Program

Thursday, September 15, 2016Poster Session, 15:15 - 16:45

Poster - Properties of Technological Plasmas

PO4001 Exploring sheath and pre-sheath models of magnetrons with wavelength resolved imaging
Alexandre Nomine1, Derek Monahan2, Dominic Fulgoni3, Nicholas StJ Braithwaite1
1The Open University, Milton Keynes, gb, 2Cobham Technical Services, Kidlington, United Kingdom, 3Teer Coatings Ltd, Droitwich, United Kingdom
Abstract

PO4002 A NOVEL SENSOR USING REMOTE PLASMA EMISSION SPECTROSCOPY FOR MONITORING AND CONTROL OF VACUUM PROCESSES
Joseph Brindley1, Benoit Daniel1, Victor Bellido-Gonzalez1, Tony Williams1, Frank Papa2, William Sproul2
1Gencoa Ltd, Liverpool, gb, 2Gencoa USA, Davis, United States
Abstract

PO4003 Quantitative Low-Current Ion Beam Characterization by Beam Profiling and Imaging via Scintillation Screens
Susette Germer1, Fred Pietag1, Jaroslav Polak2, Thomas Arnold1
1IOM, Leipzig, de, 2TOPTEC, Turnov, Czech Republic
Abstract

PO4004 Influence of a control based on plasma parameters in a reactive sputter process on material properties
Moritz Oberberg1, Stefan Ries1, Peter Awakowicz1
1Ruhr-University Bochum, Institute AEPT, Bochum, de
Abstract

PO4005 Analysis of oxygen emission in RF plasma of CO2 andO2 mixtures
Danilo Zola1, Salvatore Scaglione1
1ENEA, DTE, C.R. Casaccia, Roma, it
Abstract

PO4006 Correlation of plasma parameters with the properties of layers deposited in a multi frequency CCP
Stefan Ries1, Dario Grochla2, Moritz Oberberg1, Alfred Ludwig2, Peter Awakowicz1
1AEPT, Bochum, de, 2Institute for Materials, Bochum, Germany
Abstract

PO4007 Spectroscopic study of a DBD-discharge for waste gas treatment
Andreas Schulz1, Devansh Sharma1, Stefan Merli1, Matthias Walker1
1Universität Stuttgart, IGVP, Stuttgart, de
Abstract

PO4008 Plasma Polymerization at Low- and Atmospheric-Pressure – A Comparison Based on Energy Conversion
Dirk Hegemann1, Bernard Nisol2, Sean Watson2, Michael R. Wertheimer2
1Empa, St.Gallen, ch, 2Groupe des Couches Minces, Polytechnique Montreal, Montreal, Canada
Abstract

PO4009 Separated effects of ions, metastables and photons on the properties of barrier layers on polymers
Beatrix Biskup1, Marc Böke1, Jan Benedikt1, Achim von Keudell1
1Ruhr-University Bochum - EPII, Bochum, de
Abstract

PO4010 Investigations of Dynamic Effects in Plasma Immersion Ion Implantation using Calorimetric Probe and High Speed Camera Measurements
Fabian Haase1, Darina Manova2, Stephan Mändl2, Holger Kersten1
1IEAP CAU Kiel, Kiel, de, 2Leibniz Institute of Surface Modification, Leipzig, Germany
Abstract

PO4012 Determination of the energy influx onto a high voltage pulsed substrate during HiPIMS with a fiber optic calorimetric probe
Sven Gauter1, Maik Fröhlich2, Wagdi Garkas2, Klaus-Dieter Weltmann2, Martin Polak2, Holger Kersten1
1IEAP CAU Kiel, Kiel, de, 2Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany
Abstract

PO4013 Modelling Industrial Scale Magnetron Sputter Processes
Dominic Fulgoni1, Derek Monahan2, John Simkin2, Alexandre Nominé3, Nicholas St.J Braithwaite3, Hailin Sun4, Kevin Cooke4
1Miba Coating Group, Teer Coatings Ltd, Droitwich, gb, 2Cobham Technical Services, Kidlington, United Kingdom, 3The Open University, Milton Keynes, United Kingdom, 4Miba Coatings Group, Teer Coatings Ltd, Droitwich, United Kingdom
Abstract

