Program

Status as Sep 19, 2018

Tuesday, September 18, 2018Poster Session, 19:00 - 22:00

Poster - Physical vapour deposition (PVD)

PO2001 Vacancies in MONTAN – a mechanism for tuning hardness–toughness relationship
Fedor Klimashin1, Nikola Koutná1, David Holec2, Paul H. Mayrhofer1
1TU Wien, Vienna, Austria, 2Montanuniversität Leoben, Leoben, Austria
Abstract

PO2002
The (in)stability of process control mechanisms in reactive DC sputtering deposition
Koen Strijckmans1, Roeland Schelfhout1, Diederik Depla1
1Ghent University, Gent, Belgium
Abstract

PO2003
On the growth of TiOx coatings by reactive magnetron sputtering from metallic and ceramic targets: a joint modelling and experimental story
Romain Tonneau1, Moskovskin Pavel2, Pflug Andreas3, De Bosscher Wilmert4, Lucas Stéphane2
1University of Namur, NSIM, LARN, Namur, Belgium, 2University of Namur, Namur, Belgium, 3Fraunhofer Institute IST, Braunschweig, Germany, 4Soleras Advanced Coatings, Deinze, Belgium
Abstract

PO2004
Copper oxide thin films by reactive magnetron sputter deposition: chemistry vs. mobility
Dulmaa Altangerel1, Diederik Depla1
1DRAFT, Ghent University, Gent, Belgium
Abstract

PO2005 Comparison of mechanical behavior of TiN, TiNC, CrN/TiNC, TiN/TiNC films on 9Cr18 steel by PVD
Xingguo Feng1, Hui Zhou1
1Lanzhou Institute of Physics, Lanzhou, China
Abstract

PO2006 Black aluminium thin films prepared by magnetron sputtering
Michal Novotny1, Joris More Chevalier1, Morgane Poupon1, Jiri Bulir1, Ladislav Fekete1, Premysl Fitl2, Petr Hruska3, Jan Valenta3, Yuri Dekhtyar4, Jan Lancok1
1Institute of Physics CAS, Prague, Czech Republic, 2University of Chemistry and Technology, Prague, Czech Republic, 3Charles University, Prague, Czech Republic, 4Riga Technical University, Riga, Latvia
Abstract

PO2007 Hard (Zr,Ti) alloy films with small amount of oxygen resistant to cracking
Zuzana Čiperová1, Jindřich Musil1, Sergei Zenkin2, Radomír Čerstvý1, Stanislav Haviar1
1University of West Bohemia, Plzeň, Czech Republic, 2Tomsk Polytechnic University, Tomsk, Russian Federation
Abstract

PO2008 Photoactive TiO2 and Ta doped TiO2 1D nanotubes grown by electrochemical anodization of Ti and TiTa films deposited by DC pulsed magnetron sputtering on FTO transparent substrates
Stepan Kment1, Zdenek Hubicka2, Radim Ctvrtlik1, Hana Kmentova1, Yalavharti Rambabu1, Alberto Naldoni1, Mukta Kulkarni1, Patrik Schmuki1, Radek Zboril1
1Palacky University Olomouc, Olomouc, Czech Republic, 2Institute of Physics ASCR, Prague, Czech Republic
Abstract

PO2009 Tunable optical and electrical properties of IGZO thin films prepared by reactive HiPIMS
Pavel Baroch1, Jiří Rezek1, Jiří Houška1
1University of West Bohemia, Plzeň, Czech Republic
Abstract

PO2010 Optical and electrical properties changes induced by cation size in rare-earth vanadates REVO3 (RE : La, Pr, Nd and Sm)
Christophe Celindano1, Emile Haye2, Fabien Capon1, Patrice Miska1
1Institut Jean Lamour, Nancy, France, 2LISE, UNamur, Namur, Belgium
Abstract

PO2011 Deposition of Oxyfluoride Thin Films by Cold Plasma Process for the Energy and Environment Domain
Sara IBRAHIM1, Angelique Bousquet1, Pierre Bonnet1
1Institut de Chimie de Clermont-Ferrand, AUBIERE, France
Abstract

