke¹, Nicolaas Kramer¹, Boris Shklovskii¹
¹University of Minnesota, Minneapolis, United States
Abstract

15:15 - 16:25

Poster Session 4, Foyer
Properties of Technological Plasmas, Biomedical Applications, Plasma-Enhanced Chemical Vapour Deposition PECVD, Plasma Diffusion Treatment, Advanced Plasma and Ion Source Technologies

16:25 - 16:45

Coffee break

Oral Session

Session 21 - Plasma-Enhanced Chemical Vapour Deposition PECVD I

Chairs:	Hynek Biederman, Praha, Czech Republic
	Dirk Hegemann, Dübendorf, Switzerland

16:45 - 17:15
Keynote Lecture
KN2100

Characterization of an ICP Enhanced Chemical Vapor Deposition Process for Crystalline Silicon PERC Solar Cell Passivation Layers
Bernhard Cord¹, Marc Hofmann², Thomas Schütte³, Michael Siemers⁴
¹SINGULUS TECHNOLOGIES AG, Kahl am Main, Germany, ²Fraunhofer ISE, Freiburg, Germany, ³PLASUS GmbH, Mering, Germany, ⁴Fraunhofer IST, Braunschweig, Germany
Abstract

17:15 - 17:35
OR2101

Effect of source gas flux from the nozzle on the thickness distribution of DLC in microwave-assisted ultra-high speed coating with gas blowing
Hiroto Izuoka¹, Kazuki Miyazaki¹, Hiroyuki Kousaka¹, Noritsugu Umehara¹
¹Nagoya University, Nagoya, Japan
Abstract

17:35 - 17:55
OR2102

Fabrication and Characterization of Photo- and Plasma-chemically Deposited Thiol-terminated Films
Evelyne Kasparek¹, Jason R. Tavares², Michael R. Wertheimer², Pierre-Luc Girard-Lauriault¹
¹McGill University, Montreal, Canada, ²Ecole Polytechnique de Montreal, Montreal, Canada
Abstract

17:55 - 18:15
OR2103

Plasma polymerization as an effective tool for surface modification of glass fibers applied in polymer composites
Vladimir Cech¹, Antonin Knob¹, Tomas Lasota², Jaroslav Lukes³, Lawrence T. Drzal⁴
¹Brno University of Technology, Brno, Czech Republic, ²Honeywell spol.s.r.o., Brno, Czech Republic, ³Czech Technical University in Prague, Prague, Czech Republic, ⁴Michigan State University, East Lansing, United States
Abstract

18:15 - 18:35
OR2104

Effect of Deposition Temperature on the Composition and Properties of Propanethiol Plasma Polymer Thin Films
Damien Thiry¹, Francisco Javier Aparicio², Priya Laha³, Rony Snyders⁴
¹University of Mons, Mons, Belgium, ²Universtity of Mons/ChIPS, 1, Avenue Copernic, Belgium, ³VUB/SURF, Bruxelles, Belgium, ⁴Umons/ChIPS, Mons, Belgium
Abstract

18:35 - 18:55
OR2105

Changing the mechanical behaviour of superhydrophobic acrylate plasma coatings: one step towards durable superhydrophobic surfaces
Julien Bardon¹, Gregory Mertz¹, Claude Becker², David Ruch¹
¹LIST, Esch-sur-Alzette, Luxembourg, ²Funcoats SA, Foetz, Luxembourg
Abstract

Thursday, September 15, afternoonRoom Zugspitze

14:20 - 15:05

Plenary Lecture PL0007, Room Richard-Strauss

15:15 - 16:25

Poster Session 4, Foyer

16:25 - 16:45

Coffee break

Oral Session

Session 22 - Plasma Diffusion Treatment

Chairs:	Thierry Czerwiec, Nancy, France
	M. K. Lei, Dalian, China

16:45 - 17:15
Keynote Lecture
KN2200

The Recent State of Plasma Diffusion Treatment
Peter Kaestner¹, Guenter Braeuer²
¹IOT, TU Braunschweig, Braunschweig, Germany, ²Fraunhofer IST, Braunschweig, Germany
Abstract

17:15 - 17:35
OR2201

FORMATION OF DUAL LAYER IN AUSTENITIC BASED STAINLESS STEELS AFTER PLASMA NITROCARBURIZING FOR HIGHER SURFACE HARDNESS AND CORROSION RESISTANCE
Subroto Mukherjee¹, Alphonsa Joseph², V.S. Raja³
¹Inst Plasma Research, Gandhinagar, India, ²Inst. Plasma Research, Gandhinagar, India, ³Department of Metallurgical Engineering and Materials Science, Indian Institute of Technology Bombay, Mumbai, India
Abstract

17:35 - 17:55
OR2202

Modification of surface chemistry on ZnMgAl alloy by means of atmospheric pressure plasma
Pramod Vincent Menezes¹, Andreas Czerny², Teresa de los Arcos¹, Claus-Peter Klages², Guido Grundmeier¹
¹University of Paderborn, Paderborn, Germany, ²Institute for Surface Technology, Technical University Braunschweig, Braunschweig, Germany
Abstract

