Program
Monday, September 17, morningRoom Richard-Strauss
| 09:00 - 09:40 | Official Opening Prof. Farzaneh Arefi-Khonsari, Conference Chairwoman |
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| Welcome Address Dr. Sigrid Meierhofer, 1.Mayoress of Garmisch-Partenkirchen |
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| Welcome Address Pascale Delcomminette, CEO of Walloonia Brussels International (WBI) and Walloon Trade Agency (AWEX), Belgium |
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| 09:40 - 10:30 Opening Plenary Lecture PL0000 |
Chair: Farzaneh Arefi-Khonsari, Paris, France Beyond charge currents: spin and ion currents for future computing Technologies Stuart S. P. Parkin1 1MPI for Microstructure Physics, Halle, Germany Abstract |
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| 10:30 - 11:05 | Coffee break |
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| Oral Session | Session 1 - Plasma & ALD
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| 11:05 - 11:35 Keynote Lecture KN0100 |
Benefits and challenges for atomic layer deposition in organo-metal halide perovskite solar cells Mariadriana Creatore1 1Eindhoven University of Technology, Eindhoven, Netherlands Abstract |
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| 11:35 - 11:55 OR0101 |
Diagnostics and Monitoring of Thermal and Plasma Enhanced Atomic Layer Deposition of Titanium Nitride Oleg Zabeida1, Sasha Woodward1, Joseph Brindley2, Frank Papa3, Ludvik Martinu1 1Polytechnique Montreal, Montreal, Canada, 2Gencoa Ltd, Liverpool, United Kingdom, 3Gencoa USA, Medina, United States Abstract |
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| 11:55 - 12:15 OR0102 |
Plasma enhanced atomic layer deposition of metal thin films Yuqing Xiong1, Hengjiao Gao1, Ni Ren1 1Lanzhou Institute of Physics, Lanzhou, China Abstract |
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| 12:15 - 12:35 OR0103 |
Plasma Activation and Plasma-assisted ALD Surface Modification
of Polymers for Improved Bonding and Adhesive Strength Uwe Beck1, Gundula Hidde1, Thorid Lange1, Hassan Gargouri2, Irina Kärkkänen2, Franziska Naumann2 1BAM, Berlin, Germany, 2SENTECH Instruments GmbH, Berlin, Germany Abstract |
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| 12:35 - 12:55 OR0104 |
Substrate effect on the dielectric constant of TiN films grown by plasma enhanced atomic layer deposition In-Sung Park1, Taehoon Lee1, Seon Yong Kim1, Sejong Seong1, Yong Chan Jung1, Jinho Ahn1 1Hanyang university, Seoul, South Korea Abstract |
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| 12:55 - 14:20 | Lunch break |
Monday, September 17, morningRoom Zugspitze
| Oral Session | Session 2 - Simulation and modeling of growth, structure and properties
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| 11:05 - 11:35 Keynote Lecture KN0200 |
Pathways for the preparation of technologically important metal oxides Jiri Houska1 1University of West Bohemia, Plzen, Czech Republic Abstract |
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| 11:35 - 11:55 OR0201  |
Thickness prediction and uniformity optimization of films deposited by PVD on complexes substrates in motion Martin Evrard1, Stéphane Lucas2 1University of Namur - LARN, Namur, Belgium, 2University of Namur, Namur, Belgium Abstract |
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| 11:55 - 12:15 OR0202 |
Particle Impact Induced Point Defect Structure of Titanium Nitride Tobias Gergs1, Denis Music2, Thomas Mussenbrock3, Jan Trieschmann3 1Ruhr University Bochum, Bochum, Germany, 2RWTH Aachen University, Aachen, Germany, 3Brandenburg University of Technology, Cottbus, Germany Abstract |