PO4014 Axially-symmetric three-dimensional fluid modelling of capacitively-coupled radio-frequency tetrametylsilane plasmas for silicon-containing diamond-like carbon thin-films deposition
Akinori Oda1, Kazuma Ohki2, Satoru Kawaguchi3, Kohki Satoh3, Hiroyuki Kousaka4, Takayuki Ohta5
1China Institute of Tehcnology, Chiba, jp, 2China Institute of Technology, Narashino, Japan, 3Muroran Institute of Technology, Muroran, Japan, 4Nagoya University, Nagoya, Japan, 5Meijo University, Nagoya, Japan
Abstract

PO4015 Transient Model of the Metallic Plasma and Neutral Gas Interaction in a Low-Pressure Arc
Diego Fernando Devia Devia1, Pedro Jose Arango Arango2, Elisabeth Restrepo Parra2, Sebastian Ramirez Ramirez2
1Universidad Tecnológica de Pereira, Pereira, co, 2Universidad Nacional de Colombia, Manizales, Colombia
Abstract

PO4016 Efficient carbonization of PAN fibres with scalable linear microwave plasma source
Julius Roch1, Gerrit Mäder1
1Fraunhofer IWS Dresden, Dresden, de
Abstract

Poster - Biomedical Application

PO4017 Antimicrobial coatings and coatings with high water repellency on beech veneer made by APCVD
Sven Gerullis1, Pavel Kosmachev2, Florian Kettner3, Katharina Plaschkies3, Andreas Pfuch1, Bernd Gruenler1
1INNOVENT e.V. Technologieentwicklung, Jena, de, 2Tomsk State University of Architecture and Building, Tomsk, Russian Federation, 3IHD Institut für Holztechnologie, Dresden, Germany
Abstract

PO4018 Preparation and bio-functionalization of Au:TiO2 nanoplasmonic thin films for LSPR-biosensors
Joel Borges1, Diogo Costa1, Marco S. Rodrigues2, Paula Sampaio1, Filipe Vaz1
1Universidade do Minho, Braga, pt, 2Instituto Pedro Nunes, Coimbra, Portugal
Abstract

PO4019 Hydrophilicity variation of plasma oxidized dental implant and its control strategy
Zeng Lin1
1Northeastern University, Shenyang, cn
Abstract

PO4020 CAP can induce oxygenation of amino acids
Anna Scheglov1, Leander Loewenthal2, Andreas Helmke3, Wolfgang Vioel3
1University of appl. Sci. and Arts HAWK, Goettingen, de, 2University of Applied Sciences and Arts HAWK, Faculty of Natural Sciences and Technology, Goettingen, Germany, 3Fraunhofer Institute for Surface Engineering and Thin Films IST, Application Center for Plasma and Photonics APP, Goettingen, Germany
Abstract

PO4021 TiNb coating for development of antibacterial nanostructured surface composed from oxide nanotubes and nanosilver particles
Ladislav Cvrcek1, Frantisek Denk1, Stanislav Krum1, Jaroslav Malek1, Vladimir Stary1, Zdenek Tolde1
1Czech Technical University in Prague, Praha 2, cz
Abstract

PO4022 Protective Titanium Adlayer Acting as Silver Diffusion Barrier
Martin Amberg1, Martin Amberg1, Patrick Rupper1, Markus Weder1, Michele Schmid1, Dirk Hegemann1
1Empa, St.Gallen, ch
Abstract

PO4023 Ag nanoparticle-based nanocomposites with non-fouling and antibacterial properties
Daniil Nikitin1, Iurii Melnichuk1, Tereza Steinhartová1, Mykhajlo Vaidulych1, Andrey Shukurov1, Danka Slavinska1, Hynek Biederman1
1Charles University in Prague, Prague, cz
Abstract

PO4024 Oxygen plasma etching of hard Ag/a-C:H nanocomposite coatings
Mykhailo Vaidulych1, Jan Hanuš1, Ondřej Kylián1, Andrei Choukourov1, Iurii Melnichuk1, Tereza Steinhartová1, Hynek Biederman1
1Charles University, Prague 8, cz
Abstract

PO4025 Plasma grown Graphene Nano Platelet mono films as enhanced surface for medical implant material and its electrode behavior
Jan Heeg1, Petra Fedtke1, Antje Schütz1, Jens Strehlau1
1Hochschule Wismar, Wismar, de
Abstract

