Program



Thursday, September 13, 2010Poster Session, 15:15 - 16:25

Poster - Film structure and composition

PO4001 Effects of nitrogen partial pressures during r.f. magnetron sputtering on the crystal structure and growth rate of c-BN films
Kwangmin Lee1, Hoon Ahn2, Sehoon Jeong3
1Dept. Materials Science and Engineering, Gwangju, South Korea, 2Chodang University, Muangun, South Korea, 3Tokyo Institute of Technology, Yokohama, Japan
Abstract | Extended Abstract

PO4003 MECHANICAL AND OPTICAL PROPERTIES OF TiOx THIN FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING
Roberto Hübler1, Adriano Feil1, Marcelo Pereira2, Eduardo Blando2, Jesum Fernandes2, Flavio Horowitz2
1GEPSI-LMN Physics Faculty of PUCRS, Porto Alegre, Brazil, 2Physics Institute of UFRGS, Porto Alegre, Brazil
Abstract | Extended Abstract

PO4004 Deposition of Fe2O3 thin films by pulsed deposition sputtering systems
Zdenek Hubicka1, Martin Čada1, Štěpán Kment1, Vítěslav Straňák1, Petra Kšírová1, Lubomir Jastrabík1
1Institute of Physics ASCR, v.v.i., Prague, Czech Republic
Abstract | Extended Abstract

PO4005 Understanding the growth of doped ceria thin films
Sigelinde Van Steenberge1, Wouter Leroy1, Diederik Depla1
1Ghent University, Gent, Belgium
Abstract | Extended Abstract

PO4006 Thermal transformations in magnetron sputtered Al-Cu-O films
Sarka Proksova1, Petr Zeman1, Jakub Blazek1, Radomir Cerstvy1, Jindrich Musil1
1University of West Bohemia, Plzen, Czech Republic
Abstract | Extended Abstract

PO4007 Face-Centered Cubic and corundum (Al1-xCrx)2O3 Thin Films: Deposition, Characterization, and Heat Treatment Studies
Ali Khatibi1, Axel Genvad2, Per Eklund1, Lars Hultman1
1Linköpings universitet, Linköping, Sweden, 2Sandvik Tooling AB, Stockholm, Sweden
Abstract | Extended Abstract

PO4008 Phase and compositional characterization of tantalum and tantalum nitride thin films
Daniel Bernoulli1, Diana Courty2, Ulrich Müller3, Ralph Spolenak4
1ETH Zürich-Laboratory for Nanometallurgy, Zürich, Switzerland, 2ETH Zürich - Laboratory for Nanometallurgy, Zürich, Switzerland, 3EMPA, Dübendorf, Switzerland, 4ETH Zürich - Laboratory for Nanometallurgy, Zürich, Switzerland
Abstract | Extended Abstract

PO4009 Structure of zirconia-based layer formed after oxidation of (Zr,Y)N films
David PILLOUD1, Jean-François PIERSON2
1Université de Lorraine, NANCY, France, 2Université de Lorraine, Institut Jean Lamour, CP2S, NANCY, France
Abstract | Extended Abstract

PO4010 Composition-structure-properties relationships of metal (Al, Ti, Ta, Zr) oxynitride thin films studied by ellipsometry and FTIR
Jiri Houska1, Zbynek Soukup1, Jiri Rezek1, Richard Jilek2, Jindrich Musil2, Jaroslav Vlcek2
1NTIS, University of West Bohemia, Plzen, Czech Republic, 2Department of Physics, University of West Bohemia, Plzen, Czech Republic
Abstract | Extended Abstract

PO4011 Effect of the rapid thermal annealing on the structure and optical properties of TaOxNy thin films deposited by reactive magnetron sputtering
Fadi Zoubian1, Eric Tomasella1, Angelique Bousquet1, Joel Cellier1, Thierry Sauvage2
1Institut de Chimie de Clermont Ferrand, Aubiere, France, 2CNRS/CEMHTI Site Cyclotron, Orlean, France
Abstract | Extended Abstract

PO4012 Effect of oxygen incorporation on structure, phase stability and mechanical properties of VAlON coatings
Kalpak Prakash Shaha1, Soojin Baek2, Denis Music2, Jochen Schneider2
1Materials chemistry RWTH Aachen, Aachen, Germany, 2Materials Chemistry RWTH Aachen, Aachen, Germany
Abstract | Extended Abstract

PO4013 Optical and electrical properties of DLC thin films deposited by PECVD plasma reactor
Mohammed Ouchabane1, Houria Salah2, Nouar Amor Tabet3, Mohamed Kechouane4
1Centre de Dévelop. des Techn. Avan, Baba Hassen, Alger, Algeria, 2CRNA, Alger, Algeria, 3KFUPM, Dhahran, Saudi Arabia, 4USTHB, Alger, Algeria
Abstract | Extended Abstract

PO4014 Structural properties of Fe-C thin films grown by magnetron sputtering
Amélie Fillon1, Xavier Sauvage2, Ben Lawrence3, Chad Sinclair3, Arnaud Weck4, Michel Perez5, Colin Scott6
1GPM, University of Rouen, Saint Etienne du Rouvray Cedex, France, 2Groupe de Physique des Matériaux, University of Rouen, Saint Etienne du Rouvray Cedex, France, 3Dpt of Materials Engineering, University of British Columbia, Vancouver BC, Canada, 4Mechanical Engineering Department, University of Ottawa, Ottawa, Canada, 5MATEIS , University of Lyon - INSA, Villeurbanne Cedex, France, 6ArcelorMittal Research Maizières, Maizières-les-Metz Cedex, France
Abstract | Extended Abstract

