Industrial Program

Industrial Workshop

MEMS in our daily life
Tuesday, September 18, 2018, afternoon
Room Olympia

The industrial workshop focuses on applications and trends of plasma and surface processes for enabling MEMS and sensor technologies. Speakers from the industry will discuss the contribution of plasma surface technologies enabling functional device principles and improving performance based on specific film developments. Topics include vacuum process based coating and etching technologies especially for sensor and communication applications.

Industrial Exhibition

Tuesday, September 18, 2018
Wednesday, September 19, 2018

Present your Company at our
Industrial Exhibiton.

Further visibility for your Company
you can get with an advertisement
in the conference booklet.


This Workshop is organized by Michael Zeuner, scia Systems GmbH, Chemnitz, Germany in cooperation with the Society of Vacuum Coaters.

           
        © fotolia

Industrial Evening

Tuesday, September 18, 2018
Rooms of the Industrial Exhibition

Enjoy the delicious buffet and use the chance for networking and fruitful discussions.

 

15:15-15:45
IW01



MEMS at Bosch – Products and their hardware and process technology demands
Andrea Urban1
1Robert Bosch GmbH, Reutlingen, Germany
Abstract

15:45-16:05
IW02


Challenges in thin film deposition of magnetoresistive Sensors
Frederick Casper1, Jürgen Wahrhusen1, Ronald Lehndorff1
1Sensitec GmbH, Mainz, Germany
Abstract

16:05-16:25
IW03

Heatable Scanning Probes, from Data Storage to Nanolithography
Armin W. Knoll1
1IBM Research GmbH, Rüschlikon, Switzerland
Abstract

16:25-16:45
IW04

Piezoelectirc MEMS: Materials, Devices and Applications
U.Schmid, M.Schneider
Inst. of Sensor und Actuator Systems, TU, Wien, Austria
Abstract


16:45-17:15


Coffee break

17:15-17:35
IW05

Thin film solutions for MEMS and Sensors
Maurus Tschirky1, Bernd Heinz1, Jörg Patscheider1, Claudiu Falub1
1Evatec AG, Trübbach, Switzerland
Abstract


17:35-17:55
IW06

Plasma techniques as enabler for customized MEMS-application
Achim Bittner1
1Hahn-Schickard, Villingen-Schwenningen, Germany
Abstract


17:55-18:15
IW07

Advanced Ion Beam Trimming Technologies for Recent and Newly Developing MEMS-Applications
Matthias Nestler1, Thoralf Dunger1, Carsten Schulze1, Michael Zeuner1
1scia Systems GmbH, Chemnitz, Germany
Abstract

 

Also dedicated to the Main Topic of the Conference:

Monday, September 17, morning, Room Richard-Strauß

09:40 - 10:30
Opening Plenary Lecture
PL0000

Chair: Farzaneh Arefi-Khonsari, Paris, France
Beyond charge currents: spin and ion currents for future computing Technologies
Stuart S. P. Parkin1
1MPI for Microstructure Physics, Halle, Germany
Abstract