Program

Status as Sep 19, 2018

Thursday, September 20, 2018Poster Session, 15:15 - 16:45

Poster - HiPIMS

PO4001 Multiple plasma source synchronization for improved process optimization: a Ti-Cr-based anticorrosion coating case study
Wojciech Gajewski1, Krzysztof Ruda1, Anna W. Oniszczuk1, Paweł Lesiuk1, Paweł Ozimek1
1TRUMPF Huettinger Sp. z o.o., Zielonka, Poland
Abstract

PO4002 Preparation of good adhered cobalt oxide films on stainless steel support by combination of reactive magnetron sputtering and electrochemical deposition
Petra Ksirova1, Michaela Dvorakova1, Roman Perekrestov1, Martin Cada1, Zdeněk Hubicka1, Jaroslav Maixner2, Kvetuse Jiratova3, Frantisek Kovanda2
1Institute of Physics CAS, Praha, Czech Republic, 2UCT Prague, Praha, Czech Republic, 3IPCF CAS, Praha, Czech Republic
Abstract

PO4003 Low-temperature deposition of thermochromic VO2 films on glass and kapton using reactive deep oscillation magnetron sputtering
Michal Procházka1, Sahib Babaee Tooski1, Jaroslav Vlcek1, Radomir Cerstvy1
1University of West Bohemia, Plzeň, Czech Republic
Abstract

PO4004 Microwave plasma assisted chemical vapor deposition of silica
Holger Gerdes1, Ralf Bandorf1, Rolf Schäfer2, Thomas Schütte3, Michael Vergöhl1, Günter Bräuer1
1Fraunhofer IST, Braunschweig, Germany, 2ROBEKO GmbH & Co.KG, Mehlingen, Germany, 3PLASUS GmbH, Mehring, Germany
Abstract

PO4005 Dynamic Measurements of Secondary Electron Emission Coefficient during PIII Processing
Darina Manova1, Fabian Haase2, Holger Kersten2, Stephan Mändl1
1Leibniz Institute of Surface Engineering, Leipzig, Germany, 2Christian-Albrechts-Universität Kiel, Kiel, Germany
Abstract

PO4006 Cylindrical magnetron with multiple dynamic areas of toroidal plasma
Marek Betiuk1, Zbigniew Lataś2
1Institute of Precision Mechanics, Warsaw, Poland, 2Instytute of Precision Mechanics, Warsaw, Poland
Abstract

PO4008 Controlling the Stress in Titanium Nitride Thin Films by Reducing the Amount of Doubly-Ionized Metal Ion in HiPIMS discharges
Rommel Paulo Viloan1, Julien Keraudy1, Robert Boyd1, Ulf Helmersson1
1IFM, Linköping University, Linköping, Sweden
Abstract

PO4009 Investigation of a pressure gradient Ar plasma sputtering for metal thin film deposition
Hiroki Oota1, Kiyomi Takahashi1, Jun-Seok Oh2, Kazunori Koga3, Tatsuyuki Nakatani4, Masafumi Ito2, Masaharu Shiratani3, Ken Yonezawa1
1Kenix Corporation, Himeji, Japan, 2Meijo University, Nagoya, Japan, 3Kyushu University, Fukuoka, Japan, 4Okayama University of Science, Okayama, Japan
Abstract

PO4010 Titanium deposition on polymer substrate by high-power pulsed sputtering Penning discharge in Ar/N2 mixture gas ambient
Kingo Azuma1, Ryo Nagai1, Yoshihiro Oka1, Shin-ichi Honda1, Takashi Kimura2, Setsuo Nakao3
1University of Hyogo, Himeji, Japan, 2Nagoya Institute of Thechnology, Nagoya, Japan, 3National Institute of AIST, Nagoya, Japan
Abstract

PO4011 Reactive HiPIMS deposition of MgO thin films using peak current regulation and its in-vitro corrosion performance for medical applications
Silmina Adzhani1, Hidetoshi Komiya1, Ana Beatriz Chaar2, Yoshikazu Teranishi3, Tetsuhide Shimizu1, Ming Yang1
1Tokyo Metropolitan University, Tokyo, Japan, 2Linköping University, Linköping, Sweden, 3TIRI, Tokyo, Japan
Abstract