PO2012 Sputtering and evaporation mechanisms in magnetron process using a hot target
CAILLARD Amael1, Robin GRAILLOT-VUILLECOT1, Christophe CACHONCINLLE1, Eric MILLON1, Thomas LECAS1, Anne-Lise THOMANN1, Pascal BRAULT1, Nadjib SEMMAR1
1GREMI CNRS/Univ Orléans, ORLEANS, France
Abstract

PO2013 Mechanical properties of sputter deposited (Zr,Y)N thin films
David PILLOUD1, Pauline LEVERONE1, Marius GIPPERICH1, Jean-Philippe JEHL1, Hervé RINNERT1, Jean-François PIERSON1
1Institut Jean Lamour, NANCY, France
Abstract

PO2014 Effect of tantalum addition on Cu-Zr binary galss metallic thin films properties.
sofiane ACHACHE1, fréderic sanchette1
1UTT, Nogent, France
Abstract

PO2015 Effect of substrate bias on the growth behavior of iridium on A-plane sapphire using radio frequency sputtering at low temperatures
Frank Meyer1, Sabine Oeser1, Andreas Graff2, Eduard Reisacher1, Eva-Regine Carl1, Alexander Fromm1, Marco Wirth1, Lukas Groener1, Frank Burmeister1
1Fraunhofer IWM, Freiburg, Germany, 2Fraunhofer IMWS, Halle, Germany
Abstract

PO2016 Influence of reactive oxygen species during deposition of iron oxide films by high power impulse magnetron sputtering.
Rainer Hippler1, Viteslav Stranak2, Martin Cada3, Zdenek Hubicka3, Robert Bogdanowicz4, Harm Wulff1, Christiane A. Helm1
1Universität Greifswald, Greifswald, Germany, 2University of South Bohemia, Ceske Budejovice, Czech Republic, 3Institute of Physics AVCR, v.v.i., Prague, Czech Republic, 4Gdansk University of Technology, Gdansk, Poland
Abstract

PO2017 Electrical and optical properties of hydrogen- and niobium-doped TiO2 electrodes
Michael Weise1, Rainald Mientus1, Klaus Ellmer1, Stefan Seeger1
1OUT e.V., Berlin, Germany
Abstract

PO2018 E-beam evaporation vs. rf-sputtering: Comparing the growth behavior, crystallinity, and morphology of heteroepitaxial iridium (001) films on sapphire (11-20)
Frank Meyer1, Andreas Graff2, Eduard Reisacher1, Eva-Regine Carl1, Sabine Oeser1, Alexander Fromm1, Marco Wirth1, Lukas Groener1, Frank Burmeister1
1Fraunhofer IWM, Freiburg, Germany, 2Fraunhofer IMWS, Halle, Germany
Abstract

PO2019 Photocatalytic activity of Bismuth vanadates under visible light irradiation: Applications in photoelectrocatalysis and inactivation of bacteria
Matteo Pedroni1, Espedito Vassallo1, Tiziana Silvetti2, Stefano Morandi2, Milena Brasca2, Gian Luca Chiarello3, Elena Selli3, Maurizio Canetti4, Dario Ripamonti5
1Istituto di fisica del plasma, Milano, Italy, 2CNR-ISPA, Milano, Italy, 3Dipartimento di Chimica UniMI, Milano, Italy, 4CNR-ISMAC, Milano, Italy, 5CNR-ICMATE, Milano, Italy
Abstract

PO2020 High deposition rate magnetron sputtering
Pavels Nazarovs1, Valery Mitin1, Vladimirs Kovalenko1, Aleksandrs Parfinovics1
1SIA Schaeffler Baltic, Riga, Latvia
Abstract

PO2021 The trajectory of the secondary electrons in the magnetic field and this determines the form of the erosion race track in a magnetron cathode
Stephen Muhl1, Johans Restrepo2, Julio Cruz3
1Instituto de Inv. en Mats. UNAM, Mexico, Mexico, 2Sadosa, Mexico, Mexico, 3CNyN UNAM, Ensenada, Mexico
Abstract

PO2022 Morphology and thermal emissivity study of multilayer PVD metal-oxide/diacrylate polymer onto different plastic substrates/parts for automotive industry
André Pinto1, J. Rosa1, R. Carvalho1, A. Joskowiak1, J. Silva1, M. J. Lopes1, M. Ribeiro1, B. Moura1, S. Melo2
1CeNTI, Vila Nova de Famalicao, Portugal, 2Simoldes Plásticos, S.A., Oliveira de Azeméis, Portugal
Abstract