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| 12:15 - 12:35 OR0203 |
Instabilities in magnetron plasma and electron transport Adrien Revel1, B. Vincent2, S. Tsikata2, T. Minea1 1LPGP, Orsay, France, 2ICARE, CNRS, Orléans, France Abstract |
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| 12:35 - 12:55 OR0204 |
Magnetron Sputtering Depositions at Oblique Angles on Seeded Substrates for the Development of sub-Micron Structural and Chemical Patterns Alberto Palmero1, Aurelio Garcia-Valenzuela2, Rafael Alvarez3, Bertrand Lacroix4, Victor Rico2, Raul Gago5, Luis Vazquez5, Javier Solis6, Agustin R. Gonzalez-Elipe2, José Cotrino3 1Materials Science Institute of Seville, Seville, Spain, 2ICMS (CSIC-US), Seville, Spain, 3University of Seville, Seville, Spain, 4University of Cadiz, Cadiz, Spain,5ICMM (CSIC), Madrid, Spain, 6Instituto de Óptica (CSIC), Madrid, Spain Abstract |
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| 12:55 - 14:20 | Lunch break |
Monday, September 17, morningRoom Olympia
| Oral Session | Session 3 - Biomedical and biological applications I
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| 11:05 - 11:35 Keynote Lecture KN0300 |
Microstructural study of antibacterial Zr-Cu, Zr-Ag and Zr-Cu-Ag thin films Jean-François PIERSON1, Etienne ETIEMBLE1, Galy NKOU BOUALA2, Christelle DER LOUGHIAN3, Jaafar GHANBAJA1, David HORWAT1, Philippe STEYER2 1Institut Jean Lamour, Nancy, France, 2MATEIS, Villeurbanne, France, 3Mateis, Villeurbanne, France Abstract |
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| 11:35 - 11:55 OR0301 |
High performance antibacterial thin films for titanium biomedical components Lucia Mendizabal1, Ainara Lopez1, Javier Barriga1 1IK4-Tekniker, Eibar, Spain Abstract |
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| 11:55 - 12:15 OR0302 |
Plasma polymer based coatings with tailor-made antibacterial action Jiří Kratochvíl1, David Kahoun2, Ján Štěrba2, Jaroslava Lieskovská2, Tereza Kretková1, Jaroslav Kousal1, Jan Hanuš1, Ondřej Kylián1, Vítězslav Straňák2, Hynek Biederman1 1Charles University, Prague, Czech Republic, 2University of South Bohemia, České Budějovice, Czech Republic Abstract |
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| 12:15 - 12:35 OR0303 |
Bactericide release-based antibacterial yet biocompatible and bioactive surfaces Dmitry Shtansky1, Irina Sukhorukova2, Alexander Sheveyko2, Sergey Ignatov3, Natalia Gloushankova4 1Nat. Univ. Science and Technology MISiS, Moscow, Russia, 2Nat. Univ. Science and Technology MISIS, Moscow, Russian Federation, 3SRC Applied Microbiol. Biotechnol., Obolensk, Russian Federation, 4Cancer Research Centre of RAMS, Moscow, Russian Federation Abstract |
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| 12:35 - 12:55 OR0304 |
Assembly of vancomycin containing nano-capsules by means of aerosol-assisted atmospheric-pressure plasma Chiara Lo Porto1, Fabio Palumbo2, Pietro Favia3 1Dpt of Chemistry, University of Bari, Bari, Italy, 2Intsitute of Nanotechnology, CNR, Bari, Italy, 3Dpt. of Bioscience, University of Bari, Bari, Italy Abstract |
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| 12:55 - 14:20 | Lunch break |
Monday, September 17, afternoonRoom Richard-Strauss
| 14:20 - 15:05 Plenary Lecture PL0001 |
Chair: Rony Snyders, Mons, Belgium Plasma-based greenhouse gas conversion: Modeling the plasma chemistry and plasma reactor design to improve the application Annemie Bogaerts1 1University of Antwerp, Antwerp, Belgium Abstract |