PO4015 Structure and properties of magnetron sputtered Cr-C thin films
Kristian Nygren1, Matilda Andersson1, Jonas Högström1, Wendy Fredriksson1, Leif Nyholm1, Ulf Jansson1
1Uppsala University, Uppsala, Sweden
Abstract | Extended Abstract

PO4016 Growth regimes of microstructured gold thin films deposited by magnetron sputtering at oblique angles and at low temperatures
Rafael Alvarez1, J. M. García-Martín2, M. Macías-Montero1, L. Gonzalez-Garcia1, J.C. González1, P. Romero-Gómez1, J. Cotrino3, A.R. González-Elipe1, A. Palmero1
1ICMSE (CSIC-US), Seville, Spain, 2IMM (CNM-CSIC), Tres Cantos, Madrid, Spain, 3Dep. Física Atómica, Molecular y Nuclear (US), Seville, Spain
Abstract | Extended Abstract

PO4017 The Structure-Phase Compositions of Ni - Cr and Co–Cr Based Powder Alloys Coatings Deposited by Plasma-Detonation on Steel Substrates
Darya Alontseva1, Alexander Pogrebnjak2, Galina Klassen3
1East Kazakhstan State Technical Universi, Ust-Kamenogorsk, Kazakhstan, 2Sumy State University, Sumy, Ukraine, 3Technische Universitaet Dortmund, Dortmund, Germany
Abstract | Extended Abstract

PO4018 Study of the oxidization process of Ti thin films using modulated infrared radiometry
Francisco Macedo1, Filipe Vaz1, Mihai Apreutesei2, Bruno Bein3
1Universidade do Minho, Braga, Portugal, 2Lab MATEIS, INSA Lyon, Villeurbanne, France, 3Solid State Spectrocopy, Physics and Astronomie, Ruhr-University, Bochum, Germany
Abstract | Extended Abstract

PO4019 Characterization of new sputter-deposited Ti-V(-Zr) Gum Metal like Thin Films
Salim lamri1, Philippe Steyer2, Alain Billard3, Frederic sanchette4
1ICD – LASMIS, UMR CNRS 6279, UTT, Nogent, France, 2MATEIS, INSA LYON, Bât. B. Pascal,, Villeurbanne, France, 3LERMPS-UTBM, Belfort, France, 4ICD-LASMIS , UMR CNRS 6279, UTT, Nogent, France
Abstract | Extended Abstract

PO4020 Synthesis of intermetallic compounds in the surface layer of eutectic silumin by dense plasma impact
Nikolai Cherenda1, Natalya Bibik1, Vladimir Uglov1, Valentin Astashynski2, Anton Kuzmitski2
1Belarusian State University, Minsk, Belarus, 2Institute of Physics, Minsk, Belarus
Abstract | Extended Abstract

PO4021 Elemental composition of silicide surface layers formed by compression plasma flows
Vladimir Uglov1, Nikolai Kvasov2, Yury Petukhou2, Andrey Punko2, Valiantsin Astashynski3, Anton Kuzmitski3
1Belarusian State University, Minsk, Belarus, 2Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus, 3Institute of Physics, National Academy of Sciences of Belarus, Minsk, Belarus
Abstract | Extended Abstract

PO4022 Characterisation of oxidation resistance and crystallisation of sputtered films using in situ FTIR method
David PILLOUD1, Fabien CAPON1, David HORWAT1, Jean-François PIERSON1
1Université de Lorraine, NANCY, France
Abstract | Extended Abstract

PO4023 Evaluation of the PVD and CVD coatings’ structure using the modified method of spherical metallographic microsection (Baltest-M).
Marek Betiuk1
1Instytut of Precision Machanics, Warszawa, Poland
Abstract | Extended Abstract

PO4024 Ultra fast depth profile characterisation of plasma coatings on polymer surfaces: GD-OES and Plasma Profiling-TOFMS
Christophe Deraed1, Rainer Nehm1, Agnes Tempez2, Celia Olivero2, Patrick Chapon2
1Horiba Jobin Yvon GmbH, Unterhaching, Germany, 2Horiba Jobin Yvon SAS, Longjumeau, France
Abstract | Extended Abstract

Poster - Plasma diagnostics and process control

PO4025 Accurate rf Discharge Characterization and Influence of Reactor System Design on the Microscopic Plasma Parameters
Dimitrios Mataras1, Ioannis Tsigaras1, Spiros Sfikas1, Nikolaos Spiliopoulos2, Eleftherios Amanatides1
1Plasma Tech. Lab./University of Patras, Patras, Greece, 2Department of Physics / University of Patras, Patras, Greece
Abstract | Extended Abstract

PO4026 Characterization of a large scale multiple frequency capacitively coupled plasmas for PVD
Stefan Bienholz1, Nikita Bibinov1, Peter Awakowicz1
1Ruhr-University Bochum / AEPT, Bochum, Germany
Abstract | Extended Abstract