PO4012 Effect of ion-to-neutral ratio on thickness distribution of Ti and Al films on inner wall of small hole deposited by HiPIMS
Hidetoshi Komiya1, Tetsuhide Shimizu1, Ana Beatriz Chaar2, Yoshikazu Teranishi3, Ming Yang1
1Tokyo Metropolitan University, Tokyo, Japan, 2Linköping University, Linköping, Sweden, 3Tokyo Metropolitan Industrial Res. Inst., Tokyo, Japan
Abstract

PO4013 HYDROGEN-FREE DLC COATINGS DEPOSITED BY HiP GIMS
Krzysztof ZDUNEK1, Rafal CHODUN1, Lukasz Skowronski2, Katarzyna Nowakowska-Langier3, Bartosz Wicher1
1Warsaw University of Technology, Warsaw, Poland, 2Kazimierz Wielki University, Bydgoszcz, Poland, 3National Centre for Nuclear Research, Otwock, Poland
Abstract

PO4014 Comparative microstructure, chemical composition, optical and tribo-mechanical properties of CrAlN coatings deposited by HiPMS and DC magnetron sputtering
Santiago Dominguez Meister1, Iñigo Braceras Izaguirre1, Marta Brizuela Parra1, Teresa Cristina Rojas Ruiz2, Juan Carlos Sanchez Lopez3
1Tecnalia, San Sebastian - Donostia, Spain, 2Insituto Ciencia Materiales de Sevilla, Sevilla, Spain, 3Instituto Ciencia Materiales de Sevilla, Sevilla, Spain
Abstract

PO4015 Synthesis of highly adhesive and hard amorphous carbon films on Silicon and PTFE substrates by dual magnetron sputtering for sensing applications
Rajesh Ganesan1, Kerstin Thorwarth1, Rajesh Ganesan1, Ainhoa Prado1, Roland Haurt1, Hans-Josef Hug1
1EMPA Swiss Federal Laboratories for Mate, Dübendorf, Switzerland
Abstract

PO4016 New approach for arcing mitigation methods
Anna W. Oniszczuk1, Wojciech Gajewski1, Piotr Różański1, Paweł Lesiuk1, Paweł Ozimek1
1TRUMPF Huettinger Sp. z o.o., Zielonka, Poland
Abstract

PO4017 Process optimization of Ti-based compound films in HiPIMS
Felipe Cemin1, Tiberiu Minea1, Daniel Lundin1
1LPGP / Université Paris-Saclay, Orsay, France
Abstract

PO4018 Fast Impedance Matching using Semiconductor Switches
Roland Gesche1, Joachim Scherer1, Martin Krellmann2
1Aurion Anlagentechnik GmbH, Seligenstadt, Germany, 2BEAPLAS GmbH, Berlin, Germany
Abstract

PO4019 W-B-C hard yet ductile coatings prepared by High Power Impulse Magnetron Sputtering
Saeed Mirzaei1, Mostafa Alishahi1, Pavel Souček1, Peter Klein1, Lukáš Zábranský1, Vilma Buršíková1, Monika Stupavská1, Katalin Balázsi2, Zsolt Czigány2, Petr Vašina1
1Masaryk University, Brno, Czech Republic, 2Hungarian Academy of Sciences, Budapest, Hungary
Abstract

Poster - Other plasma based surface processing technologies

PO4023 Options to Tailor Thin Film Properties by Ion Beam Sputter Deposition
Carsten Bundesmann1, Thomas Lautenschläger1, René Feder1, Daniel Spemann1
1Leibniz Institut of Surface Engineering, Leipzig, Germany
Abstract

PO4024 Ion Beam Trimming of Compound Wafer
Thoralf Dunger1, Carsten Schulze1
1scia Systems GmbH, Chemnitz, Germany
Abstract

PO4025 Sub-aperture ion beam finishing of optical mirror devices
Jens Bauer1, Melanie Ulitschka1, Frank Frost1, Thomas Arnold1
1Leibniz Institute of Surface Engineering, Leipzig, Germany
Abstract

PO4026 High precise local film thickness and surface correction using an ion beam tool
Dirk Rost1, Monika Fritzsche2, Jens Landrock2, Mirko Kehr2
1Meyer Burger (Germany) GmbH, Hohenstein-Ernstthal, Germany, 2Meyer Burger (Germany) GmbH, 09337 Hohenstein-Ernstthal, Germany
Abstract