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| 15:15 - 16:25 | Poster Session 1, Foyer Simulation and modeling of growth, structure and properties; Biomedical and biological applications; Energy production based coatings; Methods of in-situ process diagnostics |
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| 16:25 - 16:45 | Coffee break |
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| Oral Session | Session 4 - Energy production based coatings I
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| 16:45 - 17:15 Keynote Lecture KN0400 |
Continuous Atmospheric Pressure Plasma Enhanced CVD for the Large Area Deposition of TiO2-x Electron Transport Layers for PV Applications Heather Yates1, John Hodgkinson1, Arnaud Walter2, Sylvain Nicolay2 1University of Salford, Salford, United Kingdom, 2CSEM, PV-Center, Neuchâtel, Switzerland Abstract |
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| 17:15 - 17:35 OR0401 |
Plasma-technological barrier layers for flexible thin film solar modules Andreas Schulz1, Stefan Merli1, Friedrich Kessler2, Roland Würz2, Matthias Walker1 1IGVP, University of Stuttgart, Stuttgart, Germany, 2Cent. f. Sol. Energy a. Hydr. Res. (ZSW), Stuttgart, Germany Abstract |
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| 17:35 - 17:55 OR0402 |
Thin film solar modules (CIGS technology) on insulated steel substrate in R2R production for their integration into roofing elements Adeline Lafort1, Lionel Fourdrinier1, Erwin Volon1, Christophe Kempeneers1 1ACCS CRM group, Liège, Belgium Abstract |
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| 17:55 - 18:15 OR0403 |
Reactive magnetron sputtering of Ta-doped SnO2 at low temperatures: carrier transport and role of negative ion bombardment Stefan Seeger1, Klaus Ellmer1, Rainald Mientus1, Michael Weise1 1OUT e.V., Berlin, Germany Abstract |
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| 18:15 - 18:35 OR0404 |
Production of Photocatalytic Materials for Use in Plasma Methane Reforming Samuel Capp1, David A G Sawtell1, Craig E Banks1, Peter J Kelly1, Zaenab Abd-Allah1 1Manchester Metropolitan University, Manchester, United Kingdom Abstract |
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| 18:35 - 18:55 OR0405 |
Pulsed PECVD of vertically aligned SnS nanowalls for solar cell applications Charlotte Ruhmlieb1, Christian Strelow1, Tobias Kipp1, Alf Mews1 1Institute of Physical Chemistry, Hamburg, Germany Abstract |
Monday, September 17, afternoonRoom Zugspitze
| 14:20 - 15:05 | Plenary Lecture PL0001, Room Richard-Strauss | ||||
| 15:15 - 16:25 | Poster Session 1, Foyer | ||||
| 16:25 - 16:45 | Coffee break |
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| Oral Session | Session 5 - Methods of in-situ process diagnostics
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| 16:45 - 17:15 Keynote Lecture KN0500 |
In-situ X-Ray Diffraction Measurements
during Low Energy Ion Beam Etching Darina Manova1, Stephan Mändl1 1Leibniz Institute of Surface Engineering, Leipzig, Germany Abstract |
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| 17:15 - 17:35 OR0501 |
Hyperspectral Imaging
a novel inline-capable tool for spatially resolved inspection of thin films Wulf Grählert1, Philipp Wollmann1, Oliver Throl1, Florian Gruber1, Stefan Kaskel1 1Fraunhofer IWS, Dresden, Germany Abstract |
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| 17:35 - 17:55 OR0502 |
Optical monitoring of sputtered ultrathin TiN films Jiri Bulir1, Joris More Chevalier1, Ladislav Fekete1, Jarmila Remiasova1, Martin Vondracek1, Michal Novotny1, Jan Lancok1 1Institute of Physics, CAS, Prague, Czech Republic Abstract |
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| 17:55 - 18:15 OR0503 |