PO4027 Monitoring and control of RF driven PVD, PECVD and etching plasmas using Fourier components of discharge voltages
Petr Vasina1, Pavel Dvorak1, Radek Zemlicka1, Peter Klein1, Vilma Bursikova1
1Masaryk University, Brno, Czech Republic
Abstract | Extended Abstract

PO4028 Measurements of SiH4/H2 VHF Plasma Parameters with Heated Langmuir Probe
Yoshinobu Kawai1, Tsukasa Yamane2, Sachiko Nakao2, Yoshiaki Takeuchi2, Hiroshi Muta1, Kiichiro Uchino1
1Kyushu University, Kasuga, Japan, 2Mitsubishi Heavy Industries Ltd., Isahaya, Japan
Abstract | Extended Abstract

PO4029 Time resolved plasma production by surface waves in Argon – modelling and high speed measurements at the plasmaline ®
Matthias Graf1, Eberhard Räuchle1, Klaus-Dieter Nauenburg1, Rudolf Emmerich1
1Fraunhofer Institut ChemischeTechnologie, Pfinztal, Germany
Abstract | Extended Abstract

PO4030 Spatial distribution of negative ion density in a reactive dc magnetron determined using laser photodetachment
Steven Scribbins1, J.W. Bradley1
1University of Liverpool, Liverpool, United Kingdom
Abstract | Extended Abstract

PO4031 Optical emission spectroscopy study of a DC magnetron discharge in Ar/(O2-N2)
Joel Borges1, Nicolas Martin2, Filipe Vaz1, Luis Marques1
1Centre/Department of Physics, U. Minho, Braga, Portugal, 2FEMTO-ST, Département MN2S, Besançon, France
Abstract | Extended Abstract

PO4032 Characterisation of a Combined Plasma Sensor and its Application to a Magnetron Sputtering Discharge
Thomas Welzel1, Karsten Harbauer1, Felix Kreis2, Klaus Ellmer1
1Helmholtz-Zentrum Berlin, Berlin, Germany, 2Freie Universität Berlin, Berlin, Germany
Abstract | Extended Abstract

PO4033 A active thermal probe for the measurements of energy influx depending on its direction in several plasma-technological processes
Ruben Wiese1, René Bartsch2, Georg Wiese1, Marco Häckel3
1INP Greifswald, Greifswald, Germany, 2Universität Darmstadt, Darmstadt, Germany, 3neoplas GmbH, Greifswald, Germany
Abstract | Extended Abstract

PO4034 Ion mass and energy distributions in the DC magnetron sputtering of AZO from metallic and ceramic targets
Christian Wilde1, Mykola Vinnichenko1
1Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany
Abstract | Extended Abstract

PO4035 Time resolved ion energy distribution measurements in pulsed plasmas
David Gahan1, Paul Scullin1, Boris Dolinaj1, Donal O'Sullivan1, Mike Hopkins1
1Impedans Ltd, Dublin, Ireland
Abstract | Extended Abstract

PO4036 Utilization of plasma key parameters for process stability
Tobias Grotjahn1, Sven Meier1, Ralf Rothe2
1Fraunhofer IWM, Freiburg, Germany, 2Plasmetrex GmbH, Berlin, Germany
Abstract | Extended Abstract

PO4037 Process control using spectroscopic monitoring for APCVD and CCVD applications
Kerstin Horn1, Thomas Schütte2, Norbert Eckardt3, Thomas Struppert1, Oliver Beier1, Arnd Schimanski1
1Innovent e.V., Jena, Germany, 2Plasus, Kissing, Germany, 3SURA Instruments GmbH, Jena, Germany
Abstract | Extended Abstract

PO4038 Measurements of the energies of negative ions produced in processing plasmas.
David Seymour1, J. A. Rees1, C. L. Greenwood1
1Hiden Analytical, Warrington, United Kingdom
Abstract | Extended Abstract

PO4039 Plasma Parameter Monitoring During Thin Film Silicon Solar Cell Production
Onno Gabriel1, Matthias Zelt1, Bernd Stannowski1, Rutger Schlatmann1
1PVcomB / Helmholtz-Zentrum Berlin, Berlin, Germany
Abstract | Extended Abstract

Poster - Electro and magneto functional films

PO4040 Simultaneous Plasma Laser Conditioning of Thin Semiconductor Layers
Alexander Gredner1, Stephan Wieneke1, Kai Schmidt2, Wolfgang Viöl1
1HAWK [n], Göttingen, Germany, 2Coherent GmbH, Göttingen, Germany
Abstract | Extended Abstract

PO4041 Systematic evaluation of thin electrically insulating layers on common engineering materials
Frank Schmaljohann1, Daniel Hagedorn1, Frank Löffler1
1Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
Abstract | Extended Abstract

PO4042 SILVER DOPED TINx NANOCOMPOSITIES: EFFECT OF COMPOSITION AND STRUCTURAL CHANGES IN THE ELECTRICAL RESPONSE OF THE FILMS
F. Vaz1, C. Lopes2, A. Ferreira2, S. Lanceros-Mendez2, N.P. Barradas3, E. Alves3, C. Fonseca4
1Minho University, Physics Department, Braga, Portugal, 2Minho University, Guimarães, Portugal, 3ITN, Sacavém, Portugal, 4Universidade Porto, Porto, Portugal
Abstract | Extended Abstract