PO4026 Selected area ammine and carboxylic functionalization on titanium for dental implants
Alessandro Patelli1, Federico Mussano2, Tullio Genova2, Emanuele Verga Falzacappa3, Paolo Scopece4, Luca Munaron2, Paola Rivolo5, Pietro Mandracci5, Alvise Benedetti3, Stefano Carossa2
1Universita' di Padova, Padova, it, 2Universita' di Torino, Turin, Italy, 3Universita' di Venezia, Venice, Italy, 4Nadir srl, Venice, Italy, 5Politecnico di Torino, Turin, Italy
Abstract

PO4027 Development of new β-Ti coatings by sputtering process with low Young’s modulus and favorable plasticity for medical applications
EMILIO FRUTOS TORRES1, Jose Antonio Jiménez2, Tomas Polcar3
1Czech Technical University in Prague, PRAGUE, cz, 2National Center for Metallurgical Research/Spanish National Research Council, Madrid, Spain, 3national Centre for Advanced Tribology at Southampton (nCATS)/University of Southampton, Southampton, United Kingdom
Abstract

PO4028 Study of the electromechanical behaviour of Ti-Ag coated polymers for biomedical applications
Claudia Lopes1, Beatriz Freitas1, Marco Rodrigues1, Joel Borges1, Aurelien Etiemble2, Philippe Steyer2, Filipe Vaz1
1University of Minho, Guimarães, pt, 2MATEIS Laboratory-INSA de Lyon, Lyon, France
Abstract

PO4029 Mechanical behavior of sputtered titanium coatings on structured Polyetheretherketon surface
Herbert Scheerer1, Markus König1, Anne Martin1, Georg Andersohn1, Markus Laub2, Steffen Luers2, Matthias Oechsner1
1Institut für Werkstoffkunde TU Darmstadt, Darmstadt, de, 2Morphoplant GmbH, Dortmund, Germany
Abstract

PO4030 Plasma assisted deposition of graphen-like coatings for orthopedic applications
Victor N. Vasilets1, Yury M. Shulga2, Sergey A. Baskakov2
1IEPCP RAS, Chernogolovka, ru, 2IPCP RAS, Chernogolovka, Russian Federation
Abstract

PO4031 Cell-Proliferation in Nanocrystalline Carbon thin films
Manish Kumar1, Jin Xiang Piao1, Amjed Javid1, Jung Heon Lee1, Satomi Tajima2, Masaru Hori2, Jeon Geon Han1
1Sungkyunkwan University, Suwon, kr, 2Nagoya University, Nagoya, Japan
Abstract

PO4032 Influence of pulsed bias voltage on the tribological and morphological properties of DLC coatings deposited by an anodic arc method
Ingo Erdmann1, Friederike Deuerler1, Volker Buck2
1University of Wuppertal, Wuppertal, de, 2University of Duisburg-Essen, Duisburg, Germany
Abstract

PO4033 Barrier coatings on polyvinyl chloride (PVC) to prevent the migration of DEHP in medical products
Kristina Lachmann1, Thomas Neubert1, Frauke Junghans2, Andrea Weitz3, Manfred Nimtz3, Andrea Stoll2, Michael Thomas1, Henk Garritsen3, Claus-Peter Klages1
1Fraunhofer IST, Braunschweig, de, 2FILK, Freiberg, Germany, 3HZI, Braunschweig, Germany
Abstract

PO4034 Effect of Ag concentration on Structural, mechanical, Antibacterial properties of Ag-TiN coatings
Dejun Li1, L Dong2, J G Yu2, C Li2, Y P Pan2, R X Wan3, H Q Gu3
1Tianjin Normal University, Tianjin, cn, 2College of Physics and Materials Science, Tianjin Normal University, Tianjin, China, 3Tianjin Institute of Urological Surgery, Tianjin Medical University, Tianjin, China
Abstract

PO4035 Influence of oxygen content on the electrochemical behavior of Ta1-xOx coatings
Cristiana Filipa Almeida Alves1, Sebastian Calderon Velasco1, Duarte Dias1, Albano Cavaleiro2, Sandra Carvalho1
1University of Minho, Physics Department, Guimarães, pt, 2University of Coimbra, Mechanical Engineering Department, Coimbra, Portugal
Abstract