PO2023 Zr and Mo thin films with reduced residual impurities’ uptake under high vacuum conditions at room temperature
Marcel Meško1, Jana Bohovičová2, Frans Munnik3, Jörg Grenzer3, René Hübner3, Ľubomír Čaplovič2, Mária Čaplovičová4, Ľubomír Vančo4, Viliam Vretenár4, Matthias Krause3
1Slovak university of technology, Trnava, Slovakia, 2MTF STU, Trnava, Slovak Republic, 3HZDR, Dresden, Germany, 4STU Centre for Nanodiagnostics, Bratislava, Slovak Republic
Abstract

PO2024 Growth of porous thin films by reactive magnetron sputtering using particle collimators
Rafael Alvarez1, Aurelio Garcia-Valenzuela2, Victor Rico2, Jose Cotrino3, Agustin R. Gonzalez-Elipe2, Alberto Palmero2
1Dept. Applied Physics I (US), Seville, Spain, 2ICMS (CSIC-US), Seville, Spain, 3Universidad de Sevilla, Seville, Spain
Abstract

PO2025 Enhanced ion assistance during the deposition of hard metal nitrides with HiPIMS voltage reversal – 30% increase of deposition rate.
Ivan Fernandez1, Ivan Fernandez1, Jose Antonio Santiago2, Ambiorn Wennberg1, Victor Bellido3, Lucia Mendizabal4, Raquel Gonzalez-Arrabal5
1Nano4Energy SL, Madrid, Spain, 2Imdea Materiales, Madrid, Spain, 3Gencoa Ltd, Liverpool, United Kingdom, 4IK4 Tekniker, Eibar, Spain, 5ETSII-UPM, Madrid, Spain
Abstract

PO2026 Propagation of the microstructure and engineering the humidity tightness in multilayer thin films prepared by magnetron sputtering at oblique angles
Alberto Palmero1, Aurelio Garcia-Valenzuela2, María del Carmen Lopez-Santos2, Rafael Alvarez3, Victor Rico2, Ana Isabel Borrás2, Rafael C. del Campo4, Miguel Holgado5, Agustín R. Gonzalez-Elipe2, José Cotrino3
1Materials Science Institute of Seville, Seville, Spain, 2ICMS (CSIC-US), Seville, Spain, 3University of Seville, Seville, Spain, 4Universidad Politecnica de Madrid, Madrid, Spain, 5Universidad Politécnica de Madrid, Madrid, Spain
Abstract

PO2027 Avoiding Target Poisoning in Reactive Magnetron Sputtering Depositions at Oblique Angles
Rafael Alvarez1, Aurelio Garcia-Valenzuela2, Maria del Carmen Lopez-Santos2, Victor Rico2, Jose Cotrino3, Agustin R. Rodriguez-Elipe2, Alberto Palmero2
1Dept. Applied Physics I (US), Seville, Spain, 2ICMS (CSIC-US), Seville, Spain, 3Universidad de Sevilla, Seville, Spain
Abstract

PO2028 Structural and optical characterization of Cr1-xAlx(O)N films prepared by HiPIMS
T. Cristina Rojas1, Alvaro Caro1, Gabriel Lozano1, Juan Carlos Sánchez-López1
1ICMSE-CSIC, Sevilla, Spain
Abstract

PO2029 Optimization of plasma assisted reactive sputter deposition processes for optical coatings
Edmund Schüngel1, Silvia Schwyn-Thöny1, Silvio Gees1
1Evatec AG, Truebbach, Switzerland
Abstract

PO2030 Increasing the thermal stability of thin films by incorporating co-sputtered nanoparticles
Laszlo Pethö1, Mikhail Polyakov1, Rachel Schoeppner1, Keith Thomas1, Bence Könnyü1, Xavier Maeder1, Johann Michler1
1EMPA, Thun, Switzerland
Abstract

PO2031 Titanium coating of ceramics for vacuum chambers for PSB RF system
Wil Vollenberg1, Pedro Costa Pinto1, Mauro Taborelli1
1CERN, Geneva, Switzerland
Abstract