PO4043 Electrical and optical properties of AlNxOy thin films deposited by reactive DC magnetron sputtering
Joel Borges1, Nicolas Martin2, Nuno Barradas3, Eduardo Alves3, Dominique Eyidi4, Marie France Beaufort4, Thierry Girardeau4, Fabien Paumier4, Filipe Vaz1, Luis Marques1
1Centre/Department of Physics, U. Minho, Braga, Portugal, 2FEMTO-ST, Département MN2S, Besançon, France, 3ITN, Sacavém, Portugal, 4Intitute PRIME, Université de Poitiers, Futuroscope Chasseneuil, France
Abstract | Extended Abstract

PO4044 Electrical properties of RECoO3 perovskite thin films versus the RE cation sizes (La, Nd, Sm)
Fabien Capon1, Alexis Boileau1, Silvere Barrat1, Jean-François Pierson1
1Institut Jean Lamour, Nancy, France
Abstract | Extended Abstract

PO4045 Ultra-shallow fluorine implantation from r.f. plasma as a method for improvement of electro-physical properties of MIS structures with PECVD gate dielectric layers
Małgorzata Kalisz1, Robert Mroczyński2
1Motor Transport Institute, Warsaw, Poland, 2Warsaw University of Technology, Warsaw, Poland
Abstract | Extended Abstract

PO4046 Stability of p- type ZnO Thin Films : Recent Progeress
Aryasomayajula Subrahmanyam1, Ramineni Muniswamy Naidu1
1IIT Madras, Chennai, India
Abstract | Extended Abstract

PO4047 Oxidation and nitridation of silicon surface by high-density inductively coupled plasma
Alexander Antonenko1, Vladimir Volodin1, Mikhael Efremov1, Gennady Kamaev1, Denis Marin1, Vladimir Terekhov2
1Institute of Semiconductors Phys. SB RAS, Novosibirsk, Russia, 2Voronezh State University, Voronezh, Russian Federation
Abstract | Extended Abstract

PO4048 Effects of annealing on the electrical and optical properties of AlNxOy thin films
Joel Borges1, Roxana Arvinte1, Nuno Barradas2, Eduardo Alves2, Sophie Camelio3, Thierry Girardeau3, Fabien Paumier3, Filipe Vaz1, Luis Marques1
1Centre/Department of Physics, U. Minho, Braga, Portugal, 2ITN, Sacavém, Portugal, 3Intitute PRIME, Université de Poitiers, Futuroscope Chasseneuil, France
Abstract | Extended Abstract

PO4049 Thin film growth of ZrB2 on 4H-SiC(0001) for potential electrical contact applications
Lina Tengdelius1, Jens Jensen1, Jun Lu1, Urban Forsberg1, Lars Hultman1, Erik Janzén1, Hans Högberg1
1Linköping University, Linköping, Sweden
Abstract | Extended Abstract

PO4050 Effect of Ni or Cr enrichment on the properties of magnetic Co-based sputter deposited coatings
Alain Billard1, alain billard1, Thomas Hauet2, Mohammad Arab Pour Yazdi1, Frederic Perry3, Eric Aubry4, Stephane mangin2
1LERMPS-UTBM, Belfort, France, 2IJL, vandoeuvre les nancy, France, 3PVDco, Baccarat, France, 4Nipson, Belfort, France
Abstract | Extended Abstract

PO4051 Structural, magnetic and mechanical investigations on Fe-Co-Hf-N / TiN thin multilayer coatings with combined wear resistant and ferromagnetic properties
Kathrin Krüger1, Michael Stüber1, Klaus Seemann1, Harald Leiste1, Sven Ulrich1, Hans-Jürgen Seifert1
1Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
Abstract | Extended Abstract

PO4052 Diamond-like carbon films for enhanced strain sensitivity
Mirjana Petersen1, Ralf Bandorf2, Günter Bräuer2, Claus-Peter Klages2
1TU Braunschweig | IOT, Braunschweig, Germany, 2Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany
Abstract | Extended Abstract

PO4053 PVD-based thin film temperature sensors for hot embossing and injection molding processes
Alexander Fromm1, Frank Burmeister1, Matthias Gurr1, Jan Hagen2, Marco Wirth1, Guenter Kleer1
1Fraunhofer IWM, Freiburg im Breisgau, Germany, 2Saint Gobain Sekurit Deutschland GmbH & Co. KG, Herzogenrath, Germany
Abstract | Extended Abstract

PO4054 Compliant metallic electrodes for Electroactive Polymer Actuators
Jörg Patscheider1, Florian Habrard2, Gabor Kovacs2
1Empa, Dübendorf, Switzerland, 2Laboratory for Mechanical Systems Engineering, Empa, Dübendorf, Switzerland
Abstract | Extended Abstract

Poster - Multilayer and nanocomposite films

PO4055 Formation of oxygen diffusion paths in nanoscaled TiN/AlN multilayers
Ulrike Ratayski1, Fjodor Klimaschin2, Uwe Mühle2, Michal Šíma3, David Rafaja2
1Institute of Materials Science, Freiberg, Germany, 2Institute of Materials Science, TU Bergakademie Freiberg, Freiberg, Germany, 3SHM Ltd., Šumperk, Czech Republic
Abstract | Extended Abstract