Poster - Plasma-Enhanced Chemical Vapour Deposition - PECVD

PO4036 Upscaling of a high rate microwave-PECVD process to large areas
Stefan Merli1, Andreas Schulz1, Matthias Walker1, Ulrich Stroth2, Thomas Hirth1
1IGVP, Stuttgart, de, 2Max-Planck-Institut für Plasmaphysik, Garching, Germany
Abstract

PO4037 PECVD preparation of TiO2 thin films in surfatron generated plasma
Jiri Olejnicek1, Zdenek Hubicka1, Jiri Smid1, Petra Ksirova1, Michaela Brunclikova1, Stepan Kment2, Martin Cada1
1Institute of Physics, ASCR, Prague, cz, 2Palacký University, RCPTM, Joint Laboratory of Optics, Olomouc, Czech Republic
Abstract

PO4038 Plasma monitoring of a hollow cathode activated PECVD process
Michiel Top1, Steffen Schönfeld1, John Fahlteich1
1Fraunhofer FEP, Dresden, de
Abstract

PO4039 Chemical bonding and mechanical properties of O-doped DLC films synthesized by photoemission-assisted plasma-enhanced CVD
Rintaro Sugimoto1, Hiro Abe1, Shuichi Ogawa1, Takanori Takeno2, Koshi Adachi2, Yuji Takakuwa1
1IMRAM, Tohoku University, Sendai, jp, 2School of Engineering, Tohoku University, Sendai, Japan
Abstract

PO4040 Influence of deposition time on microwave TMS/NH3 PECVD of a-SiCxNy:H thin films: from gaz phase to material chemistry and properties analysis.
Béatrice PLUJAT1, Antoine GOULLET2, Hervé GLENAT3, Lawrence FREZET4, Jonathan HAMON2, Emmanuel HERNANDEZ3, Sébastien QUOIZOLA3, Laurent THOMAS3
1Laboratoire CNRS-PROMES, PERPIGNAN, fr, 2Institut des Matériaux Jean Rouxel de Nantes, NANTES, France, 3Laboratoire PROMES-CNRS/UPVD, PERPIGNAN, France, 4Institut de Chimie de Clermont-Ferrand, AUBIERE, France
Abstract

PO4041 Influence of plasma parameters on the characteristics of ZrO2 and ZrSiO4 thin films obtained by PECVD in low pressure plasma
Ines Martinko1, Jérôme Cornil2, Salah Sahli3, Rony Snyders4, Olivier Antonin5, Thomas Nelis5, Patrice Raynaud1
1LAPLACE, Toulouse, fr, 2Laboratory for Chemistry of Novel Materials - UMONS, Mons, Belgium, 3LMI, Université Constantine 1, Constantine, Algeria, 4UMONS Chips - Materia Nova, Mons, Belgium, 5Berne University of Applied Science, Bienne, Switzerland
Abstract

PO4042 Three-dimensional graphene patterns on nanoporous alumina: growth and morphology characterization
Igor Levchenko1, Jinghua Fang2, Kostya Ostrikov1, Michael Keidar3
1Queensland University of Technology, Brisbane, au, 2University of Technology Sydney, Sydney, Australia, 3George Washington University, Washington, United States
Abstract

PO4043 Comparison of HMDS and HMDSO precursors for PECVD hydrophobic Si-C-H coatings
Andreas Dubbe1
1independent scientist, Eggenstein-Leopoldshafen, de
Abstract

PO4044 Carbon microfiber surface modification using PECVD
Jörn Achtelik1, Jörg K.N. Lindner1
1Universität Paderborn, Paderborn, de
Abstract

PO4045 Ethanol vapor addition in a nitrogen dielectric barrier discharge to incorporate nitrogen and oxygen functional groups at low density polyethylene surfaces
Annick Van Deynse1, Nathalie De Geyter1, Christophe Leys1, Rino Morent1
1University Gent, Gent, be
Abstract

PO4046 Composition Tunability and pH-Responsive Wettability of Plasma Copolymer Films Prepared from Acrylic Acid and Octafluorocyclobutane
Y.P. Li1, M. Iqbal1, M.K. Lei1
1Dalian University of Technology, Dalian, cn
Abstract