PO2032 Growth Morphology of AlN Thin Films Deposited by Reactive DC Magnetron Sputtering and its Influence on the Piezoelectric Properties
Mathis Trant1, Maria Fischer1, Kerstin Thorwarth1, Hans Josef Hug1
1Empa, Dübendorf, Switzerland
Abstract

PO2033 Physical and tribological properties of sputtered silicon-containing carbon coatings at high temperatures
Parnia Navabpour1, Bruno Rodriguez2, Joanne Stallard1, Hailin Sun1
1Teer Coatings Ltd, Droitwich, United Kingdom, 2University of Warwick, Coventry, United Kingdom
Abstract

PO2034 Plasma Surface Metallurgy of Non-ferrous Surface
Wenping Liang1, Zheng Ding1, Jinwei Yi1, Hao Lin1
1NUAA, Nanjing, China
Abstract

PO2035 Plasma Surface Metallurgy of Ceramic Surface
Qiang Miao1, Zheng Ding1, Hao Lin1, Jinwei Yi1
1NUAA, Nanjing, China
Abstract

PO2036 High speed gear hobbing with customized AlCrBN coatings
Martin Beutner1, Andreas Lümkemann2, Jozef Sondor3, Max Köchig1, Dominik Bloesch2, Tibor Cselle2
1Institute of manufacturing technology, Magdeburg, Germany, 2Platit AG, Selzach, Switzerland, 3Liss a.s., Roznov p. Radhostem, Czech Republic
Abstract

PO2037 Chemical, mechanical and stability of air annealed cathodic arc evaporated CrAlON coatings
Gonzalo García Fuentes1, Eluxka Almandoz1
1AIN, Cordovilla-Navarra, Spain
Abstract

PO2038 The new Hybrid LACS® Technology (Lateral ARC and Central Sputtering by Rotating Cathodes)
Radek Žemlička1, Mojmír (Sr.) Jílek2, Mojmír (Jr.) Jílek2, Andreas Lümkemann1, Tibor Cselle1, Dominik Bloesch1, Vladimír Krsek2
1Platit AG Advanced Coating Systems, Selzach, Switzerland, 2Platit a.s., Šumperk, Czech Republic
Abstract

PO2039 Surface morphology and mechanical analysis of nanolaminate (TiAlSiY)N/ZrN and (TiAlSiY)N/MoN condensates deposited by vacuum-arc
Yaroslav Kravchenko1, Emerson Coy2, Vyacheslav Beresnev3, Alexander Pogrebnjak1
1Sumy State University, Sumy, Ukraine, 2Adam Mickiewicz University, NBMC, Poznan, Poland, 3Kharkiv National University, Sumy, Ukraine
Abstract

PO2040 Application of the electron beam evaporation for high-rate coating of 3D-parts
Jens-Peter Heinß1, Heidrun Klostermann1
1Fraunhofer FEP, Dresden, Germany
Abstract

PO2041 Influence of Thickness on Properties of TiN/Ti Coatings
Guangyu He1, jiao chen2, mingrui geng1, danyang sun1
1Air Force Engineering University, Xi'an, China, 2Xi’an Jiaotong University, Xi’an, China
Abstract

PO2042 Microstructural properties of Ti2AlN coatings synthesized by multilayer deposition and subsequent annealing
Lukas Gröner1, Lutz Kirste2, Sabine Oeser1, Eberhard Nold1, Chris Eberl1, Frank Burmeister1
1Fraunhofer IWM, Freiburg, Germany, 2Fraunhofer IAF, Freiburg, Germany
Abstract

PO2043 Modulating Low Energy Ion Plasma Fluxes for the Growth of Nanoporous Thin Films
Sandra Muñoz-Piña1, Rafael Alvarez2, Aurelio García-Valenzuela3, Carmen López-Santos3, Víctor Rico3, José Cotrino4, Iván Fernández5, Germán Alcalá6, Agustín Rodríguez González-Elipe7, Alberto Palmero3
1Nano4Energy SLNE / U.C.M., Madrid, Spain, 2Universidad de Sevilla / ICMS (CSIC-US), Seville, Spain, 3ICMS (CSIC-US), Seville, Spain, 4ICMS (CSIC-US) / Universidad de Sevilla, Seville, Spain, 5Nano4Energy S.L.N.E., Madrid, Spain, 6Universidad Complutense de Madrid, Madrid, Spain, 7ICMS (CSIC_US), Seville, Spain
Abstract