PO4056 Thermal Stability and Oxidation Resistance of TiAlN/TaAlN Multilayer Coatings
Robert Hollerweger1, Christian M. Koller2, Mirjam Arndt3, Peter Polcik4, Jörg Paulitsch2, Paul H. Mayrhofer2
1Physical Metallurgy + Materials Testing, Leoben, Austria, 2Christian Doppler Laboratory for Application Oriented Coating Development at the Department of Physical Metallurgy and Materials Testing, Montanuniversität Leoben, Franz-Josef-Str. 18, A-8700 Leoben, Austria, Leoben, Austria, 3OC Oerlikon Balzers AG, Iramali 18, LI-9469 Balzers, Principality of Liechtenstein, Balzers, Liechtenstein, 4Plansee Composite Materials GmbH, Siebenbürgerstr. 23, D-86983 Lechbruck am See, Germany, Lechbruck am See, Germany
Abstract | Extended Abstract

PO4057 Electronic and atomic structure of TiAlN-Ag multilayer coatings for thermal-barrier applications
RAUL GAGO-FERNANDEZ1, Alexander Rashkovskiy2, José Luis Endrino3, Dmitry Wainstein2, Anatoly Kovalev2
1ICMM-CSIC, Madrid, Spain, 2SPRG-Institute of Ferrous Metallurgy, Moscow, Russian Federation, 3Abengoa Research SL, Seville, Spain
Abstract | Extended Abstract

PO4058 Scratch behavior of AlTiN/TiN nanolayer and TiAlSiN/TiSiN/TiAlN multilayer nanocomposite coatings deposited on different substrates
Halil Caliskan1, Peter Panjan2, Miha Cekada2, Abdullah Cahit Karaoglanli1
1Bartin University, Bartin, Turkey, 2Jozef Stefan Institute, Ljubljana, Slovenia
Abstract | Extended Abstract

PO4059 Magnetron sputtering of Ti/Al multilayer coatings composed of nano-bilayers
Petr Stupka1, Jindrich Musil1, Sarka Proksova1, Radomir Cerstvy1, Petr Zeman1
1University of West Bohemia, Plzen, Czech Republic
Abstract | Extended Abstract

PO4060 Multilayer structure of WC-CrN and nanocrystalline diamond coatings
Michael Walock1, Yujiao Zou2, Frédéric Herbst3, Jeff Montgomery2, Denis Lagadrillere4, Luc Imhoff3, Corinne Nouveau1, Andrei Stanishevsky2, Aurelien Besnard1
1LaBoMaP, CER Arts et Métiers ParisTech, Cluny, France, 2Dept. of Physics, University of Alabama at Birmingham, Birmingham, AL, United States, 3ICB, CNRS-Université de Bourgogne, Dijon, France, 4LaBoMaP, ARTS, Cluny, France
Abstract | Extended Abstract

PO4061 Arc plasma deposition of multilayered a-C:H/TiSiC
Mariana BRAIC1, Alina VLADESCU1, Catalin-Nicolae ZOITA1, Mihai BALACEANU1, Viorel BRAIC1, Adrian Emil KISS1, Iulian PANA1, Mariana BRAIC1
1National Institute for Optoelectronics, Magurele - Bucharest, Romania
Abstract | Extended Abstract

PO4062 Laminated Composite on the Basis of Plasma Modified PTFE Films and Thin Aluminum Layers
Yablokov Mikhail1, Gilman Alla1, Kuznetsov Alexander1, Kechek'yan Alexander1
1ISPM RAS, Moscow, Russia
Abstract | Extended Abstract

PO4063 multilayer coating of flexible substrates in a roll-to-roll process
Karim Bahroun1, Christian Hopmann1, Henrik Behm1
1Institute of Plastics Processing, Aachen, Germany
Abstract | Extended Abstract

PO4064 Properties of nc-TiC/a-C:H films prepared by PVD-PECVD process at low and high ion bombardment
Pavel Soucek1, Tereza Schmidtova1, Lukas Zabransky1, Vilma Bursikova1, Petr Vasina1
1Masaryk University, Brno, Czech Republic
Abstract | Extended Abstract

PO4065 STRUCTURE AND TRIBOLOGICAL PROPERTIES OF TiAlSiN/TiSiN/TiAlN NANOSTRUCTURE COATINGS DEPOSITED BY MAGNETRON SPUTTERING
Peter Panjan1, Aleksandar Miletić2, Goran Dražič1, Matjaž Panjan1, Janez Kovač1, Branko Škorić2
1Jozef Stefan Institute, Ljubljana, Slovenia, 2University of Novi Sad, Faculty of Technical Science, Novi Sad, Serbia
Abstract | Extended Abstract

PO4066 A Novel Technique of Fabricating Nitride/Oxide Nanocomposite Coatings (Using Differential Pumping Co-sputtering System)
Masateru Nose1, Masateru Nose1, Wen-An Chiou2, Tokimasa Kawabata1, Yuji Hatano1, Kenji Matsuda1
1University of Toyama, Takaoka, Japan, 2University of Maryland, College Park, United States
Abstract | Extended Abstract