PO4047 Stabilisation of medium pressure plasma polymerised Cyclopropylamine with Hexamethyl Diisocyanate
Ke Vin Chan1, Nathalie De Geyter1, Rino Morent1
1Ghent University, Gent, be
Abstract

PO4048 ADVANCES IN SURFACE MODIFICATION OF MICROPARTICLES BY PLASMA POLYMERIZATION
Maria Monteserin1, L. Francisco Martin1, Silvia Larumbe1, Gonzalo G. Fuentes1
1Advanced Surface Engineering Center, AIN, Cordovilla, es
Abstract

PO4049 Coating defects in barrier films deposited on polymers
Marcel Rudolph1, Felix Mitschker2, Simon Steves2, Maximilian Gebhard3, Lars Schücke2, Dennis Kirchheim4, Markus Brochhagen5, Rainer Dahlmann4, Anjana Devi6, Peter Awakowicz2
1Ruhr-Universität Bochum, Bochum, de, 2Electrical Engineering and Plasma Technology, Ruhr-University Bochum, Bochum, Germany, 3Inorganic Materials Chemistry, Ruhr-University Bochum,, Bochum, Germany, 4Institute of Plastics Processing (IKV), RWTH Aachen University, Aachen, Germany, 5Institute for Experimental Physics II, Bochum, Germany, 6Inorganic Materials Chemistry, Ruhr-University Bochum, Bochum, Bochum, Germany
Abstract

PO4050 Wetting behaviour of perfluoroalkyl surfaces deposited by pulsed plasma polymerization
Eleanor Milnes-Smith1, Corinne Stone2, Susan Perkin1
1Physical & Theoretical Chemistry Lab., Oxford, gb, 2Defence Science and Technology Laboratory, Salisbury, United Kingdom
Abstract

PO4051 Energetics of Reactions in a Dielectric Barrier Discharge with Argon Carrier Gas: the Case of Esters
Bernard Nisol1, Sean Watson2, Sophie Lerouge3, Michael R. Wertheimer2
1Polytechnique Montreal, Montréal, ca, 2Polytechnique Montréal, Montreal, Canada, 3École de Technologie Supérieure, Montreal, Canada
Abstract

PO4052 Novel atmospheric pressure plasma technology for nanostructured surfaces
Gerrit Mäder1, Liliana Kotte1, Julius Roch1, Jana Haag2, Tobias Mertens2
1Fraunhofer Institute IWS, Dresden, de, 2Airbus Group Innovations, Munich, Germany
Abstract

PO4053 Photocatalytic Anatase TiO2 Thin Films Deposited on Temperature-Sensitive Substrates by Atmospheric-Pressure Low-Temperature Plasma – Application to water purification
Kamal Baba1, Nocolas D. Boscher1, Simon Bulou1, Patrick Choquet1
1Luxembourg Institute of Science and Tech, Belvaux, lu
Abstract

PO4054 Deposition of a-C:H films by atmospheric pressure plasma jet in acetylene
Thorben Kewitz1, Joachim Oesert2, Stanislav N. Gorb2, Holger Kersten1
1Kiel University, Kiel, de, 2Zoological Institute, Kiel University, Kiel, Germany
Abstract

PO4055 Production of superhydrophobic surfaces on polyolefins by combining an imprinting process with atmospheric-pressure plasma surface coating
Rowena Duckstein1, Kristina Lachmann1, Michael Thomas1, Ernst-Rudolf Weidlich2, Claus-Peter Klages1
1Fraunhofer IST, Braunschweig, de, 2GRT GmbH & Co.KG, Hamm, Germany
Abstract

PO4056 Plasma polymers deposition by a novel atmospheric plasma jet
Alessandro Patelli1, Emanuele Verga Falzacappa2, Alvise Benedetti2, Paolo Scopece3
1Universita' di Padova, Padova, it, 2Università di Venezia, Venice, Italy, 3Nadir srl, Venice, Italy
Abstract

PO4057 Plasma-enhanced ALD: a route to hydrophilic, glueable PTFE
Geert Rampelberg1, Amit Roy1, Jolien Dendooven1, Davy Deduytsche1, Kilian Devloo-Casier1, Kim Ragaert1, Ludwig Cardon1, Christophe Detavernier1
1Ghent University, Gent, be
Abstract

