Conference Topics

Special Topic: MEMS in our daily life

 

1. Plasma and ion surface engineering

 

  • Plasma an ion source technologies

 

 

- New ion and plasma sources
- Pulsed plasmas including HiPIMS
- Industrial source technology
 
 
  • Plasmas in liquids

 

  • Atmospheric plasmas

 

 

- Arcjet and torch plasmas
- Atmospheric corona discharges
 
 
  • Particles and powders in plasmas

   
- Particle load control and avoidance
- Nanoparticle synthesis
- Particle treatment and functional nanoparticles
 
 
  • Properties of technological plasmas

 

 

- Plasma diagnostics and related process control 
- Plasma modelling
 

2. Surface modification technologies

 
  • Plasma treatment, cleaning and etching
   
- Principles of plasma surface interaction
- Surface cleaning and functionalization by plasma and radiation (UV, Laser)
- Effects on adhesion and bonding
- Plasma etching, pattern transfer and related effects
 

 

  • Physical vapor deposition - PVD

 

 
- Magnetron sputter deposition
- Vacuum arc deposition
- Plasma-activated evaporation
 

 

  • (Plasma-enhanced) chemical vapor deposition - (PE)CVD

 

 
- Low pressure and atmospheric plasma CVD 
- Plasma polymerization 
- Atomic layer deposition ALD
 

 

  • Other plasma based surface processing technologies

 

 

- Ion beam deposition and ion beam etching
- Ion and plasma immersion implantation
- Hybrid processes
 

  3. Coating applications and properties

 

  • Protective and tribological coatings

 

 

- Effects on standard tribological coatings
- Carbon based hard coatings
- Corrosion resistant coatings
- Large area scratch resistant coatings
- Barrier coatings for sensitive devices 
 

 

  • Optical coatings

 

 

- Optical multilayer coatings
- Interface and barrier engineering
- End point detection methods
 

 

  • Electrical and magnetic coatings

 

 

- Electrical contact coatings including conductive and photocatalytic oxides
- Sensors based on electrical effects
- Electrochrome coatings
- Magnetic coatings including magnetic multilayers
- Piezoelectric films for frequency filters and ultrasonic applications
- Structuring of electrical and magnetic coatings and related effects
 
 
  • Biomedical & biological applications

   
- Agriculture
- Biocompatible and biodegradable coatings
- Biofunctionalization of surfaces
- Plasma activated media
- Plasmamedicine
 
 
  • Energy production related coatings

   
- Coatings for photovoltaics and new call concepts
- Piezoelectric and thermoelectric films for energy harvesting
- Films for batteries and supercapacitors
- Coatings for fuel cell applications
 

  4. Characterization and simulation of films and processes

 

  • Simulation and modelling of growth, structure and properties

  • Analytics of film structures

   
- Chemical and crystal composition
- Geometrical and mechanical characterization (thickness, roughness,  stress)
- Optical properties
- Electric and magnetic properties
 

 

  • Methods of in-situ process diagnostics

   
- In-situ control and adjustment of film properties
- Process end-point detection
 

 

PSE 2018 Conference Topics [PDF]