PO4067 The formation of superhard coatings ≥ 48 GPa in Ti-Hf-N (Fe) and analysis of their structure and properties.
Alex Pogrebnjak1, Alexander Pogrebnjak1, Vjacheslav Beresnev2, Dmitriy Kolesnikov3, Fadey Komarov4, Mikhail Kaverin1
1Sumy State University, Sumy, Ukraine, 2Kharkov National University, Kharkov, Ukraine, 3Belgorod State University, Belgorod, Russian Federation, 4Belarus State University, Minsk, Belarus
Abstract | Extended Abstract

PO4068 A study on the nano-composite MoN-Cu coatings by reactive magnetron sputtering with single alloying target
Duck Hyeong Jung1, Kyoung Il Moon1, Seung Yong Shin1, Caroline Sunyong Lee2
1Korea Institute of Industrial Technology, Incheon, South Korea, 2Division of Metallurgy & Materials Engineering, Hanyang University, Ansan, South Korea
Abstract | Extended Abstract

PO4069 Nanostructuring of Carbon:Nickel nanocomposite films using ion-beam assisted deposition
Matthias Krause1, Arndt Mücklich2, Monika Fritzsche2, Sibylle Gemming2, Gintautas Abrasonis2
1TU Dresden, Inst. für Festkörperphysik, Dresden, Germany, 2Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany
Abstract | Extended Abstract

PO4070 Electrochemical and mechanical properties of low friction nc-CrC/a-C:H and nc-WC/a-C:H coatings on construction materials deposited by magnetron sputtering.
Marcin Grobelny1, Dariusz Rudnik1, Marcin Makówka2, Katarzyna Włodarczyk2, Piotr Nolbrzak2, Wojciech Pawlak2
1Motor Transport Institute, Warsaw, Poland, 2Lodz University of Technology, Institute of Materials Science and Engineering, Lodz, Poland
Abstract | Extended Abstract

PO4071 Tailoring the Properties of Nanocomposite Ti-C-N Coatings Deposited by Industrial-Scale DC Magnetron Sputtering
Sascha Louring1, Nis Dam Madsen1, Michael Sillassen1, Anders Nørløv Berthelsen1, Bjarke Holl Christensen2, Klaus Pagh Almtoft2, Lars Pleth Nielsen2, Jørgen Bøttiger1
1Aarhus University, Aarhus, Denmark, 2Danish Technological Institute, Tribology Centre, Aarhus, Denmark
Abstract | Extended Abstract

PO4072 Mechanical and tribological properties of nanostructured Carbon:Nickel nanocomposite films
Matthias Krause1, Tim Kunze2, Arndt Mücklich3, Monika Fritzsche3, Robert Wenisch3, Sibylle Gemming3, Gintautas Abrasonis3
1TU Dresden, Inst. für Festkörperphysik, Dresden, Germany, 2TU Dresden, Theoretische Chemie, Dresden, Germany, 3Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany
Abstract | Extended Abstract

PO4073 Sulfur-doping of nc-TiC/a-C films by reactive sputtering
Jill Sundberg1, Erik Särhammar2, Harald Nyberg2, Tomas Nyberg2, Staffan Jacobson2, Ulf Jansson1
1Uppsala University, Dept of Chemistry, Uppsala, Sweden, 2Uppsala University, Dept of Engineering Sciences, Uppsala, Sweden
Abstract | Extended Abstract

PO4074 Industrialization study of NbC-based nanocomposite coatings, from non-reactive sputtering to reactive sputtering
Nils Nedfors1, Axel Flink2, Ulf Jansson1
1Uppsala University, Uppsala, Sweden, 2Impact Coatings, Linköping, Sweden
Abstract | Extended Abstract

PO4075 Mechanical properties of TiC/a-C(:H) nanocomposite coatings
Diego Martinez-Martinez1, O. Nieto-Faza2, J.Th.M. de Hosson3
1Materials innovation institute, Groningen, Netherlands, 2Facultad de Ciencias. Universidade de Vigo, Ourense, Spain, 3Materials innovation institute M2i, Department of Applied Physics, University of Groningen, Groningen, Netherlands
Abstract | Extended Abstract

PO4076 Adhesion studies of magnetron sputtered Ti-C-N, Ti-Si-C-N, Ti-Al-Si-C-N, and Ti-Al-C-O-N coatings
Dmitry Shtansky1, Andrey Bondarev2, Konstantin Kuptsov2, Philipp Kiryukhantsev-Korneev2, Mikhail Petrzhik2
1National Univ. Science + Technol. MISIS, Moscow, Russia, 2National Univ. Science & Technol. MISIS, Moscow, Russian Federation
Abstract | Extended Abstract

PO4077 Hybrid PVD/PECVD synthesis of Cu-polysiloxane nanocomposites
Bogdana Mitu1, Veronica Satulu2, Cristian Stancu2, Simona Somacescu3, Gheorghe Dinescu2
1Nat. Inst. Lasers, Plasma + Rad Physics, Magurele- Bucharest, Romania, 2Nat. Inst. Lasers, Plasma & Rad Physics, Magurele- Bucharest, Romania, 3Institute of Physical Chemistry “Ilie Murgulescu”, Bucharest, Romania
Abstract | Extended Abstract

PO4078 EFFECT OF ANNEALING TEMPERATURE ON THE MICROSTRUCTURE AND MECHANICAL PROPERTIES OF AG-DLC COATINGS
Noora Sousa Manninen1, Albano Cavaleiro1, Sandra Carvalho2
1Universidade de Coimbra, Coimbra, Portugal, 2Universdade do Minho, Guimarães, Portugal
Abstract | Extended Abstract