17:55 - 18:15
OR2203

Elemental Segregation Observed for Decaying Expanded Austenite
Darina Manova¹, Andriy Lotnyk¹, Stephan Mändl¹, Bernd Rauschenbach¹
¹Inst. f. Oberflächenmodifizierung, Leipzig, Germany
Abstract

18:15 - 18:35
OR2204

Control of microstructure of nitrided Ni-based superalloys by plasma based treatments
Luc PICHON¹, Jean-Baptiste DUBOIS¹, Fadella LAREK¹, Jonathan CORMIER², Patrick VILLECHAISE², Frédéric DANOIX³, Raphaële DANOIX³
¹Institut Pprime-UPR3346 CNRS-U. Poitiers, Chasseneuil- Futuroscope, France, ²Institut Pprime-UPR3346 CNRS-ISAE ENSMA, Chasseneuil-Futuroscope, France,³GPM IMR-UMR6634 CNRS-U. Rouen, Saint Etienne du Rouvray, France
Abstract

18:35 - 18:55
OR2205

SHORT TIME ION NITRIDING OF AISI 420 MARTENSITIC STAINLES STEEL TO IMPROVE WEAR AND CORROSION RESISTANCE
Sonia Brühl¹, Raúl Charadia¹, Eugenia Dalibon¹, Mauro Moscatelli¹, J. Nahuel Pecina¹, Amado Cabo²
¹National University of Technology UTN, Concepción del Uruguay, Argentina,²IONAR S.A., Buenos Aires, Argentina
Abstract

Thursday, September 15, afternoonRoom Olympia

14:20 - 15:05

Plenary Lecture PL0007, Room Richard-Strauss

15:15 - 16:25

Poster Session 4, Foyer

16:25 - 16:45

Coffee break

Oral Session

Session 23 - Biomedical Applications II

Chairs:	Farzaneh Arefi-Khonsari, Paris, France
	Gheorge Dinescu, Magurele-Bucharest, Romania

16:45 - 17:15
Keynote Lecture
KN2300

Aerosol assisted atmospheric pressure plasma deposition of drug containing composite coatings
Fabio Palumbo¹, Chiara Loporto², Cristina Canal³, Judit Buxadera³, Petr Jelinek⁴, eloisa sardella¹, giuseppe camporeale², pietro favia²
¹CNR NANOTEC, Bari, Italy, ²Dpt of Chemistry, University of Bari, Bari, Italy, ³BIBITE UPC, Barcellona, Spain, ⁴Dpt Physics Masaryk University Brno, Brno, Czech Republic
Abstract

17:15 - 17:35
OR2301

investigation of biological properties of fluorinated diamon-like carbon films deposited on polycarbonate
Seyed Iman Hosseini¹, Seyed Iman Hosseini¹, zahra Javaherian², Dariush Minai-Tehrani³, Zahra Ghaempanah⁴, Marzieh Abbasi Firouzjah⁵, Babak Shokri⁶
¹Shahrood university of technology, Shahrood, Iran, ²Group Physics, Department of Sciences, Ahvaz Branch, Islamic Azad University, Ahvaz, Iran, ³BioResearch Lab, Faculty of Biological Sciences, Shahid Beheshti University, Tehran, Iran, ⁴Reproductive biotechnology research center Avicenna research institute, ACECR, Tehran, Iran,⁵Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, ⁶Department of Physics, Shahid Beheshti University, G.C.,, Tehran, Iran
Abstract

17:35 - 17:55
OR2302

Versatile poly(ethylene) nano-pattern meets nonthermal plasma for enhanced binding of proteins
Iurii Melnichuk¹, Daniil Nikitin¹, Mykhajlo Vaidulych¹, Andrey Choukourov¹, Danka Slavinska¹, Hynek Biederman¹
¹Charles University in Prague, Prague, Czech Republic
Abstract

17:55 - 18:15
OR2303

Biocompatible Coatings with Antibacterial Effect Produced by Pulsed Electrospark Deposition
Evgeny Levashov¹, Evgeniya Zamulaeva², Alexander Sheveiko², Natalia Litovchenko², Dmitry Shtansky², Natalia Glushankova³
¹National Univ of Science and Techn MISiS, Moscow, Russia, ²National University of Science and Technology “MISIS”, Moscow, Russian Federation,³Blokhin Russian Cancer Research Center, Moscow, Russian Federation
Abstract

18:15 - 18:35
OR2304

Magnetron sputtered electrodes deposited on piezoeletric polymers for sensors applications
Sandra Carvalho¹, Mariana Marques¹, Senentxu Lanceros-Mendez¹, Mariana Henriques¹, Patricia Rico²
¹University of Minho, Guimarães, Portugal, ²CIBER de Bioingeniería, Biomateriales y Nanomedicina, Valencia, Spain
Abstract

18:35 - 18:55
OR2305

Non-thermal plasma assisted engineering of antibacterial nano-coatings on medical textiles
Anton Nikiforov¹, Rino Morent¹, Christophe Leys¹
¹Ghent University, Gent, Belgium
Abstract

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