PO4027 High precise local film thickness correction
Monika Fritzsche1, Anja Banholzer2, Mirko Wölflick2, Dirk Rost2
1Meyer Burger (Germany) GmbH, Hohenstein-Ernstthal, Germany, 2Meyer Burger (Germany) GmbH, Hohenstein-Ernstthal, Germany
Abstract

PO4028 Ordering of Nitrogen-Supersaturated Interstitial Solid Solution in Fe-Cr-Ni Austenitic Alloys and Steel Modified by Plasma-Based Low-Energy Ion Implantation
Honglong Che1, S. Tong1, K.S. Wang1, M.K. Lei1
1Dalian University of Technology, Dalian, China
Abstract

PO4029 Oxidation behavior of Zr–1Nb in air at 400°C after Titanium Plasma Immersion Ion Implantation
Aleksei Obrosov1, Alina Sutygina2, Egor Kashkarov2, Sabine Weiß1
1Brandenburg Technical University, Cottbus, Germany, 2National Research Tomsk Polytechnic Univ, Tomsk, Russian Federation
Abstract

PO4030 Development of a post oxidizing process over nitrided and nitrocarburized steels for wear and corrosion protection
Sonia Brühl1, Eugenia Dalibon1, Amado Cabo2, Guillermo Carfi3, Pablo Cirimello3
1UTN, Concepcion del Uruguay, Argentina, 2IONAR S.A., Buenos Aires, Argentina, 3YPF Tecnología S.A., Berisso, Buenos Aires, Argentina
Abstract

PO4031 INVESTIGATION OF MECHANICAL, STRUCTURAL AND CORROSION RESISTANCE PROPERTIES OF LOW CARBON STEEL AFTER PLASMA CARBURIZING AND CARBONITRIDING PROCESS
ALPHONSA JOSEPH1, Ghanshyam Jhala1, Akshay Vaid1, Suryakant Gupta1, Keena Kalaria1, Naresh Vaghela1, Subroto Mukherjee1
1Institute for Plasma Research, Gandhinagar, India
Abstract

PO4032 Improvement of Hardness and Toughness by Combined Heat Treatment of High Temperature Plasma Nitriding and Austempering
Masahiro Okumiya1, Koichiro Nambu1, Sang Gweon Kim2, Jung-Hyun Kong1, Masashi Yoshida3
1Toyota Technological Institute, Nagoya, Japan, 2Korea Institute of Industrial Technology, Incheon, South Korea, 3Daido University, Nagoya, Japan
Abstract

PO4033 Cromatipic; A sophisticated way of Metallizing plastics with in-line technology for high quality and productivity.
Chinmay Trivedi1, Chinmay Trivedi2, Emilio Rodriguez2, Dave Doerwald2, Jeroen Landsbergen1
1IHI Hauzer Techno Coating BV, Venlo, Netherlands, 2IHI Hauzer Techno Coating, Venlo, Netherlands
Abstract

PO4034 Plasma deposition of textiles for obtaining electromagnetic shielding and fire-retardant properties
Bogdana Mitu1, Veronica Satulu1, Razvan Ion Radulescu2, Lilioara Surdu2, Gheorghe Dinescu1
1Nat Inst for Lasers, Plasma & Rad Phys, Magurele, Romania, 2Nat R&D Inst for Textiles and Leather, Bucharest, Romania
Abstract

PO4035 Bilayer coatings obtained by a combination of electro-spark deposition, magnetron sputtering and pulsed arc evaporation
Dmitry Shtansky1, Evgeny Levashov2, Philip Kiryukhantsev-Korneev2, Konstantin Kuptsov2, Aleksander Sheveyko2
1Nat. Univ. Science and Technology MISiS, Moscow, Russia, 2Nat. Univ. Science and Technology MISIS, Moscow, Russian Federation
Abstract

PO4036 One-dimensional nanoelectrodes fabricated by plasma-assisted techniques
Juan Ramon Sanchez-Valencia1, Victor Lopez-Flores2, Rafael Alvarez1, Francisco Garcia-Garcia2, Francisco J. Aparicio2, Jorge Gil-Rostra2, T. Cristina Rojas2, Alberto Palmero2, Angel Barranco2, Ana Borras2
1Inst.Materials Science-Univ.Seville, Seville, Spain, 2Inst. Materials Science of Seville-CSIC, Seville, Spain
Abstract