PO4079 Electrical Properties of Tin/Plasma Polymer Nanocomposites Investigated by 4 Point Probe Technique
Jindrich Matousek1, Rudolf Hrach2, Jaroslav Pavlik3, Stanislav Novak3, Lubomir Kovacik4
1UJEP, Usti nad Labem, Czech Republic, 2Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University, Prague, Czech Republic, 3Department of Physics, Faculty of Science, J. E. Purkinje University, Usti nad Labem, Czech Republic, 4Institute of Cellular Biology and Pathology, First Faculty of Medicine, Charles University, Prague, Czech Republic
Abstract | Extended Abstract

PO4080 SiC-2H nanoparticles embedded in a-SiCxNy:H thin film synthesized by N2/H2/Ar/hexamethyldisilazane microwave plasma
Mohammed BELMAHI1, Simon Bulou1, Laurent Le Brizoual2, Patrice Miska1, Teresa Toll-Duchanoy1, Eric Tomasella3, Ludovic De Poucques1, Robert Hugon1
1Université de Lorraine, IJL, Vandoeuvre-les-Nancy, France, 2Université de Nantes, IMN, Nantes, France, 3Université Blaise Pascal, ICCF, Aubière, France
Abstract | Extended Abstract

Poster - Plasma processing in liquids

PO4081    Influence of the anodic current pulse density on the oxide layers grown on Al 2024 by the plasma electrolytic oxidation process
Irina SHCHEDRINA1, T. TOLL-DUCHANOY1, G. HENRION1, A. NOMINE1, J. MARTIN1, T. CZERWIEC1, A. G. RAKOCH2, T. BELMONTE1
1Inst. Jean Lamour-CNRS-Univ. Lorraine, NANCY, France, 2National Institute of Science and Technology “MISiS”, MOSCOW, Russian Federation
Abstract | Extended Abstract

PO4082 Influence of the current pulse frequency on both the micro-discharges and the processed materials during the plasma electrolytic oxidation of aluminium alloys
Julien Martin1, Amer Melhem1, Teresa Duchanoy1, Gérard Henrion1, Thierry Czerwiec1, Alexandre Nominé1, Thierry Belmonte1
1Institut Jean Lamour, Nancy, France
Abstract | Extended Abstract

PO4083 Plasma electrolytic treatment process control based on spectral methods of diagnostics
Evgeny Parfenov1, Aleksey Yerokhin2, Stanislav Gorbatkov1, Allan Matthews2
1Ufa State Aviation Technical University, Ufa, Russia, 2University of Sheffield, Sheffield, United Kingdom
Abstract | Extended Abstract

PO4084 Effect of time in plasma electrolytic oxidation process on titanium substrate with addition nano alpha alumina powder in electrolyte and investigate wear behavior of coating
Sahand Sarbishei1, Mohammad Ali Faghihi Sani1, Mohammad Reza Mohammadi1
1Sharif University of Technology, Tehran, Iran
Abstract | Extended Abstract

PO4085 Pulsed Bipolar Plasma Electrolytic Oxidation of Replicated Open-Cell Aluminium Foams
Aleksey Yerokhin1, Taha Abdulla1, Russell Doodall1
1University of Sheffield, Sheffield, United Kingdom
Abstract | Extended Abstract

PO4086 SUBMERGED ARC SYNTHESIS OF MAGNETIC NANOPARTICLES
Naum Parkansky1, Gregory. Leitus2, Boris Alterkop1, Raymond Boxman1, Zahava Barkay1, Yury Rosenbergc1
1Tel Aviv University, Tel Aviv, Israel, 2Weizmann Institute of Science, Rehovot, Israel
Abstract | Extended Abstract

PO4087 The synthesis of silver nanoparticles via liquid phase plasma system
Sang-Chul Jung1, Hwan-Gi Kim1, Heon Lee1, Sung Hoon Park1, Sun-Jae Kim2, Byung Hoon Kim3
1Sunchon National University, Suncheon, South Korea, 2Sejong University, Seoul, South Korea, 3Chosun University, Gwangju, South Korea
Abstract | Extended Abstract

Poster - Mechanical film properties

PO4088 Residual stress analysis in chromium nitride as a function of coating conditions and post-treatments
Doris M. Fopp-Spori1, Arnd Müller1, Matthias Sobiech1
1OC Oerlikon Balzers AG, Balzers, Liechtenstein
Abstract | Extended Abstract

PO4089 Friction behavior of different material systems at the nanoscale
Carlos Figueroa1, Caroline Luvison1, Vânia Sonda1, César Aguzzoli1, Marcelo Maia da Costa2, Eduardo Tentardini3, María Farias1, Israel Baumvol4
1UCS, Caxias do Sul, Brazil, 2PUC-Rio, Rio de Janeiro, Brazil, 3UFS, Aracajú, Brazil, 4UCS and UFRGS, Caxias do Sul, Brazil
Abstract | Extended Abstract

PO4090 Tribological analyses of thin Cr2AlC films
Wolfgang Tillmann1, Jan Herper1
1Institute of Materials Engineering, Dortmund, Germany
Abstract | Extended Abstract

