Program

Status as Jul 22, 2018

Monday, September 17, morningRoom Richard-Strauss

09:00 - 09:40

Official Opening
Farzaneh Arefi-Khonsari, Conference Chairman

Welcome Address

09:40 - 10:30
Opening Plenary Lecture
PL0000

Chair: Farzaneh Arefi-Khonsari, Paris, France
T.B.A.
Stuart Parkin
Max Planck Institut of Microstructure Physics, Halle, Germany

10:30 - 11:05

Coffee break

Oral Session

Session 1 - Plasma & ALD

Chairs:	Jari Koskinen, Espoo, Finnland
	Dirk Hegemann, St. Gallen, Switzerland

11:05 - 11:35
Keynote Lecture
KN0100

Benefits and challenges for atomic layer deposition in organo-metal halide perovskite solar cells
Mariadriana Creatore¹
¹Eindhoven University of Technology, Eindhoven, Netherlands
Abstract

11:35 - 11:55
OR0101

Diagnostics and Monitoring of Thermal and Plasma Enhanced Atomic Layer Deposition of Titanium Nitride
Oleg Zabeida¹, Sasha Woodward¹, Joseph Brindley², Frank Papa³, Ludvik Martinu¹
¹Polytechnique Montreal, Montreal, Canada, ²Gencoa Ltd., Liverpool, United Kingdom, ³Gencoa USA, Medina, United States
Abstract

11:55 - 12:15
OR0102

Plasma enhanced atomic layer deposition of metal thin films
Yuqing Xiong¹, Hengjiao Gao¹, Ni Ren¹
¹Lanzhou Institute of Physics, Lanzhou, China
Abstract

12:15 - 12:35
OR0103

Plasma Activation and Plasma-assisted ALD Surface Modification of Polymers for Improved Bonding and Adhesive Strength
Uwe Beck¹, Gundula Hidde¹, Thorid Lange¹, Hassan Gargouri², Irina Kärkkänen², Franziska Naumann²
¹BAM, Berlin, Germany, ²SENTECH Instruments GmbH, Berlin, Germany
Abstract

12:35 - 12:55
OR0104

Substrate effect on the dielectric constant of TiN films grown by plasma enhanced atomic layer deposition
In-Sung Park¹, Taehoon Lee¹, Seon Yong Kim¹, Sejong Seong¹, Yong Chan Jung¹, Jinho Ahn¹
¹Hanyang university, Seoul, South Korea
Abstract

12:55 - 14:20

Lunch break

Monday, September 17, morningRoom Zugspitze

Oral Session

Session 2 - Simulation and modeling of growth, structure and properties

Chairs:	Ivan Kolev, Venlo, The Netherlands
	Stephan Lucas, Namur, Belgium

11:05 - 11:35
Keynote Lecture
KN0200

Pathways for the preparation of technologically important metal oxides
Jiri Houska¹
¹University of West Bohemia, Plzen, Czech Republic
Abstract

11:35 - 11:55
OR0201

Thickness prediction and uniformity optimization of films deposited by PVD on complexes substrates in motion
Martin Evrard¹, Stéphane Lucas²
¹University of Namur - LARN, Namur, Belgium, ²University of Namur, Namur, Belgium
Abstract

11:55 - 12:15
OR0202

Particle Impact Induced Point Defect Structure of Titanium Nitride
Tobias Gergs¹, Denis Music², Thomas Mussenbrock³, Jan Trieschmann³
¹Ruhr University Bochum, Bochum, Germany, ²RWTH Aachen University, Aachen, Germany, ³Brandenburg University of Technology, Cottbus, Germany
Abstract

12:15 - 12:35
OR0203

Instabilities in magnetron plasma and electron transport
Adrien Revel¹, B. Vincent², S. Tsikata², T. Minea¹
¹LPGP, Orsay, France, ²ICARE, CNRS, Orléans, France
Abstract