PO4037 Development of Ion Source for Novel Applications
Heqing Li1, Victor Bellido Gonzalez1, Dermot Monaghan1, Steven Stanley1, Tommaso Sgrilli1, Florian Meyer2
1Gencoa Ltd, Liverpool, United Kingdom, 2Gencoa Ltd (Central Europe), Liverpool, United Kingdom
Abstract

PO4038 Plasma Hardening of Sol-Gel Coatings
Kerstin Horn1, Andreas Pfuch1, Oliver Beier1, Natalie Fritzlar1, Carmen Marschner1, Andreas Hinterer2, Philipp Stögmüller2, Richard Krumpolec3
1INNOVENT e.V., Jena, Germany, 2INOCON Technologie GmbH, Attnang-Puchheim, Austria, 3CEPLANT, Masaryk University, Brno, Czech Republic
Abstract

PO4039 Advanced Fibers by Plasma-Deposited Multilayers
Martin Amberg1, Tomáš Plichta1, Daniel Leutenegger1, Patrick Rupper1, Dirk Hegemann1
1Empa, St.Gallen, Switzerland
Abstract

Poster - Atmospheric and in liquids plasma

PO4041 Synthesis of PbO2 nanosheets by discharges in liquid nitrogen
Thierry BELMONTE1, Ahmad HAMDAN1, Hiba KABBARA1, Alexandre NOMINE1, Cédric NOEL1, Jaafar GHANBAJA1, Abdelkrim REDJAIMIA1
1Institut Jean Lamour, NANCY, France
Abstract

PO4042 In-situ statistics of microdischarges by image processing as a means of process control during plasma electrolytic oxidation (PEO)
Patrick Hermanns1, Vera Bracht1, Simon Böddeker1, Peter Awakowicz1
1Ruhr-Universität Bochum, Bochum, Germany
Abstract

PO4043 Influence of a liquid surface on the reaction chemistry of a cold atmospheric pressure plasma jet
Luka Hansen1, Robert Bansemer2, Ansgar Schmidt-Bleker2, Holger Kersten1, Klaus-Dieter Weltmann2, Stephan Reuter2
1Christian-Albrechts-Universität zu Kiel, Kiel, Germany, 2INP Greifswald e.V., Greifswald, Germany
Abstract

PO4044 Plasma in liquid for nanocellulose modification
Sorin Vizireanu1, Maria Daniela Ionita1, Eusebiu Rosini Ionita1, Daniel Silviu Stoica1, Lavinia Gabriela Carpen1, Maximilian Teodorescu1, Denis Panaitescu2, Gheorghe Dinescu1
1I.N.F.L.P.R, Magurele-Bucharest, Romania, 2ICECHIM, Bucharest, Romania
Abstract

PO4045 Investigation of DC-Arcjets for the Ignition of Coal Powder
Stefan Merli1, Reyhane Youssefi2, Jörg Maier2, Andreas Schulz1, Matthias Walker1
1IGVP, University of Stuttgart, Stuttgart, Germany, 2IFK, University of Stuttgart, Stuttgart, Germany
Abstract

PO4046 Microwave Plasma reactor for CO2 decomposition
Irina Kistner1, Thomas Schiestel2, Andreas Schulz1, Matthias Walker1, Günter Tovar1
1IGVP, University of Stuttgart, Stuttgart, Germany, 2IGB, Fraunhofer Institute, Stuttgart, Germany
Abstract

PO4047 Behavior of NH Radicals in Atmospheric-Pressure Plasma Jet Nitriding
Seiga Chiba1, Ryuta Ichiki1, Syuichi Akamine1, Seiji Kanazawa1
1Oita university, Oita, Japan
Abstract

PO4048 Controlling Supplied Nitrogen Concentration in Atmospheric-Pressure-Plasma Nitro-Quenching
Masayuki Kono1, Ryuta Ichiki1, Syuichi Akamine1, Seiji Kanazawa1, Tatsuro Onomoto2
1Oita university, Oita, Japan, 2Fukuoka Industrial Technology Center, Kitakyushu, Japan
Abstract

PO4049 Photocatalytically supported dielectric barrier discharge for waste gas treatment
Andreas Schulz1, Stefan Merli1, Daniel Dobslaw2, Matthias Walker1
1IGVP, University of Stuttgart, Stuttgart, Germany, 2ISWA, University of Stuttgart, Stuttgart, Germany
Abstract