PO4091 Mechanical properties and structure of TiO2 films deposited on quartz and silicon substrates
Valeriy Kulikovsky1, Radim Ctvrtlik2, Vladimir Vorlicek3, Petr Bohac3, Lubomir Jastrabik3, Jan Filip4
1IPMS, Kiev, Ukraine/FZU AS CR, Prague, Czech Republic, 2Joint Laboratory of Optics, UP and FZU AS CR, Olomouc, Czech Republic, 3Institute of Physics, Academy of Sciences of the Czech Republic, Prague, Czech Republic, 4RCPTM, Department of Experimental Physics, Palacký University, Olomouc, Czech Republic
Abstract | Extended Abstract

PO4092 Study of the thermal stability and mechanical properties of co-sputtered Zr-Cu thin metal glass films
Mihai Apreutesei1, Steyer Philippe1, Joly Pottuz Lucile1, Sanchette Frederic2, Billard Alain3
1INSA Lyon MATEIS Laboratory, Villeurbanne, France, 2LERMPS, UTBM / LASMIS, UTT, Nogent, France, 3LERMPS-UTBM, Montbéliard, France
Abstract | Extended Abstract

PO4093 FATIGUE BEHAVIOR OF COATED AND UNCOATED CEMENTED CARBIDE INSERTS INVESTIGATED BY IMPACT TEST AT THE CUTTING EDGE VICINITY
Konstantinos-Dionysios Bouzakis1, Michail Batsiolas2, Georgios Skordaris1
1Aristoteles University of Thessaloniki, Thessaloniki, Greece, 2Fraunhofer Project Center Coatings in Manufacturing (PCCM), Thessaloniki, Greece
Abstract | Extended Abstract

PO4094 Subsurface micromechanims of damage in indented coated systems under cyclic loading conditions.
Giselle Ramírez1, Emilio Jimémez-Piqué2, Alvaro Mestra2, Isaac Valls3, Montserrat Vilaseca1, Daniel Casellas1, Luis Llanes2
1Fundació CTM Centre Tecnològic, Manresa, Barcelona, Spain, 2CIEFMA, Dept. de Ciència dels Materials i Enginyeria Metal•lúrgica, Universitat Politècnica de Catalunya, Barcelona, Spain, 3Rovalma S.A., Terrassa, Barcelona, Spain
Abstract | Extended Abstract

PO4095 Evaluation of the Elasto–Plastic Materials Behavior According to Different Models Applied in Indentation Hardness Tests
Roberto Hübler1, Eduardo Blando2, Jesum Fernandes2, Andre Vargas1
1GEPSI-LMN Physics Faculty of PUCRS, Porto Alegre, Brazil, 2Physics Institute of UFRGS, Porto Alegre, Brazil
Abstract | Extended Abstract

PO4096 The effective indenter concept and its uses in measurement analysis, especially for materials with time depending behaviour
Nick Bierwisch1
1SIO, Nordhausen, Germany
Abstract | Extended Abstract

PO4097 CONNECTIVITY OF ISO 14577 INSTRUMENTED INDENTATION TEST FOR HARDNESS AND MATERIALS PARAMETERS AND PHARR´S CONCEPT OF THE “EFFECTIVE INDENTER SHAPE”
Michael Griepentrog1, Philipp Reinstädt1
1BAM, Berlin, Germany
Abstract | Extended Abstract

PO4098 Application of micro and macro scratch tests measurement for testing of DLC and TiO2 thin films
Jan Mikšovský1, Jaroslav Lukeš2, Zdeněk Tolde3, Jan Remsa4, Tomáš Kocourek4, Miroslav Jelínek4
1FBME CTU in Prague, Prague, Czech Republic, 2Faculty of Mechanical Engineering, CTU in Prague, Prague, Czech Republic, 3CTU in Prague, Innovation Centre for Diagnostics And Application of Materials, Prague, Czech Republic, 4Institute of Physics ASCR, Prague, Czech Republic
Abstract | Extended Abstract

PO4099 High Temperature Scratch Testing of Hard PVD Coatings Deposited on Tool Steel
Jaume Pujante1, Montserrat Vilaseca1, Arnd Mueller2, Daniel Casellas1
1Fundació CTM Centre Tecnològic, Manresa, Spain, 2Oerlikon Balzers AG, Balzers, Liechtenstein
Abstract | Extended Abstract

PO4100 Waterdrop erosion of HVOF and PVD coatings
Benjamin Luiset1, Frederic Sanchette2, Alain Billard3, Dominique Schuster1
1EADS Innovation Works, Suresnes, France, 2Institut Charles Delaunay, Laboratoire des Systèmes Mécaniques et d’Ingénierie Simultanée – UTT, Antenne deNogent-52, Pôle Technologique de Haute-Champagne, Nogent, France, 3Laboratoire d'Etudes et de Recherches sur les Matériaux, les Procédés et les Surfaces – UTBM, Belfort, France
Abstract | Extended Abstract

PO4101 Scuffing resistance and rolling contact fatigue of WC/C coated spur gears
Remigiusz Michalczewski1, Witold Piekoszewski2, Marian Szczerek2, Waldemar Tuszynski2
1Institute for Sustainable Technologies, Radom, Poland, 2Institute for Sustainable Technologies – National Research Institute, Radom, Poland
Abstract | Extended Abstract

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