12:35 - 12:55
OR0204

Magnetron Sputtering Depositions at Oblique Angles on Seeded Substrates for the Development of sub-Micron Structural and Chemical Patterns
Alberto Palmero¹, Aurelio Garcia-Valenzuela², Rafael Alvarez³, Bertrand Lacroix⁴, Victor Rico², Raul Gago⁵, Luis Vazquez⁵, Javier Solis⁶, Agustin R. Gonzalez-Elipe², José Cotrino³
¹Materials Science Institute of Seville, Seville, Spain, ²ICMS (CSIC-US), Seville, Spain, ³University of Seville, Seville, Spain, ⁴University of Cadiz, Cadiz, Spain,⁵ICMM (CSIC), Madrid, Spain, ⁶Instituto de Óptica (CSIC), Madrid, Spain
Abstract

12:55 - 14:20

Lunch break

Monday, September 17, morningRoom Olympia

Oral Session

Session 3 - Biomedical and biological applications I

Chairs:	Jacob Barz, Stuttgart, Germany
	Alessandro Patelli, Padova, Italy

11:05 - 11:35
Keynote Lecture
KN0300

Microstructural study of antibacterial Zr-Cu, Zr-Ag and Zr-Cu-Ag thin films
Jean-François PIERSON¹, Etienne ETIEMBLE¹, Galy NKOU BOUALA², Christelle DER LOUGHIAN³, Jaafar GHANBAJA¹, David HORWAT¹, Philippe STEYER²
¹Institut Jean Lamour, Nancy, France, ²MATEIS, Villeurbanne, France, ³Mateis, Villeurbanne, France
Abstract

11:35 - 11:55
OR0301

High performance antibacterial thin films for titanium biomedical components
Lucia Mendizabal¹, Ainara Lopez¹, Javier Barriga¹
¹IK4-Tekniker, Eibar, Spain
Abstract

11:55 - 12:15
OR0302

Plasma polymer based coatings with tailor-made antibacterial action
Jiří Kratochvíl¹, David Kahoun², Ján Štěrba², Jaroslava Lieskovská², Tereza Kretková¹, Jaroslav Kousal¹, Jan Hanuš¹, Ondřej Kylián¹, Vítězslav Straňák², Hynek Biederman¹
¹Charles University, Prague, Czech Republic, ²University of South Bohemia, České Budějovice, Czech Republic
Abstract

12:15 - 12:35
OR0303

Immobilization of bioactive molecules onto plasma treated biodegradable nanofibers for enhanced cell viability.
Anton Manakhov¹, Anastacia Solovieva²
¹NUST "MISiS", Moscow, Russia, ²SICEL, IGB RAS, Novosibirsk, Russian Federation
Abstract

12:35 - 12:55
OR0304

Assembly of vancomycin containing nano-capsules by means of aerosol-assisted atmospheric-pressure plasma
Chiara Lo Porto¹, Fabio Palumbo², Pietro Favia³
¹Dpt of Chemistry, University of Bari, Bari, Italy, ²Intsitute of Nanotechnology, CNR, Bari, Italy, ³Dpt. of Bioscience, University of Bari, Bari, Italy
Abstract

12:55 - 14:20

Lunch break

Monday, September 17, afternoonRoom Richard-Strauss

14:20 - 15:05
Plenary Lecture
PL0001

Chair: Günter Bräuer, Braunschweig, Germany
Plasma-based greenhouse gas conversion: Modeling the plasma chemistry and plasma reactor design to improve the application
Annemie Bogaerts¹
¹University of Antwerp, Antwerp, Belgium
Abstract

15:15 - 16:25

Poster Session 1, Foyer
Simulation and modeling of growth, structure and properties; Biomedical and biological applications; Energy production based coatings; Methods of in-situ process diagnostics

16:25 - 16:45

Coffee break

Oral Session

Session 4 - Energy production based coatings I

Chairs:	Elena Guillén Rodríguez, Steyr-Gleink, Austria
	Michael Wertheimer, Montreal, Canada