PO4050 Property of three dimensional atmospheric plasma used by water-dielectric multi-layer electrode
Tatsuya Misawa1
1Saga University, Saga, Japan
Abstract

PO4051 Deposition of metallic nanoparticles on polymers by atmospheric plasma for further metallization
Kira Rosanova1, Jost Degenhardt1, Jörg Ihde1, Ralph Wilken1
1Fraunhofer IFAM, Bremen, Germany
Abstract

Poster - Analytics of film structures and properties

PO4054 Chemical Structure of Plasma-Polymerized Organosilicones by FTIR
Martin Bránecký1, Vladimír Čech1
1FCH, Brno University of Technology, Brno, Czech Republic
Abstract

PO4055 Differences in properties and oxidation behavior of amorphous and crystalline magnetron sputtered Zr–Cu alloys
Michal Zítek1, Michaela Kotrlová1, Petr Zeman1
1University of West Bohemia, Plzeň, Czech Republic
Abstract

PO4056 Nitriding layer formation during high-temperature short-time plasma nitriding
Naoya Toshioka1, Akio Nishimoto1
1Kansai University, Osaka, Japan
Abstract

PO4057 The contact mechanics of nano-abrasion of dental enamel
M.V. Swain1, P. Lucas2, S. Michael3, N. Bierwisch4, N. Schwarzer4
1AMME, Sydney University, Sydney, Australia, 2Tropical Research Institute, Tupper Balboa Ancon, Panama, 3Bioclinical Sciences, Kuwait University, Kuwait, Kuwait, 4Saxonian Institute of Surface Mechanics, Ummanz, Germany
Abstract

PO4058 Dedicated grain-boundary design by glancing angle deposition for fracture toughness enhancement of brittle nanocrystalline films
Tobias Ziegelwanger1, Michael Meindlhumer1, Walter Baumegger1, Christian Mitterer1, Jozef Keckes1, Rostislav Daniel1
1Montanuniversität Leoben, Leoben, Austria
Abstract

PO4059 Study on the origin of roughness increase on low-temperature plasma nitrided AISI420 martensitic stainless steel
Rodrigo Perito Cardoso1, Igor Giacomelli Zanella2, Vitor Cassio Yamamoto Franceschini2, Silvio Francisco Brunatto2
1UFPR/Brazil, Curitiba, Brazil, 2UFPR, Curitiba, Brazil
Abstract

PO4060 Surface characterization of nitrided alluminum alloyed hot work tool steel
Vinicius Cardoso Ottani1, Alberto Moreira Jorge Júnior2
1UFSCAR, Limeira, Brazil, 2UFSCar, São Carlos, Brazil
Abstract

PO4061 Acoustic emission as a tool for extended tribo-mechanical characterization at nano/micro scale – application to nanoindentation and scratch test
Radim Ctvrtlik1, Jan Tomastik1, Martin Drab2, Vaclav Koula2
1Palacky University, Olomouc, Czech Republic, 2ZD Rpety - Dakel, Prague, Czech Republic
Abstract

PO4062 Mechanical characterization of silicon-containing plasma polymer coatings and the influence of environmental conditions
Michiel Top1, Michiel Top1
1Fraunhofer FEP, Dresden, Germany
Abstract

PO4063 Simultaneous carburizing and boronizing of a pure titanium surface using spark plasma sintering
Takato Karimoto1, Akio Nishimoto1
1Kansai University, Osaka, Japan
Abstract

PO4064 Evaluation and Visualization of Surface Coating Strength Properties by a Micro Slurry-jet Erosion (MSE) Test Method
Yoshiro Iwai1, Shinya Takada1, Takuya Takazawa1, Tohru Matsubara2, Tsutomu Katsumata2
1University of Fukui, Fukui-shi, Fukui, Japan, 2Palmeso Co., Ltd., Nagaoka-shi, Japan
Abstract

PO4065 Increasing the ductility of single crystalline silicon treated by hydrogen plasma
Hayato Izumi1, Masaru Nakamura1, Shoji Kamiya1
1Nagoya Institute of Technology, Nagoya, Japan
Abstract

PO4066 Application of Calotest and Scratch test for evaluation of structure and quality of multilayer coatings - the Recatest method
Marek Betiuk1
1Institute of Precision Mechanics, Warsaw, Poland
Abstract