Poster - (Nano-) particles and powders in plasmas

PO2044
Production of unimodal size distribution nanoparticles by low pressure plasma, and illustration of their potential use in medecine
Stephane Lucas1, Stephane Lucas1, Anne-Catherine Heuskin1, Ornella Fichera1, Sebastien Penninckx1, Carine Michiels1
1University of Namur, Namur, Belgium
Abstract

PO2045 Self-Affine Growth of Nylon-Sputtered Nanoparticles
Andrey Shukurov1, Artem Shelemin1, Pavel Pleskunov1, Daniil Nikitin1, Renata Tafiichuk1, Jan Hanus1, Ivan Khalakhan2
1Charles University, KMF MFF, Prague, Czech Republic, 2Charles University, KFPP MFF, Prague, Czech Republic
Abstract

PO2046 Pulsed Plasma Polymerization of Acrylic Acid for the Synthesis of Carboxyl-Functionalized Nanoparticles
Pavel Pleskunov1, Daniil Nikitin1, Renata Tafiichuk1, Artem Shelemin1, Jan Hanuš1, Ivan Khalakhan2, Andrei Choukourov1
1Charles University, KMF MFF, Prague, Czech Republic, 2Charles University, KFPP MFF, Prague, Czech Republic
Abstract

PO2047 Synthesis of Copper Oxide Nanoparticles by Reactive Magnetron Sputtering
Daniil Nikitin1, Pavel Pleskunov1, Artem Shelemin1, Miroslav Cieslar2, Renata Tafiichuk1, Valerii Titov3, Andrei Choukourov1
1Charles University, KMF MFF, Prague, Czech Republic, 2Charles University, KFM MFF, Prague, Czech Republic, 3Institute of Solution Chemistry of RAS, Ivanovo, Russian Federation
Abstract

PO2048 Tracking of cycling growth of hydrocarbon plasma polymer nanoparticles by in situ diagnostics
Artem Shelemin1, Daniil Nikitin1, Jaroslav Kousal1, Mykhajlo Vaidulych1, Ondrej Kylian1, Andrei Choukourov1, Danka Slavinska1, Hynek Biederman1
1Charles University, KMF MFF, Prague 8, Czech Republic
Abstract

PO2049 Enhancing the Palladium Nanoclusters deposition rate with the introduction of O2 in a Gas Aggregation Source (GAS)
William Chamorro1, Amaël Caillard1, Pascal Brault1, Christophe Coutanceau2, Steve Baranton2
1GREMI-Université d'Orléans, ORLEANS, France, 2IC2MP-Université de Poitiers, Poitiers, France
Abstract

PO2050 Molecular Dynamics simulations of plasma sputtered nanocatalyst growth
William Chamorro1, Pascal Brault1, Amaël Caillard1, Christophe Coutanceau2, Steve Baranton2, Erik Neyts3
1GREMI-Université d'Orléans, ORLEANS, France, 2IC2MP-Université de Poitiers, Poitiers, France, 3PLASMANT group, Antwerp, Belgium
Abstract

PO2051 Effect of the nature of plates taped on the powered electrode on dust-particles generated in a CH4 radio-frequency discharge
William Desdions1, Isabelle Géraud-Grenier1, François Faubert1, Maxime Mikikian1, Véronique Massereau-Guilbaud1
1GREMI, Bourges, France
Abstract

PO2052 Nanoparticle cloud evolution in an acetylene dusty plasma
William Desdions1, Zahra Marvi2, Erik Von Wahl2, Isabelle Géraud-Grenier1, Véronique Massereau-Guilbaud1, Maxime Mikikian1, Holger Kersten2
1GREMI, Bourges, France, 2IEAP, Kiel, Germany
Abstract

PO2053 In-situ monitoring of nanoparticle generation in plasma
Oleksandr Polonskyi1, Alexander Vahl1, Jonas Drewes1, Alexander Hinz1, Thomas Strunskus1, Franz Faupel1
1Christian-Albrechts University at Kiel, Kiel, Germany
Abstract