16:45 - 17:15
Keynote Lecture
KN0400

Continuous Atmospheric Pressure Plasma Enhanced CVD for the Large Area Deposition of TiO2-x Electron Transport Layers for PV Applications
Heather Yates¹, John Hodgkinson¹, Arnaud Walter², Sylvain Nicolay²
¹University of Salford, Salford, United Kingdom, ²CSEM, PV-Center, Neuchâtel, Switzerland
Abstract

17:15 - 17:35
OR0401

Plasma-technological barrier layers for flexible thin film solar modules
Andreas Schulz¹, Stefan Merli¹, Friedrich Kessler², Roland Würz², Matthias Walker¹
¹IGVP, University of Stuttgart, Stuttgart, Germany, ²Cent. f. Sol. Energy a. Hydr. Res. (ZSW), Stuttgart, Germany
Abstract

17:35 - 17:55
OR0402

Thin film solar modules (CIGS technology) on insulated steel substrate in R2R production for their integration into roofing elements
Adeline Lafort¹, Lionel Fourdrinier¹, Erwin Volon¹, Christophe Kempeneers¹
¹ACCS CRM group, Liège, Belgium
Abstract

17:55 - 18:15
OR0403

Reactive magnetron sputtering of Ta-doped SnO2 at low temperatures: carrier transport and role of negative ion bombardment
Stefan Seeger¹, Klaus Ellmer¹, Rainald Mientus¹, Michael Weise¹
¹OUT e.V., Berlin, Germany
Abstract

18:15 - 18:35
OR0404

Production of Photocatalytic Materials for Use in Plasma Methane Reforming
Samuel Capp¹, David A G Sawtell¹, Craig E Banks¹, Peter J Kelly¹, Zaenab Abd-Allah¹
¹Manchester Metropolitan University, Manchester, United Kingdom
Abstract

18:35 - 18:55
OR0405

Pulsed PECVD of vertically aligned SnS nanowalls for solar cell applications
Charlotte Ruhmlieb¹, Christian Strelow¹, Tobias Kipp¹, Alf Mews¹
¹Institute of Physical Chemistry, Hamburg, Germany
Abstract

Monday, September 17, afternoonRoom Zugspitze

14:20 - 15:05

Plenary Lecture PL0001, Room Richard-Strauss

15:15 - 16:25

Poster Session 1, Foyer

16:25 - 16:45

Coffee break

Oral Session

Session 5 - Methods of in-situ process diagnostics

Chairs:	Jörg Patscheider, Trübbach, Switzerland
	Ton Hurkmans, Venlo, The Netherlands

16:45 - 17:15
Keynote Lecture
KN0500

In-situ X-Ray Diffraction Measurements during Low Energy Ion Beam Etching
Darina Manova¹, Stephan Mändl¹
¹Leibniz Institute of Surface Engineering, Leipzig, Germany
Abstract

17:15 - 17:35
OR0501

Adjusting coating system properties: Time resolved in-situ coating stress measurements
Montgomery Jaritz¹, Stefan Wilski¹, Rainer Dahlmann¹, Christian Hopmann¹
¹Institute of plastics processing, Aachen, Germany
Abstract

17:35 - 17:55
OR0502

Optical monitoring of sputtered ultrathin TiN films
Jiri Bulir¹, Joris More Chevalier¹, Ladislav Fekete¹, Jarmila Remiasova¹, Martin Vondracek¹, Michal Novotny¹, Jan Lancok¹
¹Institute of Physics, CAS, Prague, Czech Republic
Abstract

17:55 - 18:15
OR0503

A remote plasma spectroscopy based method for monitoring of Atomic Layer Deposition processes
Joe Brindley¹, Benoit Daniel¹, Victor Bellido-Gonzalez¹
¹Gencoa Limited, Liverpool, United Kingdom
Abstract