PO4068 Optical and electrical properties of silicon carbonitride thin films deposited by sputtering on Si (100) and nitrided Si (100): Effect of the interface
Abdellatif BACHAR1, Christine Robert-Goumet1, Angélique Bousquet1, Guillaume Monier1, Christelle Varenne1, Amadou Ndiaye1, Eric Tomasella1
1Clermont Auvergne University, Aubière, France
Abstract

PO4069 Effect of bias on layer formation during two-step plasma nitriding using a cathodic screen
Mikiho Waga1, Naoya Toshioka1, Akio Nishimoto1
1Kansai University, Osaka, Japan
Abstract

Poster - Properties of technological plasmas

PO4072
Can the normalized energy flux at the substrate control the microstructure of reactively sputtered TiO2 thin films ?
Stephanos Konstantinidis1, Pierre-antoine Cormier1, Romain Tonneau2, Pavel Moskovkin2, Stéphane Lucas2
1University of Mons, Mons, Belgium, 2University of Namur, Namur, Belgium
Abstract

PO4073 Study of Diglyme Plasmas by Optical Emission Spectroscopy and Langmuir Probe Analysis
Rogério Pinto Mota1, Pedro William Paiva Moreira Júnior1, Roberto Yzumi Honda1
1Univ. Estadual Paulista - UNESP, Guaratinguetá, Brazil
Abstract

PO4074 Analysis of Diglyme Plasmas under Low Pressure Low Temperature Conditions by Mass Spectrometry
Pedro William Paiva Moreira Júnior1, Rogério Pinto Mota1, Roberto Yzumi Honda1
1Univ. Estadual Paulista - UNESP, Guaratinguetá, Brazil
Abstract

PO4075 Formation of Ar2+, ArTi+, and Ti2+ dimer ions in a dc magnetron discharge
Martin Cada1, Rainer Hippler2, Vitezslav Stranak3, Zdenek Hubicka1, Christiane Helm2
1Institute of Physics of the ASCR, Prague 8, Czech Republic, 2Universität Greifswald, Greifswald, Germany, 3University of South Bohemia, Ceske Budejovice, Czech Republic
Abstract

PO4076 Titanium Atom and Ion Number Density Evolution in Reactive High Power Impulse Magnetron Sputtering
Matej Fekete1, Daniel Lundin2, Katarína Bernátová3, Peter Klein3, Jaroslav Hnilica3, Petr Vašina3
1Masaryk Univesity, Brno, Czech Republic, 2Université Paris-Sud, Orsay, France, 3Masaryk University, Brno, Czech Republic
Abstract

PO4077 Determination of the deposition and energy fluxes in the industrial deposition system
Peter Klein1, Jaroslav Hnilica1, Marta Šlapanská1, Katarína Bernátová1, Petr Vašina1
1Masaryk University, Brno, Czech Republic
Abstract

PO4078 Space-resolved evolution of sputtered species number densities in HiPIMS and DCMS discharge
Katarína Bernátová1, Matej Fekete1, Peter Klein1, Jaroslav Hnilica1, Petr Vašina1
1Masaryk University, Brno, Czech Republic
Abstract

PO4079 Quantitative determination of the species produced in low pressure N2-H2 plasmas by in-situ mass spectrometry
Cedric NOEL1, Gregory MARCOS1, Ana Gasco2, Silvia SIMISON3, Sonia Bruhl2, Thierry BELMONTE1, Thierry CZERWIEC1
1Institut Jean Lamour, NANCY, France, 2National University of Technology, Concepción del Ururguay, Argentina, 3INTEMA (CONICET-UNMdP), Mar del Plata, Argentina
Abstract

PO4080 Time Resolved Optical Emission Spectroscopy Measurements during PIII High Voltage Pulses
Stephan Mändl1, Darina Manova2
1Leibniz Institute for Surface, Leipzig, Germany, 2LeibnizInstitute for Surface Engineering, Leipzig, Germany
Abstract

PO4081    Energy influx measurements on an atmospheric pressure surface barrier discharge
Luka Hansen1, Kristian Reck1, Sven Gauter1, Holger Kersten1
1Christian-Albrechts-Universität zu Kiel, Kiel, Germany
Abstract

PO4082 Space-resolved analysis of hollow cathode discharges in blind holes
Rafael Gryga1, Patrick Hofmann1, Matthias Müller1, Sven Ulrich2
1Robert Bosch Manufacturing Solutions, Stuttgart, Germany, 2Institute for Applied Materials (KIT), Karlsruhe, Germany
Abstract

PO4083 Spatially resolved characterization of momentum transfer during sputter processes
Mathis Klette1, Thomas Trottenberg1, Holger Kersten1
1Universität Kiel, Kiel, Germany
Abstract

PO4084 Plasma Density Monitoring of long-term PIAD Processes
Sina Malobabic1, Moritz Oberberg2, Jens Harhausen3, Rüdiger Foest3, Lars Mechold1, Peter Awakowicz2, Ralf Peter Brinkmann4
1Laser Components GmbH, Olching, Germany, 2AEPT, Ruhr-Universität, Bochum, Germany, 3INP Greifswald, Greifswald, Germany, 4TET, Ruhr-Universität, Bochum, Germany
Abstract

PO4085 Properties and surface interaction of a low pressure microwave microplasma as an electron source for a MEMS device miniature mass spectrometer
Patrick Hermanns1, Stephan Westerdick1, Benedikt Janssen1, Simon Böddeker1, Peter Awakowicz1
1Ruhr-Universität Bochum, Bochum, Germany
Abstract

PO4086 Process characterization of reactive magnetron sputtering using two reactive gases for tuning the properties of TaOxNy thin films
Catalin Vitelaru1, Anca Constantina Parau1, Iulian Pana1, Leslie Felicia Petrik2, Mariana Braic1
1National Institute for Optoelectronics, Magurele-ILFOV, Romania, 2University of the Western Cape, Bellville, South Africa
Abstract

PO4087 PIC simulations of spoke structures in the dcMS and HiPIMS regimes of magnetron discharges
Denis Eremin1
1Ruhr-University Bochum, Bochum, Germany
Abstract

PO4088 Plasma simulation of hollow cathode effect in a blind hole
Patrick Hofmann1, Rafael Gryga1, Matthias Müller1, Sven Ulrich2
1Robert Bosch Manufacturing Solutions, Stuttgart, Germany, 2Karlsruhe Institute of Technology, Karlsruhe, Germany
Abstract

PO4089 Analysis of the sheath behavior of an analytic model for a capacitive discharge
Laura Kroll1, Dennis Engel1, Ralf Peter Brinkmann1
1Theoretische Elektrotechnik, Bochum, Germany
Abstract

PO4090 Artificial Neural Networks as Plasma-Surface Interface for Sputtering and Gas-Phase Transport Simulations
Florian Krueger1, Tobias Gergs1, Thomas Mussenbrock2, Jan Trieschmann2
1Ruhr University Bochum, Bochum, Germany, 2Brandenburg University of Technology, Cottbus, Germany
Abstract

PO4091 Analysis of a lumped element model for radio frequency magnetron discharges
Dennis Engel1, Laura Kroll1, Ralf Peter Brinkmann1
1TET / Ruhr Universität Bochum, Bochum, Germany
Abstract

PO4092 A New Method for Measuring Chemical Composition with Hollow Cathode Discharges
Vladimir Scheid1, Patrini Oliveira2
1Dept. of Aerospace Science and Thecnol, sao jose dos campos, Brazil, 2Dept. of Aerospace Science and Technol., sao jose dos campos, Brazil
Abstract

PO4093 Investigation of Plasma Nitriding Process by Absorption Spectroscopy
Vladimir Scheid1, Davi Neves2
1Dept. of Aerospace Science and Thecnol, sao jose dos campos, Brazil, 2Dept. of Aerospace Science and Technol., sao jose dos campos, Brazil
Abstract

PO4094 RF hollow feeder for ITER diagnostic mirrors cleaning system: breakdown risk assessment
Dmitry Samsonov1, Sergey Masyukevich1, Alexandr Chernakov2, Nikita Babinov1, Artem Dmitriev1, Eugene Mukhin1, Alexey Razdobarin1, Pavel Shigin3, Roger Reichle3, Michael Walsh3
1Ioffe Institute, St. Petersburg, Russia, 2ZAO Spectral-Tech, St.-Petersburg, Russian Federation, 3ITER Organization, St. Paul Lez Durance Cedex, France
Abstract

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