PO2054 Hydrogen Influence on the Synthesis of Tungsten Nanoparticles by Magnetron Sputtering Combined with Gas Aggregation.
Tomy Acsente1, Lavinia Carpen1, Gheorghe Dinescu1, Elena Matei2, Christian Grisolia3
1I.N.F.L.P.R., Magurele, Romania, 2I.N.C.D.F.M., Magurele, Romania, 3CEA IRFM, Saint-Paul-lez-Durance, France
Abstract

PO2055 Synthesis of particles from different metals by an atmospheric pressure plasma jet: a comparative study
Gheorge Dinescu1, Valentina MARASCU2, Andrada Lazea-Stoyanova2
1I.N.F.L.P.R., Magurele-Bucharest, Romania, 2I.N.F.L.P.R. / Faculty of Physics, U.B., Magurele-Bucharest, Romania
Abstract

PO2056 Gold nanoparticles preparation by converging-type Atmospheric Pressure Plasma Jet
Yu-Lin Kuo1, Je-Wei Lin2, Kuen-Yu Tsai2
1Department of Mechanical Engineering, Taipei, Taiwan, 2NTUST, Taipei, Taiwan
Abstract

PO2057 Nanoparticles produced by magnetron sputtering and its application in catalysis chemistry
Jinlong Yin1, Giuseppe Sanzone1, Hailin Sun1
1Teer Coatings Ltd, Droitwich, Worcestershire, United Kingdom
Abstract

PO2058
Characterization of various plasma reactors dedicated to nanoparticle functionalization
Cédric Vandenabeele1, Anna Usoltseva1, Stella Mathioudaki1, Christophe Rigaux1, Simon Wallon1, Stéphane Lucas1
1LARN, University of Namur, Namur, Belgium
Abstract

PO2059
Adding advanced functional properties to nanoparticles via low-pressure plasma coating
Anna Usoltseva1, Christophe Rigaux1, Simon Wallon1, Cedric Vandenabeele1, Stella Mathioudaki1, Stephane Lucas1
1Namur University, Namur, Belgium
Abstract

PO2060
Metallic powder treatment by the magnetron sputtering technique: application to additive manufacturing
axel hemberg1, Morgane Herbin1, Thomas Godfroid1, Damien Thiry2, Rony Snyders2
1Materia Nova, Mons, Belgium, 2Umons, Mons, Belgium
Abstract

PO2061 Au-TiO2 thin films exhibiting Localized Surface Plasmon Resonance effects and advantage of an Electron Nano-Tomography study
Philippe Steyer1, Siddardha Koneti1, Lucian Roiban1, Marco Rodrigues2, Joel Borges2, Filipe Vaz2, Thierry Epicier1
1MATEIS Lab. - INSA de Lyon, Villeurbanne, France, 2Fisica Dept, Braga, Portugal
Abstract

PO2062 Synthesis of Ag/YSZ nanocomposites thin films by reactive magnetron co-sputtering at high pressure for the electrochemical promotion of catalysis of ethylene into ethylene oxide
Benjamin Gilbert1, Stéphanie Bruyère1, Thomas Cavoué2, Ioanna Kalaitzidou2, Angel Caravaca2, Philippe Vernoux2, David Horwat1
1Institut Jean Lamour, Nancy, France, 2Université de Lyon, IRCELYON, Lyon, France
Abstract

Poster - Plasma treatment and cleaning

PO2064 Characteristic Material Loading of Coupled Thermal and Dynamic Effects Generated by High-Intensity Pulsed Ion Beam
X.P. Zhu1, Q. Zhang1, L. Ding1, K.L. Han1, A.I. Pushkarev2, M.K. Lei1
1Dalian University of Technology, Dalian, China, 2Tomsk Polytechnic University, Tomsk, Russian Federation
Abstract

PO2065 First stages of surface modification by low kinetic energy helium ions produced in a dedicated ICP-RF plasma source
Anne-Lise THOMANN1, Lucile PENTECOSTE1, Amaël CAILLARD1, Thomas LECAS1, Pierre DESGARDIN2, Marie-France BARTHE2, Pascal BRAULT1
1GREMI CNRS/Université d'Orléans, Orléans, France, 2CEMHTI CNRS, Orléans, France
Abstract

PO2066 On the origin of the high time constant for reaching stationary superficial nitrogen content in plasma diffusion treatments of austenitic stainless steel
Gregory MARCOS1, Aurore Andrieux1, Thierry Czerwiec1
1Institut Jean Lamour, NANCY, France
Abstract

PO2067 Artificial Neural Networks for the Prediction of Plasma Nitration Results
Markus Mejauschek1, Pierre Landgraf2, Jörg Pribbenow2, Weber Martin1, Hanno Paschke1, Günter Bräuer1, Thomas Lampke2
1Fraunhofer IST, Braunschweig, Germany, 2IWW - Chemnitz University, Chemnitz, Germany
Abstract

PO2068 Novel Atmospheric-Pressure Plasma Technology for Treatment of Fibrous Materials: Low-Cost, High-Speed Finishing of Nonwoven Fabrics and Low-Temperature Calcination of Inorganic Submicron Fibers
Dusan Kovacik1, Veronika Medvecka2, Richard Krumpolec1, Jozef Rahel1, Mirko Cernak1
1CEPLANT, Masaryk University, Brno, Czech Republic, 2Comenius University, Bratislava, Slovak Republic
Abstract

PO2069 Investigation of surface pretreatment on cemented carbide cutting tools by plasma electrolytic polishing (PEP) for enhanced hard coating adhesion
Sehoon An1, Roland Ihrke1, Antje Quade1, Hendrik Riemer2, Mirjana Petersen3, Hanno Paschke4, Maik Fröhlich1
1INP Greifswald e.V., Greifswald, Germany, 2Technical University Berlin, Berlin, Germany, 3Albrecht + Schumacher Oberflächentechnik, Bassum, Germany, 4Fraunhofer IST, Braunschweig, Germany
Abstract

PO2070 Investigations on the antimicrobial effect and the surface modifications on cutting blades by atmospheric plasma jet treatment
Antje Lehmann1, Thomas Arnold2, Thiemo Albert3, Anna J. Dittrich3, Peggy G. Braun3
1Leibniz Intitute of Surface Engineering, Leipzig, Germany, 2Leibniz-Institute of Surface Engineering, Leipzig, Germany, 3University of Leipzig, Leipzig, Germany
Abstract

PO2071 Surface modification of oxide-covered zinc and zinc alloys by means of DBD treatment
Steffen Knust1, Andreas Czerny2, Teresa de los Arcos1, Claus-Peter Klages2, Guido Grundmeier1
1University of Paderborn, Paderborn, Germany, 2Technische Universität Braunschweig, Braunschweig, Germany
Abstract

PO2072 Atmospheric pressure plasma treatment of polyurethane foams with oxygen containing feed mixtures
Vincenza Armenise1, Fiorenza Fanelli2, Francesco Fracassi1
1Dpt of Chemistry, University of Bari, Bari, Italy, 2Institute of Nanotechnology,CNR, Bari, Italy
Abstract

PO2073 Surface Modification of Polytetrafluoroethylene by Atmospheric Pressure Plasma of Dielectric Barrier Discharge with Ar/Liquid Vapor Mixture Gas
Hideki Yajima1, Izumi Serizawa1, Masahiko Tani2, Hiroshi Furuta2, Akimitsu Hatta2
1ORC Manufacturing Co., Ltd., Chino, Japan, 2Kochi University of Technology, Tosayamada, Kami, Kochi, Japan
Abstract

PO2074 Surface Modification by Atmospheric Pressure Plasma Jet for Texturing Monocrystalline Silicon Solar Cell
Jhao-Yu Guo1, Yu-Lin Kuo1, Hsien-Po Wang1
1NTUST, Taipei City, Taiwan
Abstract

PO2075 Solder Wettability Improvement in Copper (Cu) Substrate using Direct Current Atmospheric Plasma
Sagung Kencana1, Hsien-Po Wang2, Andromeda Laksono2, Jhao-Yu Guo2, Wallace Chuang3, Eckart Schellkes3, Yee-Wen Yen2, Yu-Lin Kuo2
1Taiwan Tech. (NTUST), Robert Bosch Taiwan Co., Ltd., Taipei, Taiwan, 2Taiwan Tech. (NTUST), Taipei, Taiwan, 3Robert Bosch Taiwan Co., Ltd., Taipei, Taiwan
Abstract