18:15 - 18:35
OR0504

FTIR and visible optical characterization of SICN:H thin films deposited in Ar/TMS/N2 ECR PECVD plasma
Mohammed BELMAHI¹, Ziad AL HALLAK¹, Robert HUGON¹, Thomas Easwarakhanthan¹, Amanda Thouvenin¹, Philippe Pigeat¹, Ahmad Ahmad², Adnan NAJA², Laurent Thomas³
¹Institut Jean Lamour CNRS Lorraine Univ., Nancy, France, ²LPM , Université Libanaise, Tripoli, Lebanon, ³Laboratoire PROMES, Univ. Perpignan, PERPIGNAN, France
Abstract

18:35 - 18:55
OR0505

Cluster tool for in situ processing and characterization of thin films at high temperatures
Matthias Krause¹, Robert Wenisch², Frank Lungwitz¹, Irene Heras³, Ibon Azkona⁴, René Heller¹, René Hübner¹, Johannes von Borany¹, Sibylle Gemming¹, Ramon Escobar-Galindo⁵
¹Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany, ²PVcomB, Helmholtz-Zentrum Berlin, Berlin, Germany, ³University of Salamanca, Salamanca, Spain, ⁴Metal Estalki S.L., Zamudio, Spain, ⁵Universidad de Cádiz, Puerto Real, Spain
Abstract

Monday, September 17, afternoonRoom Olympia

14:20 - 15:05

Plenary Lecture PL0001, Room Richard-Strauss

15:15 - 16:25

Poster Session 1, Foyer

16:25 - 16:45

Coffee break

Oral Session

Session 6 - Biomedical and biological applications II

Chairs:	Jean-François Pierson, Nancy, France
	Pietro Favia, Bari, Italy

16:45 - 17:15
Keynote Lecture
KN0600

Plasma technology for surface modification of organ-on-a-chip devices
Jakob Barz¹, Christopher Probst¹, Peter Loskill¹, Christian Oehr¹
¹Fraunhofer IGB, Stuttgart, Germany
Abstract

17:15 - 17:35
OR0601

Tailored degradability of plasma polymers with semi-classical structure
Jaroslav Kousal¹, Zuzana Kolářová Rašková², Jana Sedlaříková², Artem Shelemin¹, Daniil Nikitin¹, Renata Tafiichuk¹, Hynek Biederman¹, Marián Lehocký²
¹Charles University, Prague, Czech Republic, ²Tomas Bata University in Zlin, Zlin, Czech Republic
Abstract

17:35 - 17:55
OR0602

Plasma polymerization of precursors containing stable radicals
Thomas Michl¹, Jakob Barz², Christian Oehr², Hans Griesser¹, Bryan Coad³
¹University of South Australia, Mawson Lakes, Australia, ²IGB Fraunhofer, Stuttgart, Germany, ³University of Adelaide, Adelaide, Australia
Abstract

17:55 - 18:15
OR0603

The role of confined water within plasma polymerized vertical gradient films in protein adsorption
Ezgi Bülbül¹, Dirk Hegemann¹, Manfred Heuberger¹
¹Empa, St. Gallen, Switzerland
Abstract

18:15 - 18:35
OR0604

Generation of functional coatings by atmospheric pressure plasma spraying for medical and technical applications
Thorben Kewitz¹, Holger Testrich¹, Antje Quade¹, Angela Kruth¹, Uta Schnabel¹, Klaus-Dieter Weltmann¹, Katja Fricke¹, Maik Fröhlich¹
¹INP Greifswald e.V., Greifswald, Germany
Abstract

18:35 - 18:55
OR0605

QTF-Based Mass Sensitive Immunosensor for Phenylketonuria Diagnosis
Hatice Ferda ÖZGÜZAR¹, Gizem KALELİ CAN², Hatice Ferda ÖZGÜZAR², Gözde Kabay², Mehmet MUTLU²
¹TOBB University of Technology and Econom, Ankara, Turkey, ²TOBB University of Economics &Technology, Ankara, Turkey
Abstract

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