A remote plasma spectroscopy based method for monitoring of Atomic Layer Deposition processes Joe Brindley1, Benoit Daniel1, Victor Bellido-Gonzalez1 1Gencoa Limited, Liverpool, United Kingdom Abstract |
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| 18:15 - 18:35 OR0504 |
Crystalline structured ultra thin film synthesis by nano clusters deposition using 3D magnetic confined magnetron source Jeon G. Han1, Wen Long2, Bibhuti B. Sahu2, Byeong J. Kim3, Eun H. Choi3 1Sungkyunkwan University, Suwon, Suwon, South Korea, 2Sungkyunkwan University, Suwon, Korea, Suwon, South Korea, 3Kwangwoon University, Seoul, Seoul, South Korea Abstract |
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| 18:35 - 18:55 OR0505 |
Cluster tool for in situ processing and characterization of thin films at high temperatures Matthias Krause1, Robert Wenisch2, Frank Lungwitz1, Irene Heras3, Ibon Azkona4, René Heller1, René Hübner1, Johannes von Borany1, Sibylle Gemming1, Ramon Escobar-Galindo5 1Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany, 2PVcomB, Helmholtz-Zentrum Berlin, Berlin, Germany, 3University of Salamanca, Salamanca, Spain, 4Metal Estalki S.L., Zamudio, Spain, 5Universidad de Cádiz, Puerto Real, Spain Abstract |
Monday, September 17, afternoonRoom Olympia
| 14:20 - 15:05 | Plenary Lecture PL0001, Room Richard-Strauss | ||||
| 15:15 - 16:25 | Poster Session 1, Foyer | ||||
| 16:25 - 16:45 | Coffee break |
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| Oral Session | Session 6 - Biomedical and biological applications II
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| 16:45 - 17:15 Keynote Lecture KN0600 |
Plasma technology for surface modification of organ-on-a-chip devices Jakob Barz1, Christopher Probst1, Peter Loskill1, Christian Oehr1 1Fraunhofer IGB, Stuttgart, Germany Abstract |
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| 17:15 - 17:35 OR0601 |
Tailored degradability of plasma polymers with semi-classical structure Jaroslav Kousal1, Zuzana Kolářová Rašková2, Jana Sedlaříková2, Artem Shelemin1, Daniil Nikitin1, Renata Tafiichuk1, Hynek Biederman1, Marián Lehocký2 1Charles University, Prague, Czech Republic, 2Tomas Bata University in Zlin, Zlin, Czech Republic Abstract |
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| 17:35 - 17:55 OR0602 |
Plasma polymerization of precursors containing stable radicals Thomas Michl1, Jakob Barz2, Christian Oehr2, Hans Griesser1, Bryan Coad3 1University of South Australia, Mawson Lakes, Australia, 2IGB Fraunhofer, Stuttgart, Germany, 3University of Adelaide, Adelaide, Australia Abstract |
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| 17:55 - 18:15 OR0603 |
The role of confined water within plasma polymerized vertical gradient films
in protein adsorption Ezgi Bülbül1, Dirk Hegemann1, Manfred Heuberger1 1Empa, St. Gallen, Switzerland Abstract |
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| 18:15 - 18:35 OR0604 |
Generation of functional coatings by atmospheric pressure plasma spraying for medical and technical applications Thorben Kewitz1, Holger Testrich1, Antje Quade1, Angela Kruth1, Uta Schnabel1, Klaus-Dieter Weltmann1, Katja Fricke1, Maik Fröhlich1 1INP Greifswald e.V., Greifswald, Germany Abstract |
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| 18:35 - 18:55 OR0605 |
QTF-Based Mass Sensitive Immunosensor for Phenylketonuria Diagnosis Hatice Ferda ÖZGÜZAR1, Gizem KALELİ CAN2, Hatice Ferda ÖZGÜZAR2, Gözde Kabay2, Mehmet MUTLU2 1TOBB University of Technology and Econom, Ankara, Turkey, 2TOBB University of Economics &Technology, Ankara, Turkey Abstract |