PO2076 Surface Modification of Soda-Lime Glass by Low-Pressure Glow Plasma and Gliding Arc Plasma Treatments
Pedram Ghoorchi Beigi1, Leila Zahedi1, Mohammad Reza Khani1, Babak Shokri2
1Laser and Plasma Institute, Shahid Beheshti University, Tehran, Iran, 2Department of Physics, Shahid Beheshti University, Tehran, Iran
Abstract

PO2077 Batch Microwave Plasma Cleaning for Robustification of Automotive Devices
Ghizelle Abarro1, Rod Delos Santos, Jr.1, Ariel Tan2, Alvin Denoyo1, Manny Ramos1
1ON Semiconductor Philippines Inc., Carmona, Cavite, Philippines, 2ON Semiconductor Philippines Inc, Carmona, Cavite, Philippines
Abstract

PO2079 Adaptations in diffusion treatments enable the tool life time enhancement of forging dies
Hanno Paschke1, Markus Mejauschek2, Martin Weber2, Kai Brunotte3, Martin Siegmund3, Lennard Lippold3, Dominik Lenz4, Guenter Braeuer2, Bernd-Arno Behrens3, Peter Dueltgen4
1Fraunhofer IST, Dortmund, Germany, 2IST Institute for Surface Engineering, Braunschweig, Germany, 3IFUM Institute for Forming Technology, Garbsen, Germany, 4IFW Institute for Tool Research, Remscheid, Germany
Abstract

PO2080 An investigation on pulsed microwave-driven plasma jet etching for borosilicate glass
Faezeh Kazemi1, Thomas Arnold1
1Leibniz Institute of Surface Engineering, Leipzig, Germany
Abstract

PO2081 Fundamental research into a microwave-driven remote plasma source
Mario Dünnbier1, Joachim Schneider1, Oliver Deppert1, Klaus Baumgärtner1, Steffen Riegger2, Andreas Schulz2, Matthias Walker2, Günter Tovar2
1Muegge GmbH, Reichelsheim, Germany, 2IGVP, Stuttgart, Germany
Abstract

PO2082 Optimization of novolak-based photoresists for ion beam planarization of aluminium mirrors
Melanie Ulitschka1, Jens Bauer1, Frank Frost1, Ulrich Decker1, Ingrid Reinhardt1, Thomas Arnold1
1Leibniz Institute of Surface Engineering, Leipzig, Germany
Abstract

PO2083 Plasma-etching of biomaterials to produce nanostructures with low refractive index
Ulrike Schulz1, Lisa-Marija Ahrens1, Heiko Knopf1, Peter Munzert1, Tina Seifert1, Norbert Kaiser1
1Fraunhofer IOF, Jena, Germany
Abstract

PO2084 Modelling and Study of a Microwave-Plasma-Source for High-rate Etching
Steffen Riegger1, Andreas Schulz1, Matthias Walker1, Günter Tovar1, Mario Dünnbier2, Joachim Schneider2, Oliver Deppert2, Klaus Baumgärtner2
1IGVP, University of Stuttgart, Stuttgart, Germany, 2Muegge GmbH, Reichelsheim, Germany
Abstract

PO2085 Plasma decapsulation of microchips with silver (Ag) bonding wires
Mario Dünnbier1, Joachim Schneider1, Jens Hofmann1, Josef Mathuni1, Klaus Baumgärtner1
1Muegge GmbH, Reichelsheim, Germany
Abstract

PO2086 Plasma surface treatment of PLA polymers by PECVD in tissue engineering
babak shokri1, soad mohsenimehr2, Mohammad Reza Khani2, Mohammad Reza Baghaban Eslaminejad3, Nesa Fani3
1Shahid Beheshti university, Tehran, Iran, 2Shahid Beheshti University, Tehran, Iran, 3Royan Institute for Stem Cell Biology, Tehran, Iran
Abstract

PO2087 Si based coated fabrics using plasma polymerization method for efficient oil-water separation
babak shokri1, leila ghorbani2, ali khatibi2
1Shahid Beheshti university, Tehran, Iran, 2Shahid Beheshti University, Tehran, Iran
Abstract

PO2088 The Study of Fuzzy Tungsten Production in a Magnetron Source
Patrick McCarthy1, Dogyun Hwangbo2, Shin Kajita2, James W. Bradley1
1The University of Liverpool, Liverpool, United Kingdom, 2Nagoya University, Nagoya, Japan
Abstract

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