PO4058 Atmospheric pressure plasma enhanced CVD of high quality silica-like bilayer encapsulation barrier films
Fiona Elam1, Sergey Starostin1, Anna Meshkova2, Bernadette van der Velden-Schuermans1, Jan Bouwstra1, Richard van de Sanden2, Hindrik de Vries2
1FUJIFILM, Tilburg, nl, 2FOM Institute DIFFER, Eindhoven, Netherlands
Abstract

PO4059 Wedge-shaped Thin Films Fabricated by plasma enhanced chemical vapor deposition
Agustin González-Elipe1, Carmen Lopez-Santos2, Rafael Alvarez3, Alberto Palmero4, Rafael Casquel del Campo5, Miguel Holgado6, Ana Borras4
1Instituto Ciencia Materiales de Sevilla, Sevilla, es, 2Instituto de Ciencia de Materiales Sevilla, Sevilla, Spain, 3Instituto Ciencias de Materiales de Sevilla, Sevilla, Spain, 4Instituto Ciencia de Materiales de Sevilla, Sevilla, Spain, 5Center for Biomedical Technology, Madrid, Spain, 6Center for Biomedical Technology, UPM, Madrid, Spain
Abstract

Poster - Plasma Diffusion Treatment

PO4060 INFLUENCE OF THE NITRIDED LAYER AS PRE-TREATMENT ON ADHESION, WEAR AND CORROSION RESISTANCE OF DLC COATINGS DEPOSITED ON STAINLESS STEELS
Sonia Brühl1, Silvia Simison2, Eugenia Dalibon1, Daniel Heim3, Vladimir Trava-Airoldi4
1National University of Technology UTN, Concepción del Uruguay, ar, 2Corrosion Division, INTEMA, Faculty of Engineering, University of Mar del Plata, Mar del Plata, Argentina, 3Upper Austria University of Applied Sciences, Wels, Austria, 4Instituto Nacional de Pesquisas Espaciáis (INPE), São José dos Campos (SP), Brazil
Abstract

PO4061 plasma enhanced diffusion of Al-Si alloys on the surface of Ti-45Al-2Nb-2Mn-1B titanium aluminide
Ahmad Rastkar1
1Shahid Beheshti University, Tehran, ir
Abstract

PO4062 Electron Beam Doping: A novel approach for creating selective emitters in crystalline silicon
Vincent Fischer1, Benjamin Graffel1, Björn Meyer1, Falk Winckler1
1Fraunhofer FEP, Dresden, de
Abstract

PO4063 Combined low-pressure plasma surface modification of thin austenitic stainless steel sheets for bipolar plates
Krasimir Nikolov1, Katharina Bunk1, Antje Jung1, Peter Kaestner1, Claus-Peter Klages1
1TU Braunschweig, Braunschweig, de
Abstract

PO4064 Thermal Expansion Coefficient of Expanded Austenite in Stainless Steel and CoCr Alloy
Darina Manova1, Thierry Czerwiec2, Stephan Mändl1
1Inst. f. Oberflächenmodifizierung, Leipzig, de, 2Institut Jean Lamour, Nancy, France
Abstract

PO4065 Improvement of Wear and Corrosion Resistance of Steel by Anode Plasma Electrolytic Nitriding
Sergei Kusmanov1, Aleksei Smirnov1, Ilya Dyakov1, Alexander Naumov1, Pavel Belkin1
1Nekrasov Kostroma State University, Kostroma, ru
Abstract

PO4066 Comparison of properties different titanium alloys after plasma electrolyte carburization
Ilya Dyakov1, Pavel Belkin1, Vladimir Parfenyuk1, Sergei Kusmanov1, Mariya Komissarova1, Alexei Smirnov1
1Nekrasov Kostroma State University, Kostroma, ru
Abstract

PO4067 Crack initiation of the S-phase on the pre-deformed austenitic stainless steel
Sang-gweon Kim1, Seong-chul Kim2, Masahiro Okumiya3, Jae-Hoon Lee4
1Korea Institute of Industrial Technology, Incheon, kr, 2Mirae thermotec, Daegu, South Korea, 3TOYOTA TECHNOLOGICAL INSTITUTE, Nagoya, Japan, 4KITECH, Incheon, South Korea
Abstract

PO4068 The effect of plasma nitriding on the interfacial contact resistance and the corrosion resistance of austenitic stainless steel
Katharina Bunk1, Peter Kaestner1, Günter Bräuer1
1Institute for Surface Technology, Braunschweig, de
Abstract

PO4069 Effect of distance between a screen and sample on deposited layer during active screen plasma nitriding
Takahiro Fukube1, Akio Nishimoto2
1Kansai University,, Suita, Osaka, jp, 2Kansai University, Suita, Japan
Abstract

PO4070 Effect of the superficial layer containing carbides on the properties of low-temperature carburized austenitic stainless steel: characterization of the superficial layer
GREGORY MARCOS1, Aurore Andrieux2, Eugenia L. Dalibon3, Sonia Brühl3, Silvia Simison4, Jaafar Ghanbaja2, Pascal Boulet2, Abdelkrim Redjaimia2, Thierry Czerwiec2
1Institut Jean Lamour, NANCY, fr, 2Institut Jean Lamour, Université de Lorraine, NANCY, France, 3Universidad Tecnológica Nacional, Fac. Reg. Concepción del Uruguay, Concepción del Uruguay, Argentina, 4Universidad Nacional de Mar del Plata, División Electroquímica y Corrosión, Mar del Plata, Argentina
Abstract

PO4071 Low-temperature plasma nitriding of ferritic Fe-Al alloys
Rodrigo Perito Cardoso1, Fernando Irto Zanetti1, Wendy da Luz Alexandre1, Silvio Francisco Brunatto1
1Federal University of Paraná, Curitiba, br
Abstract

PO4072 Active Screen Plasma Nitriding of austenitic stainless steel inner diameters
Marta Brizuela1, Jose Angel Sanchez-Garcia2, Marian Musgo3, Aitor Larrañaga4, Pablo Corengia2, Iñigo Braceras5
1Tecnalia, Donostia-San Sebastian, es, 2Tecnalia Research & Innovation, Donostia-San Sebastian, Spain, 3Engineering School of Gipuzkoa, Donostia-San Sebastian, Sri Lanka, 4Tratamientos Térmicos TTT, S.A., Bergara, Spain, 5Tecnalia Research A Innovation, Donostia-San Sebastian, Spain
Abstract

PO4073 The adsorption-sputtering-dissociation-deposition model in plasma nitriding
Y.P. Li1, Z.Y. Wang1, G.Y. Li1, H.Y. Liu1, H.L. Che1, M.K. Lei1
1Dalian University of Technology, Dalian, cn
Abstract

PO4074 The role of bias activation in the large industrial scale ASPN-system
Igor Burlacov1, Heinz-Joachim Spies1, Horst Biermann1, Stephan Hamann2, Jürgen Röpcke2
1IWT, TU Bergakademie Freiberg, Freiberg, de, 2INP Greifswald, Greifswald, Germany
Abstract

PO4075 The Effect of Nitrogen-containing Chromium Diamond-like Carbon Coating by AEGD hybrid-CVD coating Process
Sang-gweon Kim1, Yong-Ki Cho2, Masahiro Okumiya3, Jae-hoon Lee2
1Korea Institute of Industrial Technology, Incheon, kr, 2KITECH, Incheon, South Korea, 3TOYOTA TECHNOLOGICAL INSTITUTE, Nagoya, Japan
Abstract

PO4076 Simultaneous formation of carbide and boride layers on titanium by spark plasma sintering method
CHIHIRO NISHI1, AKIO NISHIMOTO1
1Kansai University, Suita, jp
Abstract

PO4077 Nitriding and diamond-like carbon coating of aluminum alloy using pressure-gradient-type plasma source
Akio NISHIMOTO1, Eiji FURUYA2, Kenji KOUSAKA2
1Kansai University, Osaka, jp, 2Chugai Ro Co., Ltd., Osaka, Japan
Abstract

PO4078 Enhancement of tribological properties of aluminum with duplex treatment of oxidation and DLC film fabricated by macroarc oxidation and cage-like hollow cathode discharge
Qinwen Tian1, Mingzhong Wu2, Muqin Li2
1Shool of MSE, Jiamusi University, Jiamusi, cn, 2School of Materials Science & Engineering, Jiamusi University, Jiamusi, China
Abstract

Poster - Advanced Plasma and Ion Source Technologies

PO4079 Hot corrosion resistant improvement of Nimonic alloy after Ni-Al-N ions implantation using a small plasma focus device
Morteza Habibi1
1Amirkabir University of Technology, Tehran, ir
Abstract

PO4080 Process characterization of the Laser- Arc- technology for thick ta-C- coatings in an industrial batch system
Martin Holzherr1, Marc-Tobias Wenzel2, Michael Falz1, Wolfgang Fukarek1, Gregor Englberger3, Volker Weihnacht3, Andreas Leson4
1VTD Vakuumtechnik Dresden GmbH, Dresden, de, 2VTD Vakuumtechnik Dresden, Dresden, Germany, 3Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany, 4Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden, Germany
Abstract

PO4081    Titanium nitride deposition by reactive high-power pulsed sputtering Penning discharge
Kingo Azuma1, Yuma Kusuhashi1, Yoshihiro Oka1, Shinichi Honda1
1University of Hyogo, Himeji, jp
Abstract

PO4082 Improvement of electrical conductivity of bipolar plates for fuel cells by surface plasma modification
Volker Buck1, Nicolas Wöhrl2, Tatiana Fedosenko-Becker3, Mario Gillmann4
1Physics/Uni. Duisburg-Essen, Duisburg, de, 2University of Duisburg-Essen and CENIDE, Duisburg, Germany, 3University of Wuppertal, Wuppertal, Germany, 4ZBT GmbH - The fuel cell research center, Duisburg, Germany
Abstract

PO4083 Digital surface modifications for microfluidics and biosensor applications
Alquin Stevens1
1InnoPhysics B.V., Eindhoven, nl
Abstract

PO4084 Automated precision microplasma deposition of powder coating multifunctional systems
Darya Alontseva1, Elaheh Ghassemieh2
1East-KazakhstanStateTechnical University, Ust-Kamenogorsk, kz, 2Queen’s University of Belfast, Belfast, United Kingdom
Abstract

PO4085 Changing Secondary Electron Emission During PIII Processing
Fabian Haase1, Darina Manova2, Stephan Mändl2, Holger Kersten1
1IEAP CAU Kiel, Kiel, de, 2Inst. f. Oberflächenmodifizierung, Leipzig, Germany
Abstract

PO4086 Bactericidal efficiency of titanium plates treated with silver by low energy ion implantation
Cesar Aguzzoli1, T.P. Soares1, A. Lambrey2, C.A. Figueroa1, M. Giovanela1
1University of Caxias do Sul, Caxias do Sul, br, 2École Européene d'Ingénieurs en Génie des Matériaux, Université de Lorraine, Nancy, France
Abstract

PO4087 Microstructure and properties of nanostructured (TiZrHfVNbTa)N coatings before and after implantation of high doses of Au- and N+ ions
Oleksandr Bondar1, Alexander Pogrebnjak1, Ivan Yakuschenko1, Svitlana Borba1, Sergej Plotnikov2, Vyacheslav Beresnev3, Yoshihiko Takeda4, Keiji Oyoshi4, Pawel Zukowski5
1Sumy State University, Sumy, ua, 2D. Serikbaev East-Kazakhstan State Technical University, Ust-Kamenogorsk, Kazakhstan, 3Karazin National University, Kharkiv, Ukraine, 4National Institute for Material Science, Tsukuba, Japan, 5Politechnika Lubelska, Lublin, Poland
Abstract

PO4088 Experimental study of large diameter Penning discharge plasma anode for HCPEB source
Shengzhi HAO1, Wenghai Peng1, Huihui Wang1
1Dalian University of Technology, Dalian, cn
Abstract

PO4089 Fabrication of single- and multi-directional slanted profiles of Si using plasma etching
Jun-Hyun Kim1, Chang-Koo Kim1
1Ajou university, Suwon, kr
Abstract

PO4090 Advanced cyclic etching to reduce the diameter of SiO2 contact holes
Chang Jin Park1, Chang-Koo Kim1
1Ajou university, Suwon, kr
Abstract

PO4091 PACVD SiOx coatings deposited by µ-wave technology
Ivan Kolev1, David McCausland2, Dave Doerwald1, Roel Tietema1, Jeroen Landsbergen1
1IHI Hauzer Techno Coating B.V., Venlo, nl, 2University of Leeds, School of Mechanical Engineering, Leeds, United Kingdom